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    • 3. 发明申请
    • METHOD AND SYSTEM FOR CONTACTING OF A FLEXIBLE SHEET AND A SUBSTRATE
    • 用于接触柔性片和基片的方法和系统
    • WO2008087573A2
    • 2008-07-24
    • PCT/IB2008/050093
    • 2008-01-11
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.VERSCHUUREN, Marcus, A.MEGENS, Mischa
    • VERSCHUUREN, Marcus, A.MEGENS, Mischa
    • G03F7/0002B05D1/28B82Y10/00B82Y40/00Y10S438/973Y10S438/976
    • The invention relates to a method for contacting a flexible sheet to a first element with improved lateral alignment. The method includes a step of measuring a first lateral misalignment after establishing a first contact between the flexible sheet and either of the first element and a sheet parking surface called anchor in the first stage. If the 5 misalignment exceeds a predetermined threshold the flexible sheet is parked at the anchor such that it is not in contact with the first element, and the relative position of the first element and the anchor is altered during the second stage for correcting the mismatch during a contact between the flexible sheet and the first element to be established within the next step of the method. During the steps of shifting the contact point to obtain the second stage 10 the contacting process is more accurate and reproducible than the process for establishing the init ial contact. The invention also relates to an apparatus for executing the method, and the use of the method and apparatus for the manufacture of devices.
    • 本发明涉及一种使柔性片与第一元件接触的方法,该方法具有改进的横向对准。 该方法包括在第一阶段中建立柔性片与第一元件中的任一个和称为锚的片材停车面之间的第一接触之后,测量第一侧向偏移的步骤。 如果5个未对准超过预定阈值,则柔性片材停放在锚固件处,使得其不与第一元件接触,并且在第二阶段期间改变第一元件和锚的相对位置以纠正不匹配 在该方法的下一步骤中在柔性片和要建立的第一元件之间的接触。 在移动接触点以获得第二阶段10的步骤期间,接触过程比建立初始接触的过程更准确和可重现。 本发明还涉及一种用于执行该方法的装置,以及用于制造装置的方法和装置的使用。