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1. 发明授权

US07813086B2 Thin film magnetic head comprising metal layer and having improved asymmetry characteristic and method of producing the same 有权
标题翻译：包括金属层的薄膜磁头和具有改进的不对称特性及其制造方法
公开(公告)号：US07813086B2
公开(公告)日：2010-10-12
申请号：US11802220
申请日：2007-05-21
申请人： Kosuke Tanaka , Kazuki Sato , Eiji Komura
发明人： Kosuke Tanaka , Kazuki Sato , Eiji Komura
IPC分类号： G11B5/39
CPC分类号： G11B5/3967 , B82Y25/00 , G01R33/093 , G11B5/3912 , G11B5/3932 , H01L43/08 , H01L43/12
摘要： Producing a thin film magnetic head includes forming a pair of openings in a predetermined region of a TMR layer formed on a lower magnetic shield layer; forming a pair of bias-applying layers in the pair of openings so that an upper surface thereof is located above an upper surface of the TMR layer; laminating a metal layer that covers the upper surface of a portion located between the pair of bias-applying layers in the TMR layer and the upper surface of the pair of bias-applying layers; forming a resist layer across the upper surface of a portion located above the pair of bias-applying layers in the metal layer and the upper surface of a portion located above the TMR layer in the metal layer; and etching a part of the TMR layer and a part of the pair of bias-applying layers with the resist layer being as a mask.
摘要翻译：制造薄膜磁头包括在形成在下磁屏蔽层上的TMR层的预定区域中形成一对开口; 在所述一对开口中形成一对偏压施加层，使得其上表面位于所述TMR层的上表面之上; 层叠覆盖位于所述TMR层中的所述一对偏置施加层之间的部分的上表面的金属层和所述一对偏置施加层的上表面; 在位于所述金属层中的所述一对偏置施加层上方的部分的上表面和位于所述金属层中的所述TMR层上方的部分的上表面上形成抗蚀剂层; 并且将抗蚀剂层作为掩模蚀刻TMR层的一部分和一对偏置施加层的一部分。

2. 发明申请

US20080291583A1 Thin film magnetic head comprising metal layer and method of producing the same 有权
标题翻译：包含金属层的薄膜磁头及其制造方法
公开(公告)号：US20080291583A1
公开(公告)日：2008-11-27
申请号：US11802220
申请日：2007-05-21
申请人： Kosuke Tanaka , Kazuki Sato , Eiji Komura
发明人： Kosuke Tanaka , Kazuki Sato , Eiji Komura
IPC分类号： G11B5/11
CPC分类号： G11B5/3967 , B82Y25/00 , G01R33/093 , G11B5/3912 , G11B5/3932 , H01L43/08 , H01L43/12
摘要： A method of producing a thin film magnetic head includes the steps of: forming a pair of openings in a predetermined region of a TMR layer formed on a lower magnetic shield layer; forming a pair of bias-applying layers in the pair of Openings so that an upper surface thereof may be located above an upper surface of the TMR layer; laminating a metal layer that covers the upper surface of a portion located between the pair of bias-applying layers in the TMR layer and the upper surface of the pair of bias-applying layers; forming a resist layer across the upper surface of a portion located above the pair of bias-applying layers in the metal layer and the upper surface of a portion located above the TMR layer in the metal layer; and etching a part of the TMR layer and a part of the pair of bias-applying layers with the resist layer being as a mask. Here, the reflectivity R for the incident light having a wavelength of 248 nm at an interface between the metal layer and the resist layer is set so as to satisfy the condition represented by the following formula (1), and also the magnitude D of a step is set so as to satisfy the condition represented by the following formula (2). R≧0.2 (1) D≧210 exp(−7.6R) [nm] (2)
摘要翻译：制造薄膜磁头的方法包括以下步骤：在形成在下磁屏蔽层上的TMR层的预定区域中形成一对开口; 在所述一对开口中形成一对偏置施加层，使得其上表面可以位于所述TMR层的上表面之上; 层叠覆盖位于所述TMR层中的所述一对偏置施加层之间的部分的上表面的金属层和所述一对偏置施加层的上表面; 在位于所述金属层中的所述一对偏置施加层上方的部分的上表面和位于所述金属层中的所述TMR层上方的部分的上表面上形成抗蚀剂层; 并且将抗蚀剂层作为掩模蚀刻TMR层的一部分和一对偏置施加层的一部分。这里，在金属层和抗蚀剂层之间的界面处的波长为248nm的入射光的反射率R被设定为满足由下式（1）表示的条件，也设定为设定步骤以满足由下式（2）表示的条件。 <？in-line-formula description =“In-line Formulas”end =“lead”？> R> = 0.2（1）<？in-line-formula description =“In-line Formulas”end =“tail”？ > <？in-line-formula description =“在线公式”end =“lead”？> D> = 210 exp（-7.6R）[nm]（2）<？in-line-formula description =“In “公式”end =“tail”？>

