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    • 2. 发明申请
    • POSITIVE PHOTOSENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING CURED FILM USING THE SAME
    • 正型感光树脂组合物和使用其形成固化膜的方法
    • US20100173246A1
    • 2010-07-08
    • US12663016
    • 2008-06-05
    • Satoshi Takita
    • Satoshi Takita
    • G03F7/004G03F7/20
    • G03F7/0392C08F220/28G03F7/0045G03F7/40
    • The present invention provides a positive photosensitive resin composition including: a resin containing a specific acrylic acid-based constituent unit capable of undergoing dissociation of an acid-dissociable group to produce a carboxyl group, and a constituent unit having a functional group capable of reacting with the carboxyl group to form a covalent bond, the resin being alkali-insoluble or sparingly alkali-soluble and becoming alkali-soluble when the acid-dissociable group dissociates; and a compound capable of generating an acid upon irradiation with an actinic ray or radiation. The present invention also provides a method for forming a cured film using the composition. The positive photosensitive composition is excellent in the sensitivity, film residual ratio and storage stability and by the method for forming a cured film using the positive photosensitive resin composition, a cured film excellent in the heat resistance, adhesion, transmittance and the like can be provided.
    • 本发明提供一种正型感光性树脂组合物,其包含:含有能够分解酸解离基而产生羧基的特定丙烯酸系构成单元的树脂,以及具有能够与 羧基形成共价键,当酸解离基解离时,该树脂是碱不溶性或微溶碱性的并变成碱溶性的; 以及能够在用光化射线或辐射照射时能够产生酸的化合物。 本发明还提供了使用该组合物形成固化膜的方法。 正性感光性组合物的灵敏度,膜残留率和保存稳定性优异,通过使用正型感光性树脂组合物的固化膜的形成方法,可以提供耐热性,粘合性,透射率等优异的固化膜 。
    • 8. 发明授权
    • Positive photosensitive composition
    • 正光敏组合物
    • US06037098A
    • 2000-03-14
    • US50007
    • 1998-03-30
    • Toshiaki AoaiSatoshi Takita
    • Toshiaki AoaiSatoshi Takita
    • C08F2/50G03F7/004
    • G03F7/0045Y10S430/115Y10S430/122Y10S430/123
    • Provided is a positive photosensitive composition which has high photosensitivity, is capable of giving an excellent resist pattern, and changes little with time after exposure. The positive photosensitive composition comprises a resin having group(s) capable of decomposing by the action of an acid to enhance solubility of the resin in an alkaline developing solution and a compound represented by formula (Ia) or (Ib) which is capable of generating a sulfonic acid upon irradiation with actinic rays or a radiation: ##STR1## wherein R.sub.1 to R.sub.3 each represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, a hydroxy group, a halogen atom, or a group represented by --S--R.sub.4, where R.sub.4 represents an alkyl group or an aryl group; X.sup.- represents the specific anion of a benzenesulfonic, naphthalenesulfonic, or anthracenesulfonic acid; and l, m, and n represents an integer of 1 to 3.
    • 提供了具有高光敏性的正光敏组合物,能够赋予优异的抗蚀剂图案,并且在曝光后随时间变化很小。 正型光敏组合物包括具有能够通过酸的作用分解的基团的树脂,以增强树脂在碱性显影液中的溶解度和由式(Ia)或(Ib)表示的化合物,其能够产生 在用光化射线照射时的磺酸或辐射:其中R1至R3各自表示氢原子,烷基,环烷基,烷氧基,羟基,卤素原子或由-S- R4,其中R4表示烷基或芳基; X-表示苯磺酸,萘磺酸或蒽磺酸的特定阴离子; 和l,m,n表示1〜3的整数。