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    • 3. 发明申请
    • Electrostatic Chuck And Chuck Base Having Cooling Path For Cooling Wafer
    • 静电夹头和卡盘底座具有用于冷却晶片的冷却路径
    • US20070274020A1
    • 2007-11-29
    • US10583978
    • 2004-12-22
    • Hee ParkJin KimKyu LeeKwan ParkSang OhHwi Jang
    • Hee ParkJin KimKyu LeeKwan ParkSang OhHwi Jang
    • H01L21/3065
    • H01L21/67109H01L21/6831
    • The electrostatic chuck comprises a chuck base for supporting a wafer, a dielectric film mounted on the chuck base, the dielectric film having an electrode for supplying direct current voltage to provide an electrostatic force to fix the wafer, the electrode disposed in the dielectric film, and a cooling channel for supplying refrigerant to the dielectric film to control the temperature of the wafer. At least two first cooling channel parts are formed at the surface of the dielectric film corresponding to the edge part of the wafer such that the first cooling channel parts form concentric circles, second cooling channel parts formed at the surface of the dielectric film such that the first cooling channel parts are connected to each other through the second cooling channel parts, first through channels formed through the dielectric film for supplying the refrigerant to the first and second cooling channel parts, and a second through channel formed through the center of the dielectric film for supplying the refrigerant to the center of the wafer.
    • 静电卡盘包括用于支撑晶片的卡盘基座,安装在卡盘基座上的电介质膜,该电介质膜具有用于提供直流电压以提供固定晶片的静电力的电极,设置在电介质膜中的电极, 以及用于向电介质膜供给制冷剂以控制晶片的温度的冷却通道。 至少两个第一冷却通道部分形成在对应于晶片的边缘部分的电介质膜的表面上,使得第一冷却通道部分形成同心圆,形成在电介质膜的表面处的第二冷却通道部分使得 第一冷却通道部分通过第二冷却通道部分相互连接,首先通过用于将制冷剂供应到第一和第二冷却通道部分的介电膜形成的通道,以及通过介电膜中心形成的第二通道 用于将制冷剂供应到晶片的中心。
    • 6. 发明申请
    • Washing apparatus
    • 洗衣机
    • US20060081014A1
    • 2006-04-20
    • US11221913
    • 2005-09-09
    • Dong ChoiSoo KimKyu LeeYong AhnMin Kim
    • Dong ChoiSoo KimKyu LeeYong AhnMin Kim
    • D06F37/00D06F39/00
    • D06F39/12D06F39/081
    • Disclosed herein is a washing apparatus in which the top of a base pan is inclined downward toward a mounting position of a water leakage sensor, so that water, dropped onto the base pan, is gathered toward the water leakage sensor regardless of a water drop position, thereby enabling prompt operation of the water leakage sensor and achieving an enhancement in reliability. Furthermore, the washing apparatus comprises holders by which the water leakage sensor is vertically caught after being vertically press fitted to the base pan, thereby enabling the water leakage sensor to be mounted to the base pan via a single vertical press-fitting operation, resulting in an enhancement in assembling efficiency.
    • 这里公开了一种洗涤装置,其中底盘的顶部朝向漏水传感器的安装位置向下倾斜,使得落在底盘上的水聚集到漏水传感器,而不管水滴位置如何 从而能够及时地进行漏水传感器的动作,提高可靠性。 此外,洗涤装置包括保持器,在垂直压配合到底盘之后,使漏水传感器垂直卡止,从而使漏水传感器能够通过单个垂直压配合操作而安装到底盘上,导致 提高组装效率。
    • 9. 发明申请
    • Steam generating device and washing machine having the same
    • 蒸汽发生装置和具有相同的洗衣机
    • US20080011022A1
    • 2008-01-17
    • US11819482
    • 2007-06-27
    • In AhnKyu LeeSeong Moon
    • In AhnKyu LeeSeong Moon
    • D06F37/00F22B1/28
    • F22B37/78D06F39/008F22B1/284
    • A steam generating device and a washing machine having the same are disclosed. The steam generating device includes a lower housing, which contains water, in which a heater is arranged, and which has a vertical length longer than a horizontal length, an upper housing including a steam chamber for containing steam generated as the water is heated, a water level sensor for sensing a water level of the water chamber, and a receptacle for covering the water level sensor, the receptacle including an opening for allowing water to be introduced into the receptacle. In accordance with this configuration, it is possible to easily install the steam generating device, to achieve a superior performance, to prevent the water level sensor from malfunctioning, and to prevent spots from being formed on laundry.
    • 公开了一种蒸汽发生装置和具有该蒸汽发生装置的洗衣机。 蒸汽发生装置包括下壳体,其包含水,其中布置有加热器,并且具有比水平长度更长的垂直长度;上壳体,包括用于容纳加热时产生的蒸汽的蒸汽室, 用于感测水室的水位的水位传感器和用于覆盖水位传感器的容器,该容器包括用于允许水引入容器的开口。 根据该结构,能够容易地安装蒸汽发生装置,以达到优异的性能,防止水位传感器发生故障,并且防止在衣物上形成斑点。