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    • 7. 发明授权
    • Imprint apparatus and method for fine structure lithography
    • 用于精细结构光刻的印刷装置和方法
    • US08147234B2
    • 2012-04-03
    • US12343550
    • 2008-12-24
    • Masahiko OginoMitsuru HasegawaAkihiro Miyauchi
    • Masahiko OginoMitsuru HasegawaAkihiro Miyauchi
    • B29C59/04
    • B29C59/04B29C35/16B29C2059/023B82Y10/00B82Y40/00G03F7/0002
    • An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
    • 用于形成精细结构光刻的压印装置包括:在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构,包括一对相对的辊,用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具,压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构,然后在辊之间的位置被圆柱形加压机构加压, 压印对象位于带状模具和支撑构件之间。
    • 9. 发明授权
    • Imprint apparatus
    • 印刷装置
    • US08021141B2
    • 2011-09-20
    • US12582732
    • 2009-10-21
    • Miho SasakiMasahiko OginoAkihiro MiyauchiNoritake ShizawaKyoichi Mori
    • Miho SasakiMasahiko OginoAkihiro MiyauchiNoritake ShizawaKyoichi Mori
    • B29C59/00B29C35/08
    • B29C59/022B29C2035/0827B29C2059/023
    • An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
    • 压印装置具有精细结构的头单元。 头单元包括精细的凹凸图案,在与形成凹凸面的面相反的微细图案层的表面上的树脂层,树脂的表面上的第一加压基材 在与第一加压基体的与接触树脂层的面相反的表面上的第二加压基底部件与接触精细压印图案层的面相反。 树脂层的弹性模量小于精细印刷图案层的弹性模量,第一加压基材的弹性模量小于树脂层的弹性模量。 可以进一步提供光源或热源。 头单元可以是透光的。 还可以提供更换层以进行更换。