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    • 6. 发明申请
    • PROCESS FOR MANUFACTURING LIGHT GUIDE
    • 制造光指导的方法
    • US20100040986A1
    • 2010-02-18
    • US12440517
    • 2007-09-18
    • Masatoshi YamaguchiTomoaki ShibataTatsuya MakinoMasami OchiaiToshihiko TakasakiAtsushi Takahashi
    • Masatoshi YamaguchiTomoaki ShibataTatsuya MakinoMasami OchiaiToshihiko TakasakiAtsushi Takahashi
    • G03F7/20
    • G02B6/1221G02B6/138
    • The present invention relates to a process for producing an optical waveguide, including the steps of applying a cladding layer-forming resin onto a substrate and curing the resin to form a lower cladding layer; laminating a core layer-forming resin film on the lower cladding layer to form a core layer; subjecting the core layer to exposure to light and development to form a core pattern; and applying a cladding layer-forming resin over the core pattern to embed the core pattern therebeneath, and curing the resin to form an upper cladding layer, wherein the step of forming the core layer includes the steps of (1) allowing the core layer-forming resin film to be temporarily attached onto the lower cladding layer using a roll laminator, and (2) thermocompression-bonding the temporarily attached core layer-forming resin film onto the lower cladding layer under a reduced pressure. There is provided the process for producing an optical waveguide having a uniform core with a good productivity.
    • 本发明涉及一种光波导的制造方法,其特征在于,包括以下步骤:在基板上涂布包层形成树脂,使树脂固化形成下包层; 在下包覆层上层叠芯层形成树脂膜以形成芯层; 对芯层进行曝光和显影以形成芯图案; 以及在所述芯图案上涂布包层形成树脂以在其下方嵌入所述芯图案,并使所述树脂固化形成上包层,其中形成所述芯层的步骤包括以下步骤:(1) 使用辊式层压机将树脂膜暂时附着在下敷层上,(2)在减压下将临时附着的芯层形成树脂膜热压接在下包层上。 提供了具有均匀核心的具有良好生产率的光波导的制造方法。
    • 9. 发明授权
    • Method for manufacturing optical waveguide and optical waveguide manufactured by the method
    • 通过该方法制造光波导和光波导的方法
    • US08938135B2
    • 2015-01-20
    • US12678547
    • 2008-09-18
    • Tatsuya MakinoMasatoshi YamaguchiAtsushi Takahashi
    • Tatsuya MakinoMasatoshi YamaguchiAtsushi Takahashi
    • G02B6/12G02B1/12G02B6/138G02B6/136G03F7/32
    • G02B6/138G02B6/1221G02B6/136G03F7/322
    • The present invention relates to a production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern and a step for carrying out development in an alkaline developer containing a divalent or higher-valent metal ion and a production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern, a step for carrying out development in an alkaline developer and a step for carrying out washing with a cleaning liquid containing a divalent or higher-valent metal ion or an acid aqueous solution.Capable of being provided are a production process for an optical waveguide which is excellent in a transparency and a reliability and an optical waveguide produced by the above production process.
    • 光波导的制造方法技术领域本发明涉及一种光波导的制造方法,其包括在基板上形成感光性树脂组合物的感光性树脂层的工序,曝光所需图案的工序和在含有 二价以上的金属离子和光波导的制造方法,其特征在于,包括在基板上形成感光性树脂组合物的感光性树脂层的工序,曝光所需图案的工序,碱性显影工序 显影剂和用含有二价或更高价金属离子或酸性水溶液的清洗液进行洗涤的步骤。 能够提供透光性和可靠性优异的光波导的制造方法以及通过上述制造方法制造的光波导。