专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20060288941A1 Evaporation source for evaporating an organic 有权
标题翻译：用于蒸发有机物的蒸发源
公开(公告)号：US20060288941A1
公开(公告)日：2006-12-28
申请号：US11514266
申请日：2006-09-01
申请人： Kyung-Soo Yi , Chul-Young Jang , Sung-Jae Jung , Yoon-Heung Tak , Sung-Tae Kim , Gol-Hee Lee
发明人： Kyung-Soo Yi , Chul-Young Jang , Sung-Jae Jung , Yoon-Heung Tak , Sung-Tae Kim , Gol-Hee Lee
IPC分类号： C23C16/00
CPC分类号： C23C14/12 , C23C14/243
摘要： The present invention relates to an evaporation source for evaporating an organic electroluminescent layer. In particular, the present invention relates to the evaporation source preventing an aperture, through which a vaporized evaporation material is emitted, from being clogged by restricting heat transfer to outward. The evaporation source according to the present invention includes a cell retaining an evaporation material therein; a cell cap installed on the upper part of the cell and having a cell cap aperture for emitting a vaporized evaporation material; an external wall placed in the outside of the cell to support a heating means set up at the outside of the cell; a cover placed above the cell cap, fixed to the upper end of the external wall, and having a cover aperture corresponding to the cell cap aperture; and a shut-off plate placed between the cover and the cell cap and having a shut-off plate aperture corresponding to the cell cap aperture and the cover aperture in the center of the shut-off plate.
摘要翻译：本发明涉及蒸发有机电致发光层的蒸发源。特别地，本发明涉及防止通过限制向外传热的方式堵塞蒸发蒸发材料的孔的蒸发源。根据本发明的蒸发源包括在其中保留蒸发材料的电池; 电池盖安装在电池的上部并具有用于发射汽化蒸发材料的电池盖孔; 设置在电池外部的外壁，以支撑设置在电池外部的加热装置; 固定在外壁的上端，并具有对应于电池盖孔的盖孔的盖子上的盖子; 以及置于盖和电池盖之间并具有对应于电池盖开口的关闭板孔和关闭板中心的盖孔的截止板。

2. 发明申请

US20050039684A1 Evaporation source for evaporating an organic electroluminescent layer 审中-公开
标题翻译：用于蒸发有机电致发光层的蒸发源
公开(公告)号：US20050039684A1
公开(公告)日：2005-02-24
申请号：US10909353
申请日：2004-08-03
申请人： Kyung-Soo Yi , Chul-Young Jang , Sung-Jae Jung , Yoon-Heung Tak , Sung-Tae Kim , Gol-Hee Lee
发明人： Kyung-Soo Yi , Chul-Young Jang , Sung-Jae Jung , Yoon-Heung Tak , Sung-Tae Kim , Gol-Hee Lee
IPC分类号： H05B33/10 , C23C14/24 , H01L51/50 , C23C16/00
CPC分类号： C23C14/12 , C23C14/243
摘要： The present invention relates to an evaporation source for evaporating an organic electroluminescent layer. In particular, the present invention relates to the evaporation source preventing an aperture, through which a vaporized evaporation material is emitted, from being clogged by restricting heat transfer to outward. The evaporation source according to the present invention includes a cell retaining an evaporation material therein; a cell cap installed on the upper part of the cell and having a cell cap aperture for emitting a vaporized evaporation material; an external wall placed in the outside of the cell to support a heating means set up at the outside of the cell; a cover placed above the cell cap, fixed to the upper end of the external wall, and having a cover aperture corresponding to the cell cap aperture; and a shut-off plate placed between the cover and the cell cap and having a shut-off plate aperture corresponding to the cell cap aperture and the cover aperture in the center of the shut-off plate.
摘要翻译：本发明涉及蒸发有机电致发光层的蒸发源。特别地，本发明涉及防止通过限制向外传热的方式堵塞蒸发蒸发材料的孔的蒸发源。根据本发明的蒸发源包括在其中保留蒸发材料的电池; 电池盖安装在电池的上部并具有用于发射汽化蒸发材料的电池盖孔; 设置在电池外部的外壁，以支撑设置在电池外部的加热装置; 固定在外壁的上端，并具有对应于电池盖孔的盖孔的盖子上的盖子; 以及置于盖和电池盖之间并具有对应于电池盖开口的关闭板孔和关闭板中心的盖孔的截止板。

