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    • 6. 发明授权
    • Fabricating method for micro gas sensor and the same
    • 微气体传感器的制造方法及其相同
    • US08293556B2
    • 2012-10-23
    • US12810850
    • 2008-12-26
    • Kwang Bum ParkSeong Dong KimJoon Shik ParkMin Ho Lee
    • Kwang Bum ParkSeong Dong KimJoon Shik ParkMin Ho Lee
    • H01L21/00G01N9/00
    • G01N27/128
    • There are provided a micro gas sensor and a method for fabricating the same that comprises a micro heater formed inside a polysilicon membrane by doping impurities into a specific region of the polysilicon membrane positioned under a gas sensing substance, thereby improving thermal structural stability and making it easy to form the gas sensing substance. The micro gas sensor comprises: a micro heater formed by doping impurities into polysilicon vapor-deposited on a substrate on which a first insulating layer is formed; a polysilicon membrane for decreasing a heat loss of the micro heater; a power electrode for supplying power and a temperature measurement electrode for measuring a temperature, positioned at both ends of the micro heater; a second insulating layer formed on the micro heater; a sensing substance formed on the second insulating layer, for sensing a gas; and a sensing electrode for measuring a change in properties of the sensing substance. The method for fabricating a micro gas sensor comprises steps of: forming polysilicon on a substrate on which a first insulating layer is formed; forming a micro heater by doping impurities into the polysilicon; forming electrodes at both ends of the micro heater; forming a second insulating layer on the micro heater; forming a sensing substance on the second insulating layer; and forming a sensing electrode on the sensing substance.
    • 提供一种微气体传感器及其制造方法,其包括通过将杂质掺杂到位于气体感测物质下方的多晶硅膜的特定区域中而形成在多晶硅膜内部的微加热器,从而提高热结构稳定性并使其成为 容易形成气体传感物质。 微气体传感器包括:通过将杂质掺杂到形成有第一绝缘层的基板上的多晶硅中形成的微加热器; 用于减少微加热器的热损失的多晶硅膜; 用于供电的电源电极和位于微加热器两端的用于测量温度的温度测量电极; 形成在所述微加热器上的第二绝缘层; 形成在所述第二绝缘层上的用于检测气体的感测物质; 以及用于测量感测物质的性质变化的感测电极。 制造微气体传感器的方法包括以下步骤:在其上形成有第一绝缘层的基板上形成多晶硅; 通过将杂质掺杂到多晶硅中形成微加热器; 在微加热器的两端形成电极; 在所述微加热器上形成第二绝缘层; 在所述第二绝缘层上形成感测物质; 以及在感测物质上形成感测电极。
    • 7. 发明申请
    • FABRICATING METHOD FOR MICRO GAS SENSOR AND THE SAME
    • 微气体传感器及其制造方法
    • US20100314700A1
    • 2010-12-16
    • US12810850
    • 2008-12-26
    • Kwang Bum ParkSeong Dong KimJoon Shik ParkMin Ho Lee
    • Kwang Bum ParkSeong Dong KimJoon Shik ParkMin Ho Lee
    • H01L29/66H01L21/28
    • G01N27/128
    • There are provided a micro gas sensor and a method for fabricating the same that comprises a micro heater formed inside a polysilicon membrane by doping impurities into a specific region of the polysilicon membrane positioned under a gas sensing substance, thereby improving thermal structural stability and making it easy to form the gas sensing substance. The micro gas sensor comprises: a micro heater formed by doping impurities into polysilicon vapor-deposited on a substrate on which a first insulating layer is formed; a polysilicon membrane for decreasing a heat loss of the micro heater; a power electrode for supplying power and a temperature measurement electrode for measuring a temperature, positioned at both ends of the micro heater; a second insulating layer formed on the micro heater; a sensing substance formed on the second insulating layer, for sensing a gas; and a sensing electrode for measuring a change in properties of the sensing substance. The method for fabricating a micro gas sensor comprises steps of: forming polysilicon on a substrate on which a first insulating layer is formed; forming a micro heater by doping impurities into the polysilicon; forming electrodes at both ends of the micro heater; forming a second insulating layer on the micro heater; forming a sensing substance on the second insulating layer; and forming a sensing electrode on the sensing substance.
