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    • 5. 发明授权
    • Microgyroscope with two resonant plates
    • 具有两个谐振板的微镜
    • US06467348B1
    • 2002-10-22
    • US09702845
    • 2000-11-01
    • Hoon SongSeog-soon BaekHyun-cheol KimByeoung Ju HaYong-soo Oh
    • Hoon SongSeog-soon BaekHyun-cheol KimByeoung Ju HaYong-soo Oh
    • G01P904
    • G01C19/574
    • A microgyroscope with two resonant plates is provided. The microgyroscope includes a substrate; first and second frames provided on the substrate to have a predetermined height, the first and second frames facing each other; a plurality of anchors supporting the first and second frames with respect to the substrate; first and second resonant plates provided between the first and second frames to be separated from each other by a predetermined distance; and a matching link unit connected to the first and second resonant plates so that it links the motion of one resonant plate to the motion of the other resonant plate such that the matching link unit is moved by the motion of one resonant plate in a first direction and then moves the other resonant plate in a second direction opposite to the first direction. In the microgyroscope, the difference between the resonance frequencies of the two resonant plates is removed by a self resonant matching structure implemented by the matching link, so that the range of an allowable process error is large, and the microgyroscope can be easily manufactured. Additionally, the reliability and the linearity of a resonance structure are improved. Since the driving beam and the sensing beam are separately designed, mode coupling can be prevented, thereby increasing the sensing sensibility.
    • 提供具有两个谐振板的微型陀螺仪。 微陀螺仪包括基底; 设置在基板上以具有预定高度的第一和第二框架,第一和第二框架彼此面对; 多个锚固件,其相对于所述基板支撑所述第一和第二框架; 设置在第一和第二框架之间的第一和第二谐振板彼此分开预定距离; 以及连接到第一和第二谐振板的匹配连接单元,使得它将一个谐振板的运动连接到另一个谐振板的运动,使得匹配连接单元通过一个谐振板在第一方向上的运动而移动 然后沿与第一方向相反的第二方向移动另一个谐振板。 在微陀螺仪中,通过由匹配链路实现的自谐振匹配结构去除两个谐振板的谐振频率之间的差异,使得允许的工艺误差的范围大,并且可以容易地制造微型陀螺仪。 此外,提高了谐振结构的可靠性和线性度。 由于驱动光束和感测光束是分开设计的,因此可以防止模式耦合,从而增加感测灵敏度。
    • 7. 发明授权
    • Monolithic nozzle assembly formed with mono-crystalline silicon wafer and method for manufacturing the same
    • 用单晶硅晶片形成的单片喷嘴组件及其制造方法
    • US06663231B2
    • 2003-12-16
    • US09790714
    • 2001-02-23
    • Eun-sung LeeHyun-cheol KimYong-soo OhCimoo Song
    • Eun-sung LeeHyun-cheol KimYong-soo OhCimoo Song
    • B41J2045
    • B41J2/1433B41J2/162B41J2/1628B41J2/1629B41J2/1631B41J2/1632B41J2/1634B41J2/1642
    • A monolithic nozzle assembly formed with a mono-crystalline silicon substrate includes a damper for temporarily storing an incoming fluid, and a nozzle having a pyramidal portion and an outlet portion, the pyramidal portion for guiding the flow of the fluid from the damper toward the outlet portion and for increasing the pressure of the fluid, and the outlet portion through which the fluid is discharged, wherein the damper, and the pyramidal and outlet portions of the nozzle are aligned with each other and formed in the single mono-crystalline silicon substrate by continuous processes. The monolithic nozzle assembly can be formed with a single (100) mono-crystalline silicon wafer. Compared with a complicated nozzle assembly formed using a great number of silicon wafers and plates, the configuration of the monolithic nozzle assembly is simple, and can be manufactured on a mass production scale by semiconductor manufacturing processes.
    • 形成有单晶硅基板的单片喷嘴组件包括用于临时存储进入流体的阻尼器和具有锥体部分和出口部分的喷嘴,用于将流体从阻尼器流向出口的锥形部分 并且用于增加流体的压力和流体被排出的出口部分,其中阻尼器和喷嘴的金字塔形和出口部分彼此对齐并且通过在单个单晶硅衬底中形成在单个单晶硅衬底中 连续过程。 单片喷嘴组件可以由单个(100)单晶硅晶片形成。 与使用大量硅晶片和板形成的复杂喷嘴组件相比,单片喷嘴组件的构造简单,并且可以通过半导体制造工艺在大规模生产规模上制造。