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    • 2. 发明授权
    • Piezoelectric actuator and device
    • 压电致动器和装置
    • US07514843B2
    • 2009-04-07
    • US11175165
    • 2005-07-07
    • Reiko NagahamaYutaka Yamazaki
    • Reiko NagahamaYutaka Yamazaki
    • H01L41/04H02N2/00
    • H01L41/0906G04C3/12
    • A generally diamond-shaped detection electrode is formed in the approximate center of the piezoelectric element. The strain resulting from the bending secondary vibration mode in the vicinity of the detection electrode is minimized because the detection electrode is formed in such a manner as to include a vibrational node of the longitudinal primary vibrational mode and a vibrational node of the bending secondary vibrational mode. As a result, when the phase difference between the drive signal and the detection signal is detected, the effect of vibration in the bending secondary vibration mode on the detected phase difference can be suppressed and a single drive frequency can be determined with respect to a prescribed phase difference. Thus, the drive performance of the vibrating body with respect to a driven body (i.e., a body driven by the vibrating body) can be reliably improved because, by controlling the drive frequency such that the phase difference equals a prescribed value, the vibrating body can be made to vibrate at a desired frequency and vibrate in such a manner that the desired vibration components are achieved in each vibration mode.
    • 大致菱形检测电极形成在压电元件的大致中心。 由于检测电极以包括纵向主振动模式的振动节点和弯曲次级振动模式的振动节点的方式形成,所以由检测电极附近的弯曲二次振动模式产生的应变最小化 。 结果,当检测到驱动信号和检测信号之间的相位差时,可以抑制弯曲二次振动模式下的振动对检测到的相位差的影响,并且可以相对于规定的规定确定单个驱动频率 相位差。 因此,通过控制驱动频率使相位差等于规定值,能够可靠地提高振动体相对于被驱动体(即,被振动体驱动的身体)的驱动性能,振动体 可以以期望的频率振动并以使得在每个振动模式下实现期望的振动分量的方式振动。
    • 3. 发明授权
    • Piezoelectric actuator and device
    • 压电致动器和装置
    • US07119476B2
    • 2006-10-10
    • US11177328
    • 2005-07-11
    • Reiko Nagahama
    • Reiko Nagahama
    • H01L41/09H01L41/047H02N2/12
    • H02N2/103G02B7/102G04C3/12H02N2/004H02N2/008H02N2/126
    • Detection electrodes 82D and 82E are formed at positions that include an antinode of a flexural oscillation mode. The strain of flexural oscillation reaches a maximum and the effects on the phase difference in the longitudinal oscillation mode can be cancelled out. The detection electrodes 82D and 82E are formed at the positions of drive electrodes 82B and 82C used to excite the flexural oscillation mode. A phase difference in the flexural oscillation mode opposite in sign relative to the longitudinal oscillation mode is created making it is easy to classify based on the phase difference between a frequency at which the longitudinal oscillation mode is dominant and a frequency at which the flexural oscillation mode is dominant. Thus, reliable control can be achieved based on the oscillation behaviors at each frequency ensuring a satisfactory drive force based on oscillation in the longitudinal oscillation mode.
