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1. 发明授权

US4731855A Pattern defect inspection apparatus 失效
标题翻译：图案缺陷检查装置
公开(公告)号：US4731855A
公开(公告)日：1988-03-15
申请号：US720730
申请日：1985-04-08
申请人： Kyo Suda , Shigeharu Kimura , Shinobu Hase , Chusuke Munakata , Kanji Kinameri , Yoshitoshi Ito , Hiroto Nagatomo , Yuzo Taniguchi , Mikihito Saito
发明人： Kyo Suda , Shigeharu Kimura , Shinobu Hase , Chusuke Munakata , Kanji Kinameri , Yoshitoshi Ito , Hiroto Nagatomo , Yuzo Taniguchi , Mikihito Saito
IPC分类号： G01N21/956 , H01L21/26 , G06K9/00
CPC分类号： G01N21/956 , H01L21/26
摘要： A pattern defect inspection apparatus detects presence or absence of a defect in a pattern formed on a semiconductor wafer by scanning the pattern normally to the surface thereof by a coherent light beam of a predetermined spot size, detecting reflected diffraction lights generated thereby and processing the detected lights. It comprises an abnormal direction signal detector including photo-detectors having wide light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from a normal pattern do not normally reach, a normal pattern detector including photo-detectors having large light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from the normal pattern reach, and a defect discriminator for determining if the abnormal direction signals are due to a true defect or not in accordance with the signals from the abnormal direction signal detector and the normal pattern detector.
摘要翻译：图案缺陷检查装置通过用预定光斑尺寸的相干光束将图案通常扫描到其表面来检测在半导体晶片上形成的图案中的缺陷的存在或不存在，检测由此产生的反射衍射光并且处理检测到的灯光它包括异常方向信号检测器，其包括具有布置在多个空间区域中的宽光接收区域的光检测器，正常图案的反射衍射光通常不能正常到达，包括光检测器的正常图案检测器具有大的光接收面积布置在从正常图案到达的反射衍射光的多个空间区域中，以及用于根据来自异常方向信号检测器的信号和用于确定异常方向信号是否由于真实缺陷而导致的缺陷鉴别器正常模式检测器

2. 发明授权

US4767211A Apparatus for and method of measuring boundary surface 失效
标题翻译：测量边界面的仪器和方法
公开(公告)号：US4767211A
公开(公告)日：1988-08-30
申请号：US088538
申请日：1987-08-20
申请人： Chusuke Munakata , Shinobu Hase , Shigeharu Kimura
发明人： Chusuke Munakata , Shinobu Hase , Shigeharu Kimura
IPC分类号： G01B11/00 , G01B11/24 , G01B11/30
CPC分类号： G01B11/24
摘要： An apparatus for and a method of measuring a boundary surface of a sample are disclosed in which a ratio of the light quantity of a part of reflected light from a sample which travels in the vicinity of the optical axis of the reflected light, to the light quantity of another part of the reflected light which is directed to a position deviating from the optical axis by a predetermined distance is used to accurately measure a boundary surface of a sample. Since the accuracy of measurement is increased by using the above ratio, light capable of passing through the sample can be used as incident light. Thus, a deep hole in the surface of the sample and a void such as an air bubble in a living being sample, which cannot be measured by the prior art, can be measured very accurately.
摘要翻译：公开了一种测量样品的边界面的装置和方法，其中，来自在反射光的光轴附近行进的样品的反射光的一部分的光量与光使用被引导到偏离光轴的位置预定距离的反射光的另一部分的量来准确地测量样品的边界面。由于通过使用上述比例来提高测量精度，所以可以使用能够通过样品的光作为入射光。因此，可以非常精确地测量样品表面中的深孔和活体样品中的诸如气泡之类的空隙，这是现有技术无法测量的。

