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    • 1. 发明授权
    • Composition for manufacturing doped or undoped zinc oxide thin film and method for manufacturing zinc oxide thin film using same
    • 用于制造掺杂或未掺杂的氧化锌薄膜的组合物及其制造使用其的氧化锌薄膜的方法
    • US09096441B2
    • 2015-08-04
    • US13265544
    • 2010-04-21
    • Koichiro InabaKouji ToyotaKenichi HagaKouichi Tokudome
    • Koichiro InabaKouji ToyotaKenichi HagaKouichi Tokudome
    • C01G9/02H01L31/18
    • C01G9/02C01P2002/50C01P2002/52C01P2002/72C01P2002/86C01P2006/40C01P2006/42C01P2006/60H01L31/1884Y02E10/50
    • Disclosed is a composition for forming a zinc oxide thin film, which contains an organic zinc compound as a starting material, is not ignitable, and can be easily handled. The composition for forming a zinc oxide thin film is capable of forming a transparent zinc oxide thin film which is not doped or doped with a group 3B element by being heated at 300° C. or less. Also disclosed is a method for obtaining a transparent zinc oxide thin film, which is not doped or doped with a group 3B element, using the composition. Specifically, the composition for forming a zinc oxide thin film contains a product which is obtained by partially hydrolyzing an organic zinc compound by adding water to the organic zinc compound or a solution of the organic zinc compound and a group 3B element compound. In cases when a group 3B element compound is contained, the molar ratio of the group 3B element compound to the organic zinc compound is within the range of 0.005-0.3. The composition is applied to a substrate surface and then heated, thereby forming a zinc oxide thin film which is doped with the group 3B element.
    • 公开了一种用于形成氧化锌薄膜的组合物,其含有有机锌化合物作为原料,不可点燃,并且可以容易地处理。 用于形成氧化锌薄膜的组合物能够通过在300℃或更低温度下加热而形成不掺杂3B族元素的透明氧化锌薄膜。 还公开了使用该组合物获得不掺杂或掺杂有3B族元素的透明氧化锌薄膜的方法。 具体地,用于形成氧化锌薄膜的组合物含有通过向有机锌化合物或有机锌化合物和3B族元素化合物的溶液中添加水部分水解有机锌化合物而获得的产物。 在含有3B族元素化合物的情况下,3B族元素化合物与有机锌化合物的摩尔比在0.005〜0.3的范围内。 将组合物施加到基材表面,然后加热,从而形成掺杂有3B族元素的氧化锌薄膜。