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1. 发明授权

US06460401B1 Method and apparatus for trace analysis of organic compound 失效
标题翻译：有机化合物痕量分析方法与装置
公开(公告)号：US06460401B1
公开(公告)日：2002-10-08
申请号：US09461998
申请日：1999-12-15
申请人： Kunihiro Hoshino , Yoshihiko Takano , Takeshi Miyabayashi
发明人： Kunihiro Hoshino , Yoshihiko Takano , Takeshi Miyabayashi
IPC分类号： G01N3008
CPC分类号： G01N1/40 , G01N1/405 , G01N30/12 , G01N2030/122
摘要： The invention relates to a method of trace analysis of organic compounds which calls for the steps of setting a test piece in a flow cell, and thereafter removing organic compounds from the test piece by heating it at high temperature in an oven. The compounds are concentrated in a trap tube and then removed from the trap tube and carried into a concentrating/inlet unit, such as a thermal desorption cold trap injector. In this unit, cryofocusing of the compounds is performed, and then the organic compounds are introduced into a gas chromatograph to be analyzed therein, wherein a part of the purified inert gas is caused, except during the process of trapping the organic compounds, to flow into the flow cell from the direction opposite the direction from which the gas flows along the trapping line. The invention also provides an apparatus to be used for the method, including an analyzer having a flow cell, a trap tube connected to the flow cell, a detector connected to the trap tube, and a flow rate controller connected to the flow cell. This can be brought into communication with the trap tube and is so formed as to permit a test piece, such as a wafer, to be removably set therein and also permit a carrier gas to flow therethrough. A channel for purified inert gas is provided between the flow rate controller and the flow cell and also between the flow rate controller and a valve that communicates with the flow cell.
摘要翻译：本发明涉及一种有机化合物的痕量分析方法，其要求在流动池中设置试验片的步骤，然后通过在烘箱中高温加热从试片中除去有机化合物。将化合物浓缩在捕集管中，然后从捕获管中取出并携带到浓缩/入口单元中，例如热解吸冷阱注射器。在该单元中，进行化合物的冷冻聚焦，然后将有机化合物引入气相色谱仪中进行分析，其中除了在捕获有机化合物的过程之外，引发纯化的惰性气体的一部分流动从与气体沿着捕集线流动的方向相反的方向进入流动池。本发明还提供了一种用于该方法的装置，包括具有流动池，连接到流通池的捕集管，连接到捕集管的检测器和连接到流通池的流量控制器的分析器。这可以与陷阱管连通，并且被形成为允许诸如晶片的测试件可移除地设置在其中并且还允许载气流过其中。在流量控制器和流动池之间以及流量控制器和与流动池连通的阀之间提供用于净化的惰性气体的通道。

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