3. 发明授权

US4733063A Scanning laser microscope with aperture alignment 失效
标题翻译：扫描激光显微镜，孔径对准
公开(公告)号：US4733063A
公开(公告)日：1988-03-22
申请号：US941642
申请日：1986-12-15
申请人： Shigeharu Kimura , Chusuke Munakata
发明人： Shigeharu Kimura , Chusuke Munakata
IPC分类号： G01N21/17 , G02B21/00 , G02B21/36
CPC分类号： G02B21/002
摘要： A confocal scanning laser microscope according to the present invention employs an aperture which is provided at a predetermined position within a plane of a photomask including rectilinear pattern edges orthogonal to each other formed on a transparent substrate. The aperture is moved in such a way that coordinate positions at which a laser beam traverses the respective rectilinear pattern edges orthogonal to each other are found using output signals from an optical detector, and it is consequently brought into agreement with a focused position of the laser beam.
摘要翻译：根据本发明的共聚焦扫描激光显微镜采用一个开口，其设置在光掩模的平面内的预定位置处，该光掩模包括形成在透明基板上的彼此正交的直线图案边缘。孔径以这样的方式移动，即使用来自光学检测器的输出信号发现激光束横过彼此正交的各个直线图案边缘的坐标位置，并且因此与激光的聚焦位置一致光束。

4. 发明授权

US08184509B2 Optical pickup device and optical disk device using the same 有权
标题翻译：光拾取装置和使用其的光盘装置
公开(公告)号：US08184509B2
公开(公告)日：2012-05-22
申请号：US12760592
申请日：2010-04-15
申请人： Toshiteru Nakamura , Nobuo Nakai , Shigeharu Kimura
发明人： Toshiteru Nakamura , Nobuo Nakai , Shigeharu Kimura
IPC分类号： G11B7/00 , G11B27/36 , G11B7/135
CPC分类号： G11B7/1381 , G11B7/0906 , G11B7/094 , G11B7/0943 , G11B7/133 , G11B2007/0013
摘要： Of the beams reflected by an optical disk, only peripheral beams excluding the push-pull region are used to generate a DPD signal in order to optimize internal wire connections among the light receiving areas of the optical detector and thereby reduce the amplification factor of the lens error signal, required for generating the tracking error signal of the DPP method. A beam reflected from a multilayered optical disk is divided into some beam diffraction areas. The divided beam diffraction areas and the light receiving areas are so arranged that the divided beams focus at different positions on the optical detector and that, when a beam is focused on a target recording layer of the disk, stray light from other than the target recording layer being reproduced does not enter into the servo signal light receiving area of the optical detector.
摘要翻译：在由光盘反射的光束中，仅使用不包括推挽区域的外围光束来产生DPD信号，以便优化光学检测器的光接收区域之间的内部线路连接，从而降低透镜的放大系数产生DPP方法的跟踪误差信号所需的误差信号。从多层光盘反射的光束被分成一些光束衍射区域。分割光束衍射区域和光接收区域被布置成使得分光束聚焦在光学检测器上的不同位置处，并且当光束聚焦在盘的目标记录层上时，来自除目标记录之外的杂散光被再现的层不进入光学检测器的伺服信号光接收区域。

5. 发明授权

US08315147B2 Multilayer optical recording medium having three or more recording layers with reduced interlayer crosstalk 有权
标题翻译：具有三层以上具有降低的层间串扰的记录层的多层光记录介质
公开(公告)号：US08315147B2
公开(公告)日：2012-11-20
申请号：US12420845
申请日：2009-04-09
申请人： Akemi Hirotsune , Shigeharu Kimura , Takahiro Kurokawa
发明人： Akemi Hirotsune , Shigeharu Kimura , Takahiro Kurokawa
IPC分类号： G11B7/24
CPC分类号： G11B7/24038
摘要： In a multilayer optical recording medium having at least three recording layers, an influence of interlayer crosstalk due to unnecessary light is suppressed. Each of the recording layers includes an information recording area, and the recording layers other than the nearest recording layer and the farthest recording layer when viewed from a light incident side include a first annular area having uneven patterns formed thereon, and a second annular area having uneven patterns formed thereon, the first annular area being adjacent to an inner side of the information recording area, the second annular area being adjacent to an outer side of the information recording area.
摘要翻译：在具有至少三个记录层的多层光学记录介质中，抑制了由于不必要的光引起的层间串扰的影响。每个记录层包括信息记录区，并且当从光入射侧观察时，除了最近记录层和最远记录层之外的记录层包括其上形成有不均匀图案的第一环形区域和具有形成在其上的不均匀图案的第二环形区域，形成在其上的不均匀图案，第一环形区域与信息记录区域的内侧相邻，第二环形区域与信息记录区域的外侧相邻。