    • 检测电极82D和82E形成在包括弯曲振荡模式的波腹的位置处。 弯曲振动的应变达到最大值,并且可以抵消对纵向振荡模式的相位差的影响。 检测电极82D和82E形成在用于激发弯曲振荡模式的驱动电极82B和82C的位置。 产生与纵向振动模式相反的弯曲振动模式的相位差,使得根据纵向振动模式占优势的频率与弯曲振荡模式的频率之间的相位差易于分类 是主导的 因此,可以基于每个频率的振荡特性实现基于纵向振荡模式中的振荡的令人满意的驱动力的可靠控制。
    • 7. 发明申请
    • Piezoelectric actuator and device
    • 压电致动器和装置
    • US20070188048A1
    • 2007-08-16
    • US11175165
    • 2005-07-07
    • Reiko NagahamaYutaka Yamazaki
    • Reiko NagahamaYutaka Yamazaki
    • H01L41/00
    • H01L41/0906G04C3/12
    • A generally diamond-shaped detection electrode is formed in the approximate center of the piezoelectric element. The strain resulting from the bending secondary vibration mode in the vicinity of the detection electrode is minimized because the detection electrode is formed in such a manner as to include a vibrational node of the longitudinal primary vibrational mode and a vibrational node of the bending secondary vibrational mode. As a result when the phase difference between the drive signal and the detection signal is detected, the effect of vibration in the bending secondary vibration mode on the detected phase difference can be suppressed and a single drive frequency can be determined with respect to a prescribed phase difference. Thus, the drive performance of the vibrating body with respect to a driven body (i.e., a body driven by the vibrating body) can be reliably improved because, by controlling the drive frequency such that the phase difference equals a prescribed value, the vibrating body can be made to vibrate at a desired frequency and vibrate in such a manner that the desired vibration components are achieved in each vibration mode.
    • 大致菱形检测电极形成在压电元件的大致中心。 由于检测电极以包括纵向主振动模式的振动节点和弯曲次级振动模式的振动节点的方式形成,所以由检测电极附近的弯曲二次振动模式产生的应变最小化 。 结果,当检测到驱动信号和检测信号之间的相位差时,可以抑制弯曲二次振动模式下的振动对检测的相位差的影响,并且可以相对于规定的相位来确定单个驱动频率 区别。 因此,通过控制驱动频率使相位差等于规定值,能够可靠地提高振动体相对于被驱动体(即,被振动体驱动的身体)的驱动性能,振动体 可以以期望的频率振动并以使得在每个振动模式下实现期望的振动分量的方式振动。
    • 8. 发明授权
    • Drive method for piezoelectric actuator, drive apparatus for piezoelectric actuator, electronic device, control program for drive apparatus for piezoelectric actuator, and recording medium
    • 用于压电致动器的驱动方法,压电致动器的驱动装置,电子装置,用于压电致动器的驱动装置的控制程序和记录介质
    • US07247970B2
    • 2007-07-24
    • US11171183
    • 2005-07-01
    • Jun MatsuzakiTakashi KawaguchiReiko Nagahama
    • Jun MatsuzakiTakashi KawaguchiReiko Nagahama
    • H01L41/08
    • H02N2/004H02N2/103H02N2/142
    • A frequency of a drive signal supplied to a piezoelectric element is swept within a specific range, a detection signal indicating the vibrating state of a vibrating member is detected, and the sweep speed of the drive signal frequency supplied to the piezoelectric element is controlled based on this detection signal. Thus, even if nonuniformities occur in the drive frequency of the piezoelectric element due to fluctuations in the surrounding temperature or the load, such nonuniformities can be overcome without any adjustments, and the piezoelectric element can be reliably driven. Also, since the sweep speed of the drive signal frequency is at a high speed when the vibrating member is in a non-drive state, needless drive signal output time during which the piezoelectric element cannot be driven can be reduced, needless power consumption can be curtailed, and nonuniformities in the drive speed of the driven object can also be reduced.
    • 提供给压电元件的驱动信号的频率在特定范围内扫描,检测表示振动部件的振动状态的检测信号,并且基于以下方式控制提供给压电元件的驱动信号频率的扫描速度: 该检测信号。 因此,即使由于周围温度或负载的波动而在压电元件的驱动频率上发生不均匀性,也可以克服这种不均匀性而无需调整,可以可靠地驱动压电元件。 此外,由于当振动部件处于非驱动状态时驱动信号频率的扫描速度处于高速度,所以可以减少压电元件不能驱动的不必要的驱动信号输出时间,不需要功率消耗 削减驱动对象的驱动速度的不均匀性也可以减小。