    • 提供一种微气体传感器及其制造方法,其包括通过将杂质掺杂到位于气体感测物质下方的多晶硅膜的特定区域中而形成在多晶硅膜内部的微加热器,从而提高热结构稳定性并使其成为 容易形成气体传感物质。 微气体传感器包括:通过将杂质掺杂到形成有第一绝缘层的基板上的多晶硅中形成的微加热器; 用于减少微加热器的热损失的多晶硅膜; 用于供电的电源电极和位于微加热器两端的用于测量温度的温度测量电极; 形成在所述微加热器上的第二绝缘层; 形成在所述第二绝缘层上的用于检测气体的感测物质; 以及用于测量感测物质的性质变化的感测电极。 制造微气体传感器的方法包括以下步骤:在其上形成有第一绝缘层的基板上形成多晶硅; 通过将杂质掺杂到多晶硅中形成微加热器; 在微加热器的两端形成电极; 在所述微加热器上形成第二绝缘层; 在所述第二绝缘层上形成感测物质; 以及在感测物质上形成感测电极。
    • 8. 发明申请
    • DENTAL INSTRUMENT FOR CUTTING SOFT TISSUE
    • 牙科切割软组织仪器
    • US20110136075A1
    • 2011-06-09
    • US13058693
    • 2009-08-11
    • Kwang Bum ParkKyoung Ho Ryoo
    • Kwang Bum ParkKyoung Ho Ryoo
    • A61C3/02
    • A61C3/02A61B17/3205A61B17/32075A61B17/322A61B2017/00969A61C3/00A61C8/0089
    • Disclosed is a dental instrument for cutting soft tissue. The dental instrument for cutting soft tissue according to the present invention includes: a main body having an inlet portion for inserting soft tissue to be cut into the main body; a cutter blade arranged in the main body such that at least a part of the cutter blade is exposed outwardly through the inlet portion; and a lid for covering the upper portion of the main body. The cutter blade includes a first cutter blade having a first cut depth, and a second cutter blade arranged in the vicinity of the first cutter blade, and which has a second cut depth shallower than the first cut depth. The dental instrument of the present invention makes it possible to cut the soft tissue in the deep part of a mouth in an easy and simple process, thereby improving the convenience of soft tissue implantation.
    • 公开了一种用于切割软组织的牙科器械。 根据本发明的用于切割软组织的牙科用具包括:主体,其具有用于将待切割的软组织插入主体的入口部分; 切割刀片,布置在所述主体中,使得所述切割刀片的至少一部分通过所述入口部分向外露出; 以及用于覆盖主体的上部的盖。 刀片包括具有第一切割深度的第一切割刀片和布置在第一切割刀片附近的第二切割刀片,并且具有比第一切割深度浅的第二切割深度。 本发明的牙科器械能够容易且简单地切割口腔深部的软组织,从而提高软组织植入的方便性。
    • 9. 发明申请
    • DENTAL IMPLANT PACKAGE
    • 牙科植入物包
    • US20100065443A1
    • 2010-03-18
    • US12441861
    • 2006-12-13
    • Kwang Bum ParkKyoung Ho RyooSeok Kyu ChoiHae Yong Lee
    • Kwang Bum ParkKyoung Ho RyooSeok Kyu ChoiHae Yong Lee
    • A61C19/10
    • A61C8/0087
    • A dental implant package includes a main body having a partition portion that is formed therein and separates a fixture accommodation space accommodating a fixture of a dental implant from an auxiliary accommodation space accommodating any of a healing abutment and a cover screw, wherein a first opening and a second opening are formed at both ends of the main body, a leveler accommodated in at least a part of the fixture accommodation space and supporting the fixture accommodated in the fixture accommodation space at a predetermined height, a first cover detachably coupled to the main body and blocking the first opening, and a second cover detachably coupled to the main body and blocking the second opening. The fixture and any of the healing abutment and the cover screw can be stored with a simple structure. Also, the fixture and the healing abutment or the cover screw can be easily pulled out during an implant operation.
    • 牙科植入物包装体包括具有形成在其中的分隔部分的主体,其将容纳牙科植入物的固定物的固定容纳空间与容纳任何愈合基牙和盖螺钉的辅助容纳空间分开,其中第一开口和 第二开口形成在主体的两端,容纳在固定装置容纳空间的至少一部分中的调平器,并以预定的高度支撑容纳在固定装置容纳空间中的固定装置;第一盖,可拆卸地联接到主体 并且阻挡第一开口,以及可拆卸地联接到主体并阻塞第二开口的第二盖。 固定装置和任何一个愈合的基座和盖螺丝可以以简单的结构储存。 此外,在植入操作期间,夹具和愈合基座或盖螺钉可以容易地拉出。