3. 发明授权

US08374063B2 Heat-assisted magnetic write head, head gimbals assembly, head arm assembly, and magnetic disk device 有权
标题翻译：热辅助写磁头，头架万向节组件，头臂组件和磁盘设备
公开(公告)号：US08374063B2
公开(公告)日：2013-02-12
申请号：US13029555
申请日：2011-02-17
申请人： Kosuke Tanaka , Tsutomu Chou , Eiji Komura , Takahiko Izawa
发明人： Kosuke Tanaka , Tsutomu Chou , Eiji Komura , Takahiko Izawa
IPC分类号： G11B11/00
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/0021
摘要： A heat-assisted magnetic write head includes: a magnetic pole having an end surface exposed to an air bearing surface; a waveguide extending toward the air bearing surface to propagate light; a plasmon generator provided between the magnetic pole and the waveguide and generating near-field light from the air bearing surface, based on the light propagated through the waveguide; and a clad provided to surround both the waveguide and the plasmon generator collectively, the clad having a refractive index lower than that of the waveguide, and exhibiting a thermal conductivity higher than that of the waveguide. The clad may be provided to collectively surround the magnetic pole, as well.
摘要翻译：一种热辅助磁写头包括：具有暴露于空气轴承表面的端面的磁极; 波导向空气轴承表面延伸以传播光; 基于通过波导传播的光，设置在磁极和波导之间并产生来自空气轴承表面的近场光的等离子体激元发生器; 以及包围所述波导和所述等离子体发生器两者的集合体，所述包层的折射率低于所述波导的折射率，并且具有高于所述波导的导热率。也可以提供包层以集中地围绕磁极。

4. 发明申请

US20110228420A1 HEAT-ASSISTED MAGNETIC RECORDING HEAD INCLUDING PLASMON GENERATOR 有权
标题翻译：热辅助磁记录头，包括等离子发生器
公开(公告)号：US20110228420A1
公开(公告)日：2011-09-22
申请号：US12728890
申请日：2010-03-22
申请人： Shinji Hara , Tsutomu Chou , Kosuke Tanaka , Eiji Komura , Koji Shimazawa , Daisuke Miyauchi , Susumu Aoki , Takeshi Tsutsumi
发明人： Shinji Hara , Tsutomu Chou , Kosuke Tanaka , Eiji Komura , Koji Shimazawa , Daisuke Miyauchi , Susumu Aoki , Takeshi Tsutsumi
IPC分类号： G11B5/02
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A plasmon generator has an outer surface including a plasmon exciting part, and has a near-field light generating part located in a medium facing surface. The plasmon exciting part faces an evanescent light generating surface of a waveguide's core with a predetermined distance therebetween. The outer surface of the plasmon generator further includes first and second inclined surfaces that are each connected to the plasmon exciting part. The first and second inclined surfaces increase in distance from each other with increasing distance from the plasmon exciting part. The plasmon generator includes a shape changing portion where the angle of inclination of each of the first and second inclined surfaces with respect to the evanescent light generating surface increases continuously with decreasing distance to the medium facing surface.
摘要翻译：等离子体发生器具有包括等离子体激元部分的外表面，并且具有位于介质面对表面中的近场光产生部分。等离子激元激发部分面对波导芯的渐逝光产生表面，其间具有预定的距离。等离子体发生器的外表面还包括各自连接到等离子体激元部分的第一和第二倾斜表面。第一和第二倾斜表面随距离等离激子激发部分的距离增加而彼此间距离增加。等离子体发生器包括形状改变部分，其中第一和第二倾斜表面中的每一个相对于ev逝光产生表面的倾斜角度随着到介质面向表面的距离的减小而连续增加。

5. 发明授权

US08023225B2 Thermally assisted magnetic head with optical waveguide 有权
标题翻译：带光波导的热辅助磁头
公开(公告)号：US08023225B2
公开(公告)日：2011-09-20
申请号：US12176127
申请日：2008-07-18
申请人： Koji Shimazawa , Hiraku Hirabayashi , Kosuke Tanaka , Eiji Komura
发明人： Koji Shimazawa , Hiraku Hirabayashi , Kosuke Tanaka , Eiji Komura
IPC分类号： G11B7/135
CPC分类号： G11B5/314 , G11B2005/001 , G11B2005/0021
摘要： While an emitting position of light from an optical waveguide and a magnetic pole end part are made closer to each other, high-density writing onto a magnetic recording medium is realized.A thermally assisted magnetic head comprises a main magnetic pole layer having a magnetic pole end part exposed at a medium-opposing surface opposing a magnetic disk, and an optical waveguide for deflecting laser light incident thereon into a laminating direction. The main magnetic pole layer is positioned on a side where the light is deflected by the optical waveguide. The magnetic pole end part projects to the side where the light is deflected by the optical waveguide. The optical waveguide projects more than the magnetic pole end part on the medium-opposing surface side.
摘要翻译：虽然使来自光波导和磁极端部的光的发射位置彼此靠近，但是实现了对磁记录介质的高密度写入。热辅助磁头包括具有在与磁盘相对的介质相对表面处露出的磁极端部的主磁极层和用于将入射到其上的激光偏转成层叠方向的光波导。主磁极层位于光被光波导偏转的一侧。磁极端部突出到光被光波导偏转的一侧。光波导在介质相对表面侧上突出超过磁极端部。

