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    • 6. 发明授权
    • Lapping apparatus and lapping method
    • 研磨装置和研磨方法
    • US06325699B1
    • 2001-12-04
    • US09426534
    • 1999-10-26
    • Koji SudoYoshiaki YanagidaTomokazu Sugiyama
    • Koji SudoYoshiaki YanagidaTomokazu Sugiyama
    • B24B4900
    • B24B37/005B24B37/048B24B49/16G11B5/1871G11B5/3116G11B5/3166G11B5/3173G11B5/3903
    • Disclosed are a lapping apparatus and a lapping method for compensating for warp in a work to be lapped, wherein the warp of the work is compensated for during the lapping process. A warp quantity of the work is detected during the lapping process and compensation is made. Hence, even warp caused during the lapping process can be compensated. It is also feasible to save the task of measuring the warp quantity of the work before lapping. An air pressure mechanism for applying pressure to the work in accordance with an air supply pressure is used as a warp straightening mechanism, whereby a minute warp quantity can be compensated for and controlled to zero. With the air pressure mechanism being adopted, it is possible to prevent excessive pressure from being applied to a lap jig.
    • 公开了一种用于补偿要研磨的工件中的翘曲的研磨装置和研磨方法,其中在研磨过程中补偿工件的翘曲。 在研磨过程中检测到工件的弯曲量,并进行补偿。 因此,可以补偿在研磨过程中引起的均匀翘曲。 在研磨之前保存测量工件的翘曲量的任务也是可行的。 使用用于根据供气压力对工件施加压力的空气压力机构作为经向矫直机构,从而可以将微小的翘曲量补偿并控制为零。 在采用气压机构的情况下,可以防止过度的压力施加在搭接夹具上。
    • 8. 发明申请
    • LAPPING APPARATUS AND LAPPING METHOD
    • 拉丝装置和拉丝方法
    • US20090061737A1
    • 2009-03-05
    • US12141416
    • 2008-06-18
    • Koji SudoYoshiaki YanagidaTeruaki Nishioka
    • Koji SudoYoshiaki YanagidaTeruaki Nishioka
    • B24B1/00B24B7/00
    • B24B37/005B24B37/042
    • A lap platen has a lapping surface contacting a surface of a work piece. A lap base has a support surface brought into contact with and supported by the lapping surface. An adapter has a first support part, a second support part and an arm part. The first support part is supported by the lap base. The work piece is attached to the second support part so that a surface of the work piece to be processed contacts the lapping surface. The arm part extends between the first and second support parts. A height adjusting mechanism adjusts a height from the lapping surface to the first support part. An inclination detector is provided to the adapter to detect an inclination of the adapter. The inclination of the adapter relative to the lapping surface is adjusted by adjusting the height of the first support part by the height adjusting mechanism.
    • 膝盖台具有接触工件表面的研磨表面。 搭接基座具有与研磨表面接触并由研磨表面支撑的支撑表面。 适配器具有第一支撑部分,第二支撑部分和臂部分。 第一支撑部分由膝盖支撑。 工件附接到第二支撑部分,使得待加工的工件的表面接触研磨表面。 臂部分在第一和第二支撑部分之间延伸。 高度调节机构调节从研磨表面到第一支撑部分的高度。 向适配器提供倾斜检测器以检测适配器的倾斜度。 适配器相对于研磨表面的倾斜度通过调节第一支撑部分的高度由高度调节机构来调节。