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    • 2. 发明申请
    • PHOTOMULTIPLIER AND MANUFACTURING METHOD THEREOF
    • 照相机及其制造方法
    • US20130056843A1
    • 2013-03-07
    • US13601948
    • 2012-08-31
    • Joon Sung LEEYong Sun YOON
    • Joon Sung LEEYong Sun YOON
    • H01L31/0216
    • H01L31/107H01L27/1446H01L27/14643H01L27/14689
    • Provided are a photomultiplier and a manufacturing method thereof. The manufacturing method thereof may include forming a mask layer on an active region of a substrate doped with a first conductive type, ion implanting a second conductive type impurity opposite to the first conductive type into the substrate to form a first doped region in the active region under the mask layer and an non-active region exposed from the mask layer, forming a device isolation layer on the non-active region, removing the mask layer, and ion implanting the second conductive type impurity having a concentration higher than that of the first doped region into an upper portion of the first doped region in the active region to form a second doped region shallower than the first doped region.
    • 提供一种光电倍增管及其制造方法。 其制造方法可以包括在掺杂有第一导电类型的衬底的有源区上形成掩模层,将与第一导电类型相反的第二导电类型杂质注入到衬底中以在有源区中形成第一掺杂区 在掩模层下面和从掩模层露出的非有源区,在非有源区上形成器件隔离层,去除掩模层,以及离子注入浓度高于第一导电型杂质的第二导电型杂质 掺杂区域进入有源区域中的第一掺杂区域的上部,以形成比第一掺杂区域浅的第二掺杂区域。
    • 3. 发明申请
    • SILICON PHOTOMULTIPLIER AND METHOD FOR FABRICATING THE SAME
    • 硅光电子照相机及其制造方法
    • US20120139071A1
    • 2012-06-07
    • US13289256
    • 2011-11-04
    • Joon Sung LEEYong Sun YOON
    • Joon Sung LEEYong Sun YOON
    • H01L31/0224
    • H01L31/103H01L27/1461H01L27/14683H01L31/107
    • Provided are a silicon photomultiplier and method for fabricating silicon photomultiplier. The silicon photomultiplier includes a first conductive type semiconductor layer; a first conductive type buried layer disposed in a lower portion of the first conductive type semiconductor layer, and having a higher impurity concentration than the first conductive type semiconductor layer; quench resistors spaced from each other and disposed on the first conductive type semiconductor layer; a transparent insulator formed on the first conductive type semiconductor layer, and exposing the quench resistors; second conductive type doped layers disposed under the quench resistors to contact the first conductive type semiconductor layer; and a transparent electrode commonly connected to the quench resistors electrically.
    • 提供了硅光电倍增管和制造硅光电倍增管的方法。 硅光电倍增管包括第一导电型半导体层; 第一导电型掩埋层,设置在第一导电类型半导体层的下部,并且具有比第一导电类型半导体层更高的杂质浓度; 淬火电阻彼此间隔开并设置在第一导电类型半导体层上; 形成在所述第一导电类型半导体层上的透明绝缘体,并暴露所述骤冷电阻器; 设置在所述骤冷电阻器下方的第二导电型掺杂层以接触所述第一导电类型半导体层; 以及通常连接到骤冷电阻器的透明电极。