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1. 发明授权

US06621636B2 Laser irradiation apparatus and method of laser irradiation 有权
公开(公告)号：US06621636B2
公开(公告)日：2003-09-16
申请号：US10026340
申请日：2001-12-21
申请人： Koichiro Tanaka , Setsuo Nakajima , Takehito Yagi , Mikito Ishii , Kenichiro Nishida , Norihito Kawaguchi , Miyuki Masaki , Atsushi Yoshinouchi
发明人： Koichiro Tanaka , Setsuo Nakajima , Takehito Yagi , Mikito Ishii , Kenichiro Nishida , Norihito Kawaguchi , Miyuki Masaki , Atsushi Yoshinouchi
IPC分类号： G02B2710
CPC分类号： G02B27/108 , G02B27/145
摘要： A laser irradiation apparatus having a low running cost compared to the conventional, and a laser irradiation method using the laser irradiation apparatus, are provided. Crystal grains having a size in the same order as, or greater than, conventional grains are formed. The cooling speed of a semiconductor film is made slower, and it becomes possible to form crystal grains having a grain size in the same order as, or greater than, the size of grains formed in the case of irradiating laser light having a long output time to the semiconductor film. This is achieved by delaying one laser light with respect to another laser light, combining the laser lights, and performing irradiation to the semiconductor film in the case of irradiating laser light using a solid state laser as a light source, which has a short output time.

2. 发明授权

US06890839B2 Method and apparatus for laser annealing configurations of a beam 有权
标题翻译：用于激光退火梁的构造的方法和装置
公开(公告)号：US06890839B2
公开(公告)日：2005-05-10
申请号：US10257460
申请日：2002-01-15
申请人： Norihito Kawaguchi , Kenichiro Nishida , Mikito Ishii , Takehito Yagi , Miyuki Masaki , Atsushi Yoshinouchi , Koichiro Tanaka
发明人： Norihito Kawaguchi , Kenichiro Nishida , Mikito Ishii , Takehito Yagi , Miyuki Masaki , Atsushi Yoshinouchi , Koichiro Tanaka
IPC分类号： A61B18/20 , B23K26/06 , B23K26/073 , H01L21/268 , H01S3/00 , H01L21/00 , H01L21/20 , H01L21/26 , H01L21/331
CPC分类号： H01S3/005 , B23K26/0732
摘要： An object of the present invention is to provide a laser annealing method and apparatus capable of performing uniform beam emission. By means of the present invention, uniform beam application to a sample can be achieved because a linear cross-sectional configuration can be created in an optical system with a beam having a Gaussian distribution while areas of strong light intensity are avoided by rotating the beam from a laser light source at a prescribed angle by means of rotating means even when the beam pattern of the beam from the laser light source has a non-uniform intensity distribution.
摘要翻译：本发明的一个目的是提供能够执行均匀的束发射的激光退火方法和装置。通过本发明，可以实现对样品的均匀波束施加，因为可以在具有高斯分布的光束的光学系统中产生线性横截面配置，而通过将光束从即使当来自激光光源的光束的光束图案具有不均匀的强度分布时，通过旋转装置以规定角度的激光光源。

3. 发明授权

US06894839B2 Illumination optical system and laser processor having the same 有权
标题翻译：照明光学系统和激光处理器相同
公开(公告)号：US06894839B2
公开(公告)日：2005-05-17
申请号：US10081975
申请日：2002-02-22
申请人： Yoshikazu Sugiyama , Miyuki Masaki , Takehito Yagi
发明人： Yoshikazu Sugiyama , Miyuki Masaki , Takehito Yagi
IPC分类号： G03F7/20 , G02B1/12 , G02B27/10
CPC分类号： G02B1/12
摘要： An illumination optical system has superior image formation capabilities, and can radiate a linear beam with excellent illumination uniformity and a narrow line width having a large aspect ratio; the illumination optical system comprises an afocal beam expander system which expands an beam illuminated from a laser light source; a linear beam-forming lens system having at least refractive power in a second direction which is substantially at a right angle to at least a first direction, the linear beam-forming lens system converting the beam, illuminated from said beam expander system, to a linear beam having its long side in said first direction; a lens array section having a plurality of element lenses, arranged along said first direction; and a condenser optical system which illuminates a processed face by reconnecting images of said linear beam from each of said element lenses thereon.
摘要翻译：照明光学系统具有优异的图像形成能力，并且可以辐射具有优异照明均匀性的线性束和具有大纵横比的窄线宽度; 该照明光学系统包括一个放大从激光光源照射的光束的无焦束扩束器系统; 线性波束成形透镜系统，其至少在第二方向上具有与至少第一方向成直角的折射力，所述线性波束成形透镜系统将从所述光束扩展器系统照射的光束转换成线性光束在所述第一方向上具有长边; 具有沿着所述第一方向布置的多个元件透镜的透镜阵列部分; 以及聚光器光学系统，其通过从其中的每个所述元件透镜重新连接所述线性光束的图像照亮经处理的面。

4. 发明授权

US08093913B2 Film thickness measurement device and method 有权
标题翻译：薄膜厚度测量装置及方法
公开(公告)号：US08093913B2
公开(公告)日：2012-01-10
申请号：US12108701
申请日：2008-04-24
申请人： Hidetoshi Takimoto , Takehito Yagi , Yoshiyuki Saito , Tsuyoshi Terauchi
发明人： Hidetoshi Takimoto , Takehito Yagi , Yoshiyuki Saito , Tsuyoshi Terauchi
IPC分类号： G01R27/26
CPC分类号： G01N33/30
摘要： A film thickness measurement device, which measures the film thickness of an oil film of lubricating oil, formed in a gap between a piston ring and an electrode provided flush with a piston ring sliding surface of a cylinder liner, by detecting the electrostatic capacitance across the gap, employs an electrostatic capacitance detection portion, which charges the electrostatic capacitance by supplying a constant current to the electrode, detects the electrostatic capacitance based on changes in the charging voltage accompanying the charging, and outputs a detection signal indicating the electrostatic capacitance, and a film thickness computation portion, which calculates the film thickness of the oil film based on the electrostatic capacitance indicated by the detection signal input from the electrostatic capacitance detection portion.
摘要翻译：一种薄膜厚度测量装置，其测量形成在活塞环和电极之间的间隙中的润滑油油膜的膜厚，通过检测气缸套的静电电容而与气缸套的活塞环滑动表面齐平间隙，采用静电电容检测部分，其通过向电极提供恒定电流来对静电电容进行充电，基于随充电的充电电压的变化检测静电电容，并输出表示静电电容的检测信号，以及膜厚计算部，其根据从静电电容检测部输入的检测信号表示的静电电容计算油膜的膜厚。

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