3. 发明授权

US09159591B2 Batch type apparatus for manufacturing semiconductor devices 有权
标题翻译：用于制造半导体器件的批式装置
公开(公告)号：US09159591B2
公开(公告)日：2015-10-13
申请号：US13614321
申请日：2012-09-13
申请人： Cheol-Kyu Yang , Seog-Min Lee , Chul-Young Jang , Dong-Min Son , Byung-Ho Ahn , Du-Han Jeon , Yong-Kyu Joo , Sang-Cheol Ha
发明人： Cheol-Kyu Yang , Seog-Min Lee , Chul-Young Jang , Dong-Min Son , Byung-Ho Ahn , Du-Han Jeon , Yong-Kyu Joo , Sang-Cheol Ha
IPC分类号： H01L21/67 , C23C16/455
CPC分类号： H01L21/67017 , C23C16/455 , C23C16/45563 , C23C16/45568 , C23C16/45578 , C23C16/45587 , H01L21/67109
摘要： A batch type apparatus may include a tube; a boat configured to receive a plurality of semiconductor substrates, the boat vertically moved into the tube; a gas nozzle vertically arranged in the tube, the tube having a first portion and a second portion upwardly extended from the first portion; a gas pipe for supplying reaction gases to the gas nozzle, the gas pipe having a horizontal extension and a vertical extension, and the vertical extension extended in the gas nozzle; a fixing member for fixing the first portion of the gas nozzle to the gas pipe, the fixing member having strength higher than that of the gas nozzle; and a clamping member for clamping the gas pipe to the tube. Therefore, breakage of the gas nozzle may be suppressed.
摘要翻译：分批式装置可以包括管; 船，其构造成接收多个半导体衬底，所述船垂直地移动到所述管中; 垂直布置在所述管中的气体喷嘴，所述管具有从所述第一部分向上延伸的第一部分和第二部分; 用于向气体喷嘴提供反应气体的气体管道，气体管道具有水平延伸部和垂直延伸部分，并且在气体喷嘴中延伸的垂直延伸部分; 固定构件，用于将气体喷嘴的第一部分固定到气体管，固定构件的强度高于气体喷嘴的强度; 以及用于将气体管道夹紧到管子的夹紧构件。因此，可以抑制气体喷嘴的破损。

4. 发明申请

US20130167774A1 BATCH TYPE APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES 有权
标题翻译：用于制造半导体器件的批量类型设备
公开(公告)号：US20130167774A1
公开(公告)日：2013-07-04
申请号：US13614321
申请日：2012-09-13
申请人： Cheol-Kyu Yang , Seong-Min Lee , Chul-Young Jang , Dong-Min Son , Byung-Ho Ahn , Du-Han Jeon , Yong-Kyu Joo , Sang-Cheol Ha
发明人： Cheol-Kyu Yang , Seong-Min Lee , Chul-Young Jang , Dong-Min Son , Byung-Ho Ahn , Du-Han Jeon , Yong-Kyu Joo , Sang-Cheol Ha
IPC分类号： H01L21/46 , B05B1/00
CPC分类号： H01L21/67017 , C23C16/455 , C23C16/45563 , C23C16/45568 , C23C16/45578 , C23C16/45587 , H01L21/67109
摘要： A batch type apparatus may include a tube; a boat configured to receive a plurality of semiconductor substrates, the boat vertically moved into the tube; a gas nozzle vertically arranged in the tube, the tube having a first portion and a second portion upwardly extended from the first portion; a gas pipe for supplying reaction gases to the gas nozzle, the gas pipe having a horizontal extension and a vertical extension, and the vertical extension extended in the gas nozzle; a fixing member for fixing the first portion of the gas nozzle to the gas pipe, the fixing member having strength higher than that of the gas nozzle; and a clamping member for clamping the gas pipe to the tube. Therefore, breakage of the gas nozzle may be suppressed.
摘要翻译：分批式装置可以包括管; 船，其构造成接收多个半导体衬底，所述船垂直地移动到所述管中; 垂直布置在所述管中的气体喷嘴，所述管具有从所述第一部分向上延伸的第一部分和第二部分; 用于向气体喷嘴提供反应气体的气体管道，气体管道具有水平延伸部和垂直延伸部分，并且在气体喷嘴中延伸的垂直延伸部分; 固定构件，用于将气体喷嘴的第一部分固定到气体管，固定构件的强度高于气体喷嘴的强度; 以及用于将气体管道夹紧到管子的夹紧构件。因此，可以抑制气体喷嘴的破损。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式