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1. 发明申请

US20060177287A1 Universal reticle transfer system 失效
标题翻译：通用标线转印系统
公开(公告)号：US20060177287A1
公开(公告)日：2006-08-10
申请号：US10506861
申请日：2003-06-12
申请人： Kung Wu , Robert Sifuentes , Kenneth Hardy , Edgardo Caliboso , Anatoly Malobrodsky , Chien-Rong Huang
发明人： Kung Wu , Robert Sifuentes , Kenneth Hardy , Edgardo Caliboso , Anatoly Malobrodsky , Chien-Rong Huang
IPC分类号： H01L21/677
CPC分类号： H01L21/6734 , H01L21/67359 , H01L21/67373 , H01L21/67379 , H01L21/67383 , H01L21/67386 , H01L21/67775 , H01L21/67778 , H01L21/6831 , H01L21/68707
摘要： A specially adapted SMIF pod (20) receives and holds one particular type of reticle cassette (36) or reticle holder (132) selected from among dozens of different configurations thereof. The SMIF pod (20) may be interrogated to determine the particular type of reticle cassette (36) or reticle holder (132) carried therein. A reticle transfer system (50) receives a pair of such SMIF pods (20), interrogates each of the SMIF pods (20) to ascertain which type of reticle cassette (36) or reticle holder (132) the SMIF pod (20) carries, and automatically moves reticles (42) through a controlled environment from one reticle cassette (36) or reticle holder (32) to another reticle cassette (36) or reticle holder (132). A reticle reorienter (56) includable in the system (50) also permits automatically exchanging reticles (42) between a reticle carrier (144) and a reticle cassette (36) or reticle holder (132).
摘要翻译：专门适应的SMIF盒（20）接收并保持从其数十种不同配置中选择的一种特定类型的标线盒（36）或标线架支架（132）。可以询问SMIF盒（20）以确定其中承载的标线盒（36）或标线架（132）的特定类型。标线片传送系统（50）接收一对这样的SMIF盒（20），询问每个SMIF盒（20）以确定SMIF盒（20）携带的哪种类型的标线盒（36）或标线架（132）并且自动将标线片（42）通过受控的环境从一个标线盒（36）或标线保持器（32）移动到另一个标线盒（36）或标线架支架（132）。可在系统（50）中包括的标线重新定向器（56）还允许自动交换标线片载体（144）和标线片盒（36）或标线架支架（132）之间的标线（42）。

2. 发明申请

US20050013684A1 Single reticle transfer system 失效
标题翻译：单一光罩传输系统
公开(公告)号：US20050013684A1
公开(公告)日：2005-01-20
申请号：US10891406
申请日：2004-07-14
申请人： Kung Wu
发明人： Kung Wu
IPC分类号： B25J15/00 , H01L21/677 , B25J15/08
CPC分类号： H01L21/67766 , B25J15/0028 , Y10S414/136 , Y10S414/138 , Y10S414/141
摘要： The present invention is a pod opener having an end effector which: a. grips and releases a reticle supported above the base of a pod; and b. while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, reorients the reticle. In one embodiment, the pod opener reorients the reticle by rotating it about a single axis disposed substantially perpendicular to its patterned surface. In another embodiment, the present invention is a pod opener which while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, in addition to effecting rotation substantially perpendicular to a reticle's patterned surface, also turns the reticle over so a patterned surface of the reticle is oriented for proper focus within the IC photolithography tool.
摘要翻译：本发明是一种具有端部执行器的开启器，其具有：a。抓住并释放在荚的基部上方支撑的掩模版; 和b。同时将掩模版传送到荚的基部和相邻的IC光刻工具之间，重新定向光罩。在一个实施例中，通过围绕基本上垂直于其图案化表面设置的单个轴线旋转掩模开启器来重新定向光罩。在另一个实施例中，本发明是一种荚果开启器，其在将光罩传送到荚的基部和相邻的IC光刻工具之间，除了实现基本上垂直于掩模版图案的表面的旋转之外，还将掩模版转过图案掩模版的表面被定向成在IC光刻工具内进行适当的聚焦。

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