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1. 发明申请

US20110232846A1 MAGNETIC FIELD GENERATOR FOR MAGNETRON PLASMA 审中-公开
标题翻译： MAGNETRON等离子体磁场发生器
公开(公告)号：US20110232846A1
公开(公告)日：2011-09-29
申请号：US13154016
申请日：2011-06-06
申请人： Koji MIYATA , Kazuyuki TEZUKA , Koichi TATESHITA , Hiroo ONO , Kazuya NAGASEKI , Shinji HIMORI
发明人： Koji MIYATA , Kazuyuki TEZUKA , Koichi TATESHITA , Hiroo ONO , Kazuya NAGASEKI , Shinji HIMORI
IPC分类号： H01L21/3065 , C23C16/511
CPC分类号： H01L21/31116 , H01J37/32623 , H01J37/3266 , H01J37/32688 , H01L21/31138 , H01L21/32137 , H01L21/67069
摘要： Disclosed is a magnetic field generator for magnetron plasma. The magnetic field generator is provided with a plurality of magnetic segments, and generates a predetermined multi-pole magnetic field around the periphery of a workpiece substrate within a process chamber. The strength of the multi-pole magnetic field is controlled so that the state of the multi-pole magnetic field is matched different plasma processes. Further, the pattern of the multi-pole magnetic field can be changed so as to match different sizes of the substrate.
摘要翻译：公开了一种用于磁控管等离子体的磁场发生器。磁场发生器设置有多个磁段，并且在处理室内的工件衬底的周边周围产生预定的多极磁场。控制多极磁场的强度，使得多极磁场的状态与不同的等离子体处理相匹配。此外，可以改变多极磁场的图案，以便匹配基板的不同尺寸。

2. 发明申请

US20130004267A1 GATE VALVE AND SUBSTRATE PROCESSING SYSTEM USING SAME 审中-公开
标题翻译：门阀和基板加工系统
公开(公告)号：US20130004267A1
公开(公告)日：2013-01-03
申请号：US13529142
申请日：2012-06-21
申请人： Koichi TATESHITA
发明人： Koichi TATESHITA
IPC分类号： H01L21/677 , F16K3/12 , F16K3/30 , F16K25/00
CPC分类号： H01L21/67126 , F16K3/184 , F16K51/02
摘要： A gate valve includes a plurality of openings through which objects to be processed are loaded and unloaded; a valve body to be pressed toward the openings; a pressed portion provided to the valve body; a main slider slidable in parallel with a surface where the openings are formed; and a cam provided to the main slider and having a protrusion and an inclined portion inclined from the protrusion in a sloped shape, for pressing the pressed portion of the valve body in a state where the valve body faces the openings. The valve body has one or more slit-shaped openings serving as opening portions for opening the openings, and portions adjacent to the slit-shaped openings serving as blocking portions for blocking the openings.
摘要翻译：闸阀包括多个开口，待加工物体被加载和卸载; 将阀体压向开口; 被设置在所述阀体上的按压部; 主滑块可与形成开口的表面平行滑动; 以及凸轮，其设置在所述主滑块上，具有突出部和从所述突起部倾斜的倾斜部，所述倾斜部在所述阀体朝向所述开口的状态下按压所述阀体的被按压部。阀体具有一个或多个狭缝状开口，用作用于打开开口的开口部分，并且与狭缝状开口相邻的部分用作阻挡开口的阻挡部分。

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