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    • 3. 发明授权
    • Apparatus for measuring hardness of ultraviolet curing transformation
agent comprising stain and method for the same
    • 用于测量紫外线固化转化剂的硬度的装置,其包括染色及其方法
    • US5656939A
    • 1997-08-12
    • US452599
    • 1995-05-25
    • Izumi SerizawaMasahiro KuranoYasusuke Takahashi
    • Izumi SerizawaMasahiro KuranoYasusuke Takahashi
    • B41F23/04B41M7/00G01N27/04G01N33/32G01N33/44G01G7/10
    • G01N33/32G01N27/041G01N33/44
    • An apparatus for measuring hardness of an ultraviolet curing transformation agent comprising a stain of the present invention comprises a light source device for emitting beams including ultraviolet rays, an optical filter member through which the ultraviolet rays having a predetermined wavelength among the beams emitted from the light source device pass, and a measuring device for measuring electric conductivity of the ultraviolet curing transformation agent comprising the stain, provided at a location where the ultraviolet rays having the predetermined wavelength irradiate. Further, the measuring device comprises an electrode portion including electrodes on which the ultraviolet curing transformation agent is applied, and the electrodes are connected through a power supply and a measuring device for measuring the electric conductivity. Therefore, the measuring apparatus of the present invention can readily and rapidly determine the hardness of the UV curing transformation agent comprising a stain such as a pigment, corresponding to the printing condition.
    • 一种用于测量包含本发明的染色剂的紫外线固化转化剂的硬度的装置,包括:用于发射包含紫外线的光束的光源装置;从所述光发射的光束中具有预定波长的紫外线的滤光器部件 源装置通过的测定装置,以及设置在具有规定波长的紫外线照射的位置的包含污渍的紫外线固化转化剂的导电性的测定装置。 此外,测量装置包括电极部分,包括施加有紫外线固化转化剂的电极,并且电极通过电源和用于测量电导率的测量装置连接。 因此,本发明的测定装置可以容易且快速地确定与印刷条件对应的包含颜料等染色剂的UV固化转化剂的硬度。
    • 5. 发明授权
    • Apparatus for photochemically ashing a photoresist
    • 光刻胶化光刻胶的装置
    • US5176782A
    • 1993-01-05
    • US802658
    • 1991-12-09
    • Norio IshibashiIzumi Serizawa
    • Norio IshibashiIzumi Serizawa
    • G03F7/42H01L21/00H01L21/027H01L21/30
    • H01L21/67017G03F7/42
    • An apparatus for photochemically decomposing a photoresist is disclosed wherein processing time can be minimized by inducing a uniform photochemical oxidative decomposing reaction over the whole surface of a base board, and an ozone gas atmosphere can be utilized efficiently. The apparatus includes a rotatable circular table supporting one or more base boards and an ashing platform arranged around the periphery of the table including an ozone feeding slit and an ozone discharge slit. The apparatus also includes a plurality of ultraviolet ray lamps arranged inside a box-shaped vessel located above the ashing platform. An upper cover plate is pivotally mounted on the ashing platform and includes a transparent window plate through which the ultraviolet rays pass to irradiate the base boards. An airtight flat space is formed between the ashing platform and the upper cover to contain the ozone atmosphere.
    • 公开了一种用于光致化学分解光致抗蚀剂的装置,其中可以通过在基板的整个表面上引发均匀的光化学氧化分解反应来最小化处理时间,并且可以有效地利用臭氧气体气氛。 该装置包括支撑一个或多个基板的可旋转圆台,以及布置在桌子周围的灰化平台,包括臭氧供给狭缝和臭氧排放狭缝。 该装置还包括布置在位于灰化平台上方的盒状容器内的多个紫外线灯。 上盖板可枢转地安装在灰化平台上,并且包括透明窗板,紫外线通过该透明窗板照射基板。 在灰化平台和上盖之间形成一个气密的平坦空间以容纳臭氧气氛。