6. 发明授权

US08165004B2 Optical pickup device 失效
标题翻译：光学拾取装置
公开(公告)号：US08165004B2
公开(公告)日：2012-04-24
申请号：US12898750
申请日：2010-10-06
申请人： Shigeharu Kimura
发明人： Shigeharu Kimura
IPC分类号： G11B7/00
CPC分类号： G11B7/1362 , G11B7/0903 , G11B7/1353 , G11B7/1356 , G11B2007/0013
摘要： An optical pickup device capable of eliminating interlayer crosstalk which is responsible for fluctuation in control signals and error rate in data signals, thereby ensuring stable action for a multilayered recording disc with a narrow interlayer spacing. The reflected beam coming from the multilayered disc is divided along the central line into two parallel portions by the dividing optical system and then condensed. The reflected beam coming from the active layer, which has been condensed, is reflected by the reflecting plane whose reflecting region is limited and the thus reflected beam is detected by the optical detector. The reflected beam coming from other layers is not reflected by the reflecting plane, so that interlayer crosstalk is reduced.
摘要翻译：一种能够消除层间串扰的光拾取装置，其负责控制信号的波动和数据信号中的错误率，从而确保具有窄层间距的多层记录盘的稳定动作。来自多层盘的反射光束通过分光光学系统沿着中心线分成两个平行部分，然后冷凝。来自已被冷凝的有源层的反射光束被其反射区域受限的反射面反射，由光检测器检测出反射光束。来自其它层的反射光束不被反射面反射，从而降低了层间串扰。

7. 发明申请

US20120087220A1 OPTICAL PICKUP AND OPTICAL INFORMATION RECORDING AND REPRODUCING APPARATUS 失效
标题翻译：光学拾取和光学信息记录和再现设备
公开(公告)号：US20120087220A1
公开(公告)日：2012-04-12
申请号：US13227497
申请日：2011-09-08
申请人： Eriko TATSU , Shigeharu Kimura , Tomoto Kawamura
发明人： Eriko TATSU , Shigeharu Kimura , Tomoto Kawamura
IPC分类号： G11B7/1353 , G11B7/00
CPC分类号： G11B7/1353 , G11B7/131 , G11B2007/0013
摘要： An optical pickup includes a light source, an optical system for irradiating a recording medium including a plurality of recording layers with light from the light source, a diffraction optical element that divides light reflected from the recording medium into a plurality of optical fluxes and diffracts the fluxes, and an optical detector receiving the optical flux diffracted by the diffraction optical element. The optical detector includes a light receiving element detecting a focus error signal, wherein a longitudinal direction of the light receiving element is arranged to coincide with a circumferential direction of the recording medium, or arranged to be inclined to a circumferential or radial direction.
摘要翻译：一种光学拾取器，包括光源，用于利用来自光源的光照射包括多个记录层的记录介质的光学系统，将从记录介质反射的光分成多个光通量的衍射光学元件，并衍射出并且接收由衍射光学元件衍射的光束的光学检测器。光检测器包括检测聚焦误差信号的光接收元件，其中光接收元件的纵向方向被布置成与记录介质的圆周方向一致，或者被布置为沿圆周方向或径向方向倾斜。

