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1. 发明授权

US08100011B2 Piezoelectric device, oscillation type gyro sensor, electronic device, and method of manufacturing piezoelectric device 有权
标题翻译：压电器件，振荡型陀螺仪传感器，电子器件及制造压电器件的方法
公开(公告)号：US08100011B2
公开(公告)日：2012-01-24
申请号：US11960041
申请日：2007-12-19
申请人： Koji Suzuki , Teruo Inaguma , Kazuo Takahashi
发明人： Koji Suzuki , Teruo Inaguma , Kazuo Takahashi
IPC分类号： G01P9/04 , G01C19/56
CPC分类号： G01C19/5642 , Y10T29/42
摘要： A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes detect a Coriolis force from the oscillating arm portion. A first lead electrode having a first area is disposed on the substrate and connected to the first detection electrode and connects the first detection electrode to the outside. A second lead electrode has a second area substantially the same as the first area. The second lead electrode is disposed on the substrate asymmetrical to the first lead electrode with respect to an axis in a longitudinal direction of the arm portion and connected to the second detection electrode. The second lead electrode connects the second detection electrode to the outside. A third lead electrode connects the drive electrode to the outside.
摘要翻译：公开了一种压电装置。基板具有臂部。压电构件设置在基板上。驱动电极通过压电元件的压电操作来振荡臂部。第一和第二检测电极从摆动臂部分检测科里奥利力。具有第一区域的第一引线电极设置在基板上并连接到第一检测电极，并将第一检测电极连接到外部。第二引线电极具有与第一区域基本相同的第二区域。第二引线电极相对于臂部的长度方向的轴线配置在与第一引线电极不对称的基板上，并与第二检测电极连接。第二引线电极将第二检测电极连接到外部。第三引线电极将驱动电极连接到外部。

2. 发明授权

US07583012B2 Piezoelectric element and method for manufacturing piezoelectric element 失效
标题翻译：压电元件及其制造方法
公开(公告)号：US07583012B2
公开(公告)日：2009-09-01
申请号：US11367996
申请日：2006-03-03
申请人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
发明人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
IPC分类号： H01L41/08
CPC分类号： G01C19/5663 , H01L41/094 , H01L41/316 , Y10T29/42 , Y10T29/49155
摘要： There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.
摘要翻译：需要能够在不损害压电特性的情况下提高生产率和产量的压电元件及其制造方法。压电元件设置有基板，设置在基板上的第一电极膜，设置在第一电极膜上的压电膜和设置在压电膜上的第二电极膜。压电薄膜具有由多个结晶化的压电薄膜构成的叠层结构。具有预定厚度的压电膜通过形成压电薄膜的成膜步骤和对压电薄膜进行热处理以结晶化的结晶热处理步骤的重复循环形成。以这种方式，可以产生在膜厚度方向上显示均匀结晶度的压电膜。

3. 发明授权

US07578187B2 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor 有权
标题翻译：振动陀螺传感器及调节振动陀螺传感器的方法
公开(公告)号：US07578187B2
公开(公告)日：2009-08-25
申请号：US11950725
申请日：2007-12-05
申请人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
发明人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
IPC分类号： G01P3/00 , G01P9/00
CPC分类号： G01C19/5663 , Y10T29/49002
摘要： A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.
摘要翻译：一种振动陀螺仪传感器元件，包括悬臂振动器，悬臂振子上的至少一个第一凹陷，设置在悬臂振动器上的一对检测电极和悬臂振子上的至少一个第二凹陷。从振动陀螺仪传感器元件的基部突出的悬臂振子和第一凹陷有效地调节振动器的垂直共振频率和水平共振频率之间的频率差。此外，第二凹陷有效地调节从检测电极输出的信号的差异。

4. 发明申请

US20090174292A1 VIBRATING GYROSENSOR 有权
标题翻译：振动陀螺仪
公开(公告)号：US20090174292A1
公开(公告)日：2009-07-09
申请号：US12116646
申请日：2008-05-07
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/04
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.
摘要翻译：振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。振动元件安装在支撑基板的表面上。振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。

5. 发明申请

US20080257044A1 Vibratory Gyrosensor 有权
标题翻译：振动陀螺仪
公开(公告)号：US20080257044A1
公开(公告)日：2008-10-23
申请号：US10599833
申请日：2006-02-23
申请人： Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
发明人： Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
IPC分类号： G01C19/56
CPC分类号： G01C19/5663 , G01C19/5656
摘要： To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.
摘要翻译：通过简单的结构实现尺寸缩小和高Q值提高特性。根据本发明的振动陀螺传感器1包括其上安装有电路元件的支撑基板2和布置在其上的多个焊盘4的布线图案; 以及安装在支撑基板的表面2-1上的振动元件20。振动元件20包括基部22，基部22具有安装表面22-2，该安装表面22-2设置有连接到焊盘的多个端子25; 以及从基部22的一侧以悬臂方式一体地延伸并具有与基部22的安装面齐平的面向基板的表面的振动部23，面向基板的表面设置有第一电极堆叠在第一电极层上的压电层28和堆叠在压电层上的第二电极层29,30。振动元件20通过将端子25与设置在它们之间的金属突起26接合到平台4而安装在支撑基板2上。

