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1. 发明申请

US20090261452A1 SEMICONDUCTOR DEVICE INCLUDING AN INDUCTOR ELEMENT 审中-公开
标题翻译：包含电感元件的半导体器件
公开(公告)号：US20090261452A1
公开(公告)日：2009-10-22
申请号：US12367061
申请日：2009-02-06
申请人： Kouichi TSUJIMOTO , Yukio Hiraoka
发明人： Kouichi TSUJIMOTO , Yukio Hiraoka
IPC分类号： H01L29/82 , H01F27/30
CPC分类号： H01F17/0006 , H01F27/34 , H01F2017/0046 , H01F2017/0086 , H01F2021/125
摘要： An inductor element is formed in a spiral shape so as to have a plurality of windings which cross each other three-dimensionally at least in one intersection on a substrate. Each of the plurality of windings is formed by a first wiring formed on the substrate with a first insulating film interposed therebetween and a second wiring formed on the first wiring with a second insulating film interposed therebetween. The first wiring and the second wiring are electrically connected to each other in a region other than the intersection of the plurality of windings through an opening formed in the second insulating film. A lower wire segment in the intersection is formed only by the first wiring by separating the second wiring in the intersection. An upper wire segment in the intersection is formed only by the second wiring by separating the first wiring in the intersection.
摘要翻译：电感器元件形成为螺旋形状，以便具有至少在基板上的至少一个交叉部中三维交叉的多个绕组。多个绕组中的每一个由形成在基板上的第一布线形成，其中插入有第一绝缘膜，并且在第一布线上形成有第二绝缘膜的第二布线。第一布线和第二布线在除了形成在第二绝缘膜中的开口的多个绕组的交点以外的区域中彼此电连接。交叉点中的下部线段仅由第一布线形成，通过在交叉点中分离第二布线。交叉路口中的上部线段仅由第二配线通过在交叉路口中分离第一配线而形成。

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