会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Method of forming silicon-contained crystal thin film
    • 形成含硅晶体薄膜的方法
    • US06468884B2
    • 2002-10-22
    • US09765728
    • 2001-01-19
    • Koji MiyakeKiyoshi Ogata
    • Koji MiyakeKiyoshi Ogata
    • H01L2136
    • H01L21/76254C30B19/00C30B19/12C30B29/06C30B29/60C30B31/22H01L21/26506
    • A method of forming a silicon-contained crystal thin film can efficiently form the crystal thin film of a relatively large thickness. In the method, hydrogen ions are implanted into a silicon-contained crystal substrate. Voids are formed by immersing the ion-implanted crystal substrate in a melted metal liquid containing, e.g., silicon and indium for heating the substrate. While pressing an ion-injected surface of the substrate, the substrate is heated by the melted metal liquid to form the voids. By cooling the liquid, the silicon in the supersaturated liquid is deposited on the surface of the substrate so that the silicon-contained crystal film is formed on the surface of the substrate. The substrate is divided in the void-formed position. Thereby, a thin film including the silicon-contained crystal film layered on a portion of the substrate is obtained. The silicon-contained crystal thin film thus obtained can be adhered to a support substrate, if necessary.
    • 形成含硅晶体薄膜的方法可以有效地形成厚度较大的晶体薄膜。 在该方法中,将氢离子注入到含硅晶体基板中。 通过将离子注入的晶体衬底浸入含有例如硅和铟的熔融金属液体中以加热衬底而形成空隙。 在按压衬底的离子注入表面的同时,通过熔化的金属液体加热衬底以形成空隙。 通过冷却液体,将过饱和液体中的硅沉积在基板的表面上,使得在基板的表面上形成含硅晶体膜。 基板被分成空隙形成位置。 由此,获得了包含层叠在基板的一部分上的含硅晶体膜的薄膜。 如果需要,由此获得的含硅晶体薄膜可以粘附到支撑基板上。