6. 发明授权

US07325452B2 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor 有权
标题翻译：振动陀螺传感器及调节振动陀螺传感器的方法
公开(公告)号：US07325452B2
公开(公告)日：2008-02-05
申请号：US11368153
申请日：2006-03-03
申请人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
发明人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
IPC分类号： G01P3/00 , G01P9/00
CPC分类号： G01C19/5663 , Y10T29/49002
摘要： A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.
摘要翻译：一种振动陀螺仪传感器，包括振动陀螺传感器元件，所述振动陀螺传感器元件包括悬臂振子，所述振动器包括压电膜，驱动电极和在第一表面上的一对检测电极以及安装所述振动陀螺传感器元件的支撑基板。振动陀螺传感器元件安装在支撑基板上，使得悬臂振动器的第一表面面向支撑基板。将悬臂振子的第一面以外的区域定义为要设置用于调节悬臂振动器的振动特性的凹陷的激光加工区域。

7. 发明申请

US20060197414A1 Vibrating gyrosensor 有权
标题翻译：振动陀螺传感器
公开(公告)号：US20060197414A1
公开(公告)日：2006-09-07
申请号：US11368144
申请日：2006-03-03
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/113
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.
摘要翻译：振动陀螺传感器包括支撑基板，其上形成有多个平台的布线图案，以及安装在支撑基板的表面上的振动元件，其中至少两个振动元件安装在支撑基板上，用于检测不同的振动轴向。

8. 发明申请

US20060196267A1 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor 有权
标题翻译：振动陀螺传感器及调节振动陀螺传感器的方法
公开(公告)号：US20060196267A1
公开(公告)日：2006-09-07
申请号：US11368153
申请日：2006-03-03
申请人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
发明人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
IPC分类号： G01P15/08
CPC分类号： G01C19/5663 , Y10T29/49002
摘要： A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.
摘要翻译：一种振动陀螺仪传感器，包括振动陀螺传感器元件，所述振动陀螺传感器元件包括悬臂振子，所述振动器包括压电膜，驱动电极和在第一表面上的一对检测电极以及安装所述振动陀螺传感器元件的支撑基板。振动陀螺传感器元件安装在支撑基板上，使得悬臂振动器的第一表面面向支撑基板。将悬臂振子的第一面以外的区域定义为要设置用于调节悬臂振动器的振动特性的凹陷的激光加工区域。

9. 发明申请

US20080196498A1 PIEZOELECTRIC DEVICE, OSCILLATION TYPE GYRO SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE 有权
标题翻译：压电元件，振荡型陀螺传感器，电子设备及制造压电元件的方法
公开(公告)号：US20080196498A1
公开(公告)日：2008-08-21
申请号：US11960041
申请日：2007-12-19
申请人： Koji Suzuki , Teruo Inaguma , Kazuo Takahashi
发明人： Koji Suzuki , Teruo Inaguma , Kazuo Takahashi
IPC分类号： G01C19/56 , H01L41/22
CPC分类号： G01C19/5642 , Y10T29/42
摘要： A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes detect a Coriolis force from the oscillating arm portion. A first lead electrode having a first area is disposed on the substrate and connected to the first detection electrode and connects the first detection electrode to the outside. A second lead electrode has a second area substantially the same as the first area. The second lead electrode is disposed on the substrate asymmetrical to the first lead electrode with respect to an axis in a longitudinal direction of the arm portion and connected to the second detection electrode. The second lead electrode connects the second detection electrode to the outside. A third lead electrode connects the drive electrode to the outside.
摘要翻译：公开了一种压电装置。基板具有臂部。压电构件设置在基板上。驱动电极通过压电元件的压电操作来振荡臂部。第一和第二检测电极从摆动臂部分检测科里奥利力。具有第一区域的第一引线电极设置在基板上并连接到第一检测电极，并将第一检测电极连接到外部。第二引线电极具有与第一区域基本相同的第二区域。第二引线电极相对于臂部的长度方向的轴线配置在与第一引线电极不对称的基板上，并与第二检测电极连接。第二引线电极将第二检测电极连接到外部。第三引线电极将驱动电极连接到外部。

10. 发明申请

US20080083278A1 VIBRATING GYROSCOPIC SENSOR AND METHOD OF ADJUSTING VIBRATING GYROSCOPIC SENSOR 有权
标题翻译：振动式陀螺仪传感器及调节振动式陀螺仪传感器的方法
公开(公告)号：US20080083278A1
公开(公告)日：2008-04-10
申请号：US11950725
申请日：2007-12-05
申请人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
发明人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
IPC分类号： G01C19/04 , H01S4/00
CPC分类号： G01C19/5663 , Y10T29/49002
摘要： A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.
摘要翻译：一种振动陀螺仪传感器元件，包括悬臂振动器，悬臂振子上的至少一个第一凹陷，设置在悬臂振动器上的一对检测电极和悬臂振子上的至少一个第二凹陷。从振动陀螺仪传感器元件的基部突出的悬臂振子和第一凹陷有效地调节振动器的垂直共振频率和水平共振频率之间的频率差。此外，第二凹陷有效地调节从检测电极输出的信号的差异。

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