6. 发明申请

US20110205661A1 Optical waveguide and thermal assist magnetic recording head therewith 有权
标题翻译：光波导和热辅助磁记录头
公开(公告)号：US20110205661A1
公开(公告)日：2011-08-25
申请号：US12659095
申请日：2010-02-25
申请人： Eiji Komura , Koji Shimazawa , Kosuke Tanaka
发明人： Eiji Komura , Koji Shimazawa , Kosuke Tanaka
IPC分类号： G11B5/02 , G02F1/035 , G02B6/00
CPC分类号： G02B6/1226 , B82Y20/00 , G02B6/1228 , G11B5/314 , G11B2005/0005 , G11B2005/0021
摘要： An optical waveguide of the present invention is an optical waveguide in order to directly introduce light beams emitted from a light emitting element. In a core that is a waveguide through which light propagates, a concave part is formed that is a depression in a light incident end surface that is one side where light enters. Therefore, an optical waveguide is realized that can obtain a large optical coupling efficiency is possible by the operation of phase alignment in the concave part.
摘要翻译：本发明的光波导是光波导，用于直接引入从发光元件发射的光束。在作为光传播的波导的芯中，形成作为光入射的一侧的光入射端面的凹部的凹部。因此，通过在凹部中的相位对准的操作，可以获得可以获得大的光耦合效率的光波导。

7. 发明申请

US20080158709A1 Thermally assisted magnetic head, head gimbal assembly, and hard disk drive 有权
标题翻译：热辅助磁头，磁头万向节组件和硬盘驱动器
公开(公告)号：US20080158709A1
公开(公告)日：2008-07-03
申请号：US12003452
申请日：2007-12-26
申请人： Kosuke Tanaka , Koji Shimazawa , Eiji Komura
发明人： Kosuke Tanaka , Koji Shimazawa , Eiji Komura
IPC分类号： G11B5/02
CPC分类号： G11B5/02 , G11B5/314 , G11B2005/0002 , G11B2005/0021
摘要： A thermally assisted magnetic head comprises: a slider substrate, a first surface located opposite to a medium-facing surface, and side surfaces located between the medium-facing surface and the first surface; a magnetic head portion having a near-field light generator on the medium-facing surface side, and a magnetic recording element, the magnetic head portion being fixed to one of the side surfaces; and a laser diode element a relative position of which to the slider substrate is fixed so that emitted light thereof can reach the near-field light generator; a relation of λin
摘要翻译：一种热辅助磁头包括：滑块基板，与介质相对表面相对的第一表面和位于介质相对表面和第一表面之间的侧表面; 磁头部分，其在面向介质的表面侧上具有近场光产生器;以及磁记录元件，磁头部分固定在一个侧表面上; 并且激光二极管元件的相对位置固定到滑块基板上，使得其发射光可以到达近场光发生器; 满足lambdain

8. 发明授权

US08547805B1 Thermally-assisted magnetic recording head having temperature sensor embedded on dielectric waveguide 有权
标题翻译：具有嵌入在介质波导上的温度传感器的热辅助磁记录头
公开(公告)号：US08547805B1
公开(公告)日：2013-10-01
申请号：US13432245
申请日：2012-03-28
申请人： Eiji Komura , Koji Shimazawa , Tsutomu Chou , Shinji Hara , Kosuke Tanaka , Ryo Hosoi
发明人： Eiji Komura , Koji Shimazawa , Tsutomu Chou , Shinji Hara , Kosuke Tanaka , Ryo Hosoi
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/607 , G11B2005/0021
摘要： A thermal assisted magnetic recording head includes a dielectric waveguide that is configured to propagate propagation light a metal waveguide that is provided facing the dielectric waveguide and that couples to the propagation light propagating through the dielectric waveguide in a surface plasmon mode, thereby generating and propagating surface plasmon, a near-field light generator that is exposed on an air bearing surface facing a magnetic recording medium either at an end part of the metal waveguide or at a position facing the end part of the metal waveguide, and that generates near-field light from the surface plasmon, a magnetic pole for magnetic recording that is exposed on the air bearing surface, and a temperature sensor that is arranged inside the dielectric waveguide.
摘要翻译：热辅助磁记录头包括电介质波导，其被配置为传播传播光，所述介质波导设置成面对介质波导并且以表面等离子体模式耦合到传播通过介质波导的传播光，从而产生和传播表面等离子体激元，近场光发生器，其在面向金属波导的端部的面向磁记录介质的空气轴承表面上或面对金属波导的端部的位置处暴露，并且产生近场光从表面等离子体激元，暴露在空气轴承表面上的用于磁记录的磁极，以及布置在电介质波导内部的温度传感器。

