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    • 2. 发明专利
    • DE102004048866A1
    • 2006-04-13
    • DE102004048866
    • 2004-10-07
    • LEYBOLD VAKUUM GMBH
    • VOELKER KARL-HEINRICHBEYER CHRISTIANGREVEN ALOIS
    • F04D27/00F04D19/04
    • A high rotational speed vacuum pump (10) includes a compressor (12), a drive motor (14) for driving said compressor (12), and a motor control unit (16) for operating said drive motor (14) at a constant nominal rotational frequency. Depending on the basic conditions, undesirably strong oscillations may occur at the compressor (12) during compressor operation at the nominal rotational frequency. These undesirably strong oscillations cause the bearings to be excessively stressed. To reduce the oscillation stress of the compressor and/or the vacuum pump, an activatable rotational frequency correction device (18) is associated with the motor control unit (16). The correction device constantly corrects the nominal frequency by a rotational frequency correction value of max. 10% of the nominal rotational frequency when the rotational frequency correction device (18) is activated. This allows the rotational frequency of the drive motor (14) to be changed in a simple manner when strong natural oscillations of the compressor (12) and/or the vacuum pump (10) occur such that resonance effects and the like can be avoided.
    • 6. 发明专利
    • DE102005041501A1
    • 2007-03-08
    • DE102005041501
    • 2005-09-01
    • LEYBOLD VAKUUM GMBH
    • GREVEN ALOISHARIG CHRISTIAN
    • F04D27/00F04D19/04
    • A vacuum turbomolecular pump (10) is driven by a brushless direct-current drive motor (16) comprising stator coils and a permanent-magnetically excited motor rotor. When rotating, the motor rotor produces an electromotive force oriented counter to the direction of rotation. A motor controller (22) is connected to the stator coils and which generates a current from the supply voltage, this current being induced in the stator coils. In addition, a rotational frequency regulator (32) limits the rotational frequency (f) of the drive motor (16) to a nominal rotational frequency (fN). A power supply (20) is connected to the motor controller (22) and supplies a constant direct current voltage as a supply voltage (UV) for the motor controller (22). The power supply (20) is designed so that the constant supply voltage (UV) is low enough that, at a limit rotational frequency (fG), the electromotive force is equal to the drive force that can be maximally generated by the motor controller (22) and by the stator coils. The limit rotational frequency (fG) is less than 1.3 times the nominal rotational frequency (fN). As a result, the motor output is limited and the rotational frequency of the drive motor (16) is physically restricted to a limit rotational frequency (fG) in a reliable manner.