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    • 8. 发明申请
    • IMPROVED INK JET PRINTHEADS AND METHODS THEREFOR
    • 改进的喷墨打印头及其方法
    • WO02057084A2
    • 2002-07-25
    • PCT/US0147666
    • 2001-10-22
    • LEXMARK INT INC
    • POWERS JAMES HAROLDSULLIVAN CARL EDMOND
    • B41J2/05B41J2/16B41J2/04
    • B41J2/1603B41J2/1623B41J2/1628B41J2/1631B41J2/1634B41J2/1645B41J2/1646
    • The invention provides a method for making ink feed vias (14) in semiconductor silicon substrate chips (10) for an ink jet printhead (26) and ink jet printheads containing silicon chips made by the method. The method includes applying an etch stop layer to a first surface of the silicon chip having a thickness ranging from about 300 to 800 microns, dry etching individual ink vias through the thickness of the silicon chip up to the etch stop layer from a surface opposite the first surface and forming holes in the etch stop layer to individually fluidly connect with the ink vias using a mechanical technique. Substantially vertical wall vias are etched through the thickness of the silicon chip using the method. As opposed to conventional ink via formation techniques, the method significantly improves the throughput of silicon chip and reduces losses due to chip breakage and cracking. The resulting chips are more reliable for long term printhead use.
    • 本发明提供一种用于在用于喷墨打印头(26)的半导体硅衬底芯片(10)中制造墨水供给通路(14)的方法以及通过该方法制造的含有硅芯片的喷墨打印头。 该方法包括将蚀刻停止层施加到厚度范围为约300至800微米的硅芯片的第一表面,从与所述硅芯片相对的表面直到蚀刻停止层的干蚀刻单独的墨通孔 第一表面和在蚀刻停止层中形成孔以使用机械技术单独地与油墨通孔流体连接。 使用该方法通过硅芯片的厚度蚀刻基本上垂直的壁通孔。 与传统的油墨通孔形成技术相反,该方法显着提高了硅芯片的生产量,并减少了由于断屑和破裂造成的损耗。 所得到的芯片对于长期打印头使用更可靠。