9. 发明授权

US08406091B2 Thermal assisted magnetic recording head having integral mounted of photo-detector and laser diode 有权
标题翻译：具有光电检测器和激光二极管整体安装的热辅助磁记录头
公开(公告)号：US08406091B2
公开(公告)日：2013-03-26
申请号：US12832593
申请日：2010-07-08
申请人： Koji Shimazawa , Kosuke Tanaka , Eiji Komura , Takashi Honda
发明人： Koji Shimazawa , Kosuke Tanaka , Eiji Komura , Takashi Honda
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： Provided is a thermally-assisted magnetic recording head in which a slider including an optical system is joined with a light source unit. The light source unit comprises: a unit substrate including a joining surface joined with the slider and a source-installation surface adjacent to the joining surface; a light source provided in the source-installation surface and emits light for thermal assist; and a photodetector section formed inside the unit substrate, a light-receiving portion of the photodetector section for receiving light emitted from a rear light-emission center being located on the source-installation surface side. The light source unit includes the photodetector section that enables constant monitoring of light output from the light source. Accordingly, feedback adjustment of the light output can be accomplished. Further, since the rear light-emission center and the light-receiving portion can be located sufficiently close to each other, the light output can be monitored with a higher efficiency.
摘要翻译：提供了一种热辅助磁记录头，其中包括光学系统的滑块与光源单元接合。光源单元包括：单元基板，包括与滑块接合的接合表面和邻近接合表面的源安装表面; 设置在源安装表面中并发射用于热辅助的光的光源; 以及形成在所述单元基板内的光检测器部分，所述光电检测器部分的光接收部分用于接收从位于所述源安装表面侧的后发光中心发射的光。光源单元包括能够恒定地监视来自光源的光输出的光电检测器部分。因此，可以实现光输出的反馈调整。此外，由于后发光中心和受光部分可以彼此充分接近，所以能够以更高的效率监视光输出。

10. 发明授权

US08351308B2 Thermally assisted magnetic recording head having V-shaped plasmon generator 有权
标题翻译：具有V形等离子体发生器的热辅助磁记录头
公开(公告)号：US08351308B2
公开(公告)日：2013-01-08
申请号：US12892540
申请日：2010-09-28
申请人： Tsutomu Chou , Eiji Komura , Shinji Hara , Kosuke Tanaka , Daisuke Miyauchi
发明人： Tsutomu Chou , Eiji Komura , Shinji Hara , Kosuke Tanaka , Daisuke Miyauchi
IPC分类号： G11B11/00
CPC分类号： G11B5/3116 , G02B5/008 , G11B5/314 , G11B5/3163 , G11B2005/0021
摘要： A thermally assisted magnetic head includes a magnetic pole that generates a writing magnetic field from an air bearing surface (ABS); a waveguide through which light propagates; and a plasmon generator generating near-field light from a near-field light generating end surface by coupling the light thereto in a surface plasmon mode. The magnetic pole includes a convex part protruding in a substantially V-shape along a light propagation direction of the waveguide. The plasmon generator includes a substantially V-shaped part contacting the convex part, and as seen from a side of the ABS, a thickness of the plasmon generator in a direction perpendicular to convex part contacting sides gradually increases from an end in a direction away from the waveguide, the convex part contacting sides being linear sides that form the substantially V-shaped part of the plasmon generator and contacting the convex part.
摘要翻译：热辅助磁头包括从空气轴承表面（ABS）产生书写磁场的磁极; 光传播的波导; 以及等离子体发生器，其通过以表面等离子体激发模式将光耦合到其上，从近场光产生端面产生近场光。磁极包括沿波导的光传播方向大致V形突出的凸部。等离子体发生器包括接触凸部的大致V形部分，并且从ABS的侧面看，等离子体发生器在与凸部接触的方向垂直的方向上的厚度从远离方向的端部逐渐增加所述波导，所述凸部接触侧为直线侧，其形成所述等离子体发生器的大致V形部分并接触所述凸部。

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