8. 发明申请

US20070268807A1 OPTICAL DISC DRIVE APPARATUS 失效
标题翻译：光盘驱动器
公开(公告)号：US20070268807A1
公开(公告)日：2007-11-22
申请号：US11669223
申请日：2007-01-31
申请人： Shigeharu Kimura , Takeshi Shimano
发明人： Shigeharu Kimura , Takeshi Shimano
IPC分类号： G11B7/00
CPC分类号： G11B7/1367 , G11B7/131 , G11B7/1362 , G11B7/1381 , G11B7/1392 , G11B2007/0013
摘要： The amount of reflected light from an adjacent layer in a multilayer optical disc is reduced by means of a combination of half-wave plates having different optical axes and a flat mirror. The polarization direction of the reflected light from a target layer is changed without changing the polarization direction of reflected light from the adjacent layer so as to detect a signal from the target layer alone. Because no stray light is introduced into the tracking error signal or focus signal, the laser light irradiated position can be controlled with high accuracy. This makes it possible to accurately determine the laser irradiated position during reading and writing, thereby enhancing signal quality. Because no reflected light from the adjacent layer is introduced into the data signal, a data signal with reduced error can be obtained.
摘要翻译：通过具有不同光轴的半波片和平面镜的组合来减少来自多层光盘中的相邻层的反射光的量。改变来自目标层的反射光的偏振方向，而不改变来自相邻层的反射光的偏振方向，从而仅检测来自目标层的信号。由于没有杂散光被引入到跟踪误差信号或聚焦信号中，因此可以高精度地控制激光照射位置。这使得可以在读取和写入期间准确地确定激光照射位置，从而提高信号质量。由于没有将来自相邻层的反射光引入到数据信号中，所以可以获得具有减小的误差的数据信号。

9. 发明授权

US06782018B2 Diode laser module and application equipment 失效
标题翻译：二极管激光模块及应用设备
公开(公告)号：US06782018B2
公开(公告)日：2004-08-24
申请号：US10082339
申请日：2002-02-26
申请人： Kimio Tatsuno , Masahide Tokuda , Shigeharu Kimura , Takeshi Shimano , Hirohisa Sano
发明人： Kimio Tatsuno , Masahide Tokuda , Shigeharu Kimura , Takeshi Shimano , Hirohisa Sano
IPC分类号： H01S300
CPC分类号： G11B7/127 , H01S5/02212 , H01S5/02228 , H01S5/02248 , H01S5/02292 , H01S5/02296
摘要： This invention is provided to reduce wavefront aberrations caused by the filling of a transparent resin intended to prevent degradation of a diode laser in a hermetically sealed package. A parallel-plane plate is arranged between a diode laser and an objective lens, and a transparent resin is filled into a space formed between the diode laser and the parallel-plane plate. With this invention, degradations of the diode lasers can be prevented and the wavefront aberrations can be reduced.
摘要翻译：提供本发明以减少由于填充透明树脂引起的波前像差，以防止密封封装中二极管激光器的劣化。在二极管激光器和物镜之间设置平行平板，并且将透明树脂填充到二极管激光器和平行平板之间形成的空间中。利用本发明，可以防止二极管激光器的劣化，并且可以减小波面像差。

10. 发明授权

US06573578B2 Photo semiconductor integrated circuit device and optical recording reproducing apparatus 失效
标题翻译：照片半导体集成电路器件和光学记录再现设备
公开(公告)号：US06573578B2
公开(公告)日：2003-06-03
申请号：US09922157
申请日：2001-08-06
申请人： Shigeharu Kimura , Kenji Maio , Takeshi Doi , Yoichi Tamaki , Takeshi Shimano
发明人： Shigeharu Kimura , Kenji Maio , Takeshi Doi , Yoichi Tamaki , Takeshi Shimano
IPC分类号： H01L2714
CPC分类号： H01L27/1443 , H01L31/02024
摘要： A photo semiconductor integrated circuit device has a photodiode portion and amplifier portion, each portion having a buried layer. The impurity concentration and/or depth of the buried layer for the photodiode portion is lower than that of the buried layer for the amplifier portion. As a result, the frequency band width is widened.
摘要翻译：光半导体集成电路器件具有光电二极管部分和放大器部分，每个部分具有掩埋层。用于光电二极管部分的掩埋层的杂质浓度和/或深度低于用于放大器部分的掩埋层的杂质浓度和/或深度。结果，频带宽度变宽。

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