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    • 2. 发明申请
    • IMAGE SENSOR, CAMERA SYSTEM COMPRISING THE IMAGE SENSOR AND METHOD OF MANUFACTURING SUCH A DEVICE
    • 图像传感器,包含图像传感器的摄像机系统及其制造方法
    • WO2004021444A1
    • 2004-03-11
    • PCT/IB2003/003752
    • 2003-07-31
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.FOLKERTS, Hein, O.MAAS, Joris, P., V.VERBUGT, Daniel, W., E.LUKIYANOVA, Natalia, V.HERMES, Daniel, H., J., M.HOEKSTRA, WillemMIEROP, Adrianus, J.
    • FOLKERTS, Hein, O.MAAS, Joris, P., V.VERBUGT, Daniel, W., E.LUKIYANOVA, Natalia, V.HERMES, Daniel, H., J., M.HOEKSTRA, WillemMIEROP, Adrianus, J.
    • H01L27/146
    • H01L27/14609
    • An image sensor (1) having a semiconductor body (2) with a first conductivity type and having a surface (3), the surface being provided with a number of cells (4), a cell comprising a photosensitive element (5) and a reset transistor (6), the reset transistor comprising a source region (7), a drain region (8) and a gate region (9), the source region (7) and the drain region (8) having a second conductivity type opposite to the first conductivity type, the source region (7) of the reset transistor (6) being electrically connected to the photosensitive element (5). There is a well region (10) present which well region extends from the surface (3) into the semiconductor body (2) and extends at least partly below the gate region (9) and the well region has a first conductivity type. The source region (7) extends at least substantially in a doped region (11) of the photosensitive element (5), the doped region (11) having a second conductivity type. The reduction of the source-well junction area reduced the number of white pixels and fixed pattern noise. In the method of manufacturing the image sensor, the well region (10) is positioned partly below the gate region (9) so that there is a distance (13) between the highly doped source region (7) and the well region (10). The distance (13) increases the depletion layer width between the source and well junction, so that tunnel currents no longer dominate the leakage currents and the related number of white pixels and fixed pattern noise are reduced.
    • 一种具有第一导电类型并具有表面(3)的半导体本体(2)的图像传感器(1),该表面设有多个单元(4),包括感光元件(5)和 复位晶体管(6),复位晶体管包括源极区(7),漏极区(8)和栅极区(9),源极区(7)和漏极区(8)具有相反的第二导电类型 到第一导电类型,复位晶体管(6)的源极区(7)电连接到感光元件(5)。 存在井区域(10),阱区域从表面(3)延伸到半导体本体(2)中并且至少部分地延伸到栅极区域(9)的下方,并且阱区域具有第一导电类型。 源极区域(7)至少基本上在感光元件(5)的掺杂区域(11)中延伸,掺杂区域(11)具有第二导电类型。 源 - 阱结面积的减少减少了白色像素的数量和固定的图案噪声。 在制造图像传感器的方法中,阱区域(10)部分地位于栅极区域(9)的下方,使得在高掺杂源极区域(7)和阱区域(10)之间存在距离(13) 。 距离(13)增加了源极和阱结之间的耗尽层宽度,使得隧道电流不再主导泄漏电流,并且相关数量的白色像素和固定模式噪声减小。