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    • 6. 发明授权
    • Brush scrubbing apparatus
    • 刷子洗刷装置
    • US06219872B1
    • 2001-04-24
    • US09263687
    • 1999-03-05
    • Koji UekiTakashi Osako
    • Koji UekiTakashi Osako
    • B08B104
    • H01L21/67046B08B1/04
    • A brush scrubbing apparatus is made up of a wafer holder which retains a wafer, a brush which removes a particle on the wafer, a driver which rotates at least one of the wafer holder and the wafer, an alignment mechanism which defines a relative position between the brush and the wafer holder, and controller which controls the alignment mechanism responding to a driving power supply voltage in the driver. The brush scrubbing apparatus can precisely get the reference position for deciding the pushing distance without using the eye measurement.
    • 刷子洗涤装置由保持晶片的晶片保持器,去除晶片上的颗粒的刷子,旋转晶片保持器和晶片中的至少一个的驱动器构成的晶片保持器,限定了晶片保持器和晶片之间的相对位置的对准机构 刷子和晶片保持器,以及控制器,其响应于驱动器中的驱动电源电压来控制对准机构。 刷洗装置可以精确地获得用于决定推送距离的参考位置,而不使用眼睛测量。