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1. 发明授权

US5226758A Method and an apparatus for handling wafers 失效
标题翻译：用于处理波形的方法和装置
公开(公告)号：US5226758A
公开(公告)日：1993-07-13
申请号：US812621
申请日：1991-12-23
申请人： Kohichi Tanaka , Makoto Tsukada , Fumio Suzuki
发明人： Kohichi Tanaka , Makoto Tsukada , Fumio Suzuki
IPC分类号： H01L21/304 , H01L21/00
CPC分类号： B24B37/345 , H01L21/67023 , Y10S414/137
摘要： A semiconductor wafer handling apparatus and method for transferring a wafer, one of whose faces has been already polished, from a wafer holder, which holds the wafer with the wafer's polished face facing downward, to a wafer cassette submerged in water contained in a water tank; the apparatus includes a wafer receive assembly and a water tank and the wafer receive assembly has a flat surface and is adapted to swing between an up-facing position at which the flat surface faces upward and a down-facing position at which the flat surface faces downward, and the wafer receive assembly is provided with ejection nozzles which eject water with a force sufficient to keep the wafer floating, and the water tank contains a wafer cassette to receive the wafer, and is capable of forcing the wafer which is left to sink in the water to enter the wafer cassette; whereas the method comprises: dropping the wafer from the wafer holder with the polished face facing downward onto a thin water layer formed over the wafer receive assembly; swinging the wafer receive assembly together with the wafer through an angle of about 180.degree. so that the wafer is turned upside down and brought in the water tank, whereupon the wafer sinks through the water with the polished face facing upward; and forcing the wafer to enter the wafer cassette.

2. 发明授权

US5538465A Elastic foamed sheet and wafer-polishing jig using the sheet 失效
公开(公告)号：US5538465A
公开(公告)日：1996-07-23
申请号：US369653
申请日：1995-01-06
申请人： Shigeyoshi Netsu , Kihachiro Watanabe , Makoto Tsukada
发明人： Shigeyoshi Netsu , Kihachiro Watanabe , Makoto Tsukada
IPC分类号： B24B37/04 , B24B37/30 , H01L21/304 , B24B7/04
CPC分类号： B24B37/30 , Y10T428/249961 , Y10T428/249975 , Y10T428/249979
摘要： An elastic foamed sheet is disclosed which is usable as waxless polishing backing pads for wafers and capable of producing mirror polish wafers excelling in flatness.This elastic foamed sheet possesses at least a foamed layer 2 and is characterized by the fact that a plurality of bubbles 4 in the foamed layer 2 meet the following conditions:(1) that the bubbles are slender discrete bubbles erected parallelly to one another and dispersed at a substantially equal pitch in the direction of width of the foamed layer 2 and the bubbles 4 are substantially equal in size, shape, and position of formation in the direction of thickness of the foamed layer 2,(2) that center lines of the bubbles 4 in the direction of length thereof are parallel to the direction of thickness of the foamed layer 2, and(3) that the diameters of the bubbles 4 are minimized in the terminal part of the foamed layer 2 on one surface side thereof and gradually increased in the direction from the one surface side to the other surface side of foamed layer 2 until the bubbles form openings 6 thereof in the surface of the foamed layer 2.

3. 发明授权

US5333020A Sprocket wheel for advancing film and device for advancing film using said sprocket wheel 失效
标题翻译：用于前进胶片的链轮和使用所述链轮推进胶片的装置
公开(公告)号：US5333020A
公开(公告)日：1994-07-26
申请号：US93689
申请日：1993-07-20
申请人： Makoto Tsukada , Yutaka Tokue
发明人： Makoto Tsukada , Yutaka Tokue
IPC分类号： G03B1/00 , G03B1/22 , G03B1/24 , G03B1/38 , G03B17/00 , G03B21/44
CPC分类号： G03B1/24
摘要： Mounted on a horizontal shaft 1 extending along surfaces of a film f are sprocket wheels 2 each having three tooth pairs 2a adapted to engage with perforations on the film. The tooth pairs 2a are angularily spaced apart from each other by 120 degrees around a periphery of the sprocket wheel 2. A triangular cam 11 is attached on one end of a horizontal shaft 7 rotatable in unison with the shaft 1. A lever 17 is attached to a horizontal shaft 15 carrying a cam follower 16 rotatable in unison with the rotation of the cam 11. A projection 20 which reciprocates registration pins 22 for engagement with and disengagement from the perforations g of the film f is fitted into an elongated slot 17a of the lever 17. A switching lever 14 is provided for displacement of the shaft 7 into a position where the shaft 7 is prevented from rotating even when the horizontal shaft 1 is rotated.
摘要翻译：安装在沿着薄膜f的表面延伸的水平轴1上的是链轮2，每个齿轮具有适于与薄膜上的穿孔啮合的三个齿对2a。齿对2a围绕链轮2的周边彼此间隔开120度。三角形凸轮11安装在可与轴1一体旋转的水平轴7的一端上。连杆17 到承载具有与凸轮11的旋转一致可旋转的凸轮从动件16的水平轴15.将往复运动用于与胶片f的穿孔g接合和分离的对准销22的突起20嵌合到杠杆17.设置有切换杆14，用于将轴7移动到即使在水平轴1旋转时也防止轴7旋转的位置。

4. 发明授权

US5409770A Elastic foamed sheet and wafer-polishing jig using the sheet 失效
标题翻译：弹性发泡片和使用该片的晶片抛光夹具
公开(公告)号：US5409770A
公开(公告)日：1995-04-25
申请号：US35608
申请日：1993-03-23
申请人： Shigeyoshi Netsu , Kihachiro Watanabe , Makoto Tsukada
发明人： Shigeyoshi Netsu , Kihachiro Watanabe , Makoto Tsukada
IPC分类号： B24B37/04 , B24B37/30 , H01L21/304 , H01L21/00
CPC分类号： B24B37/30 , Y10T428/249961 , Y10T428/249975 , Y10T428/249979
摘要： An elastic foamed sheet is disclosed which is usable as waxless polishing backing pads for wafers and capable of producing mirror polish wafers excelling in flatness.This elastic foamed sheet possesses at least a foamed layer 2 and is characterized by the fact that a plurality of bubbles 4 in the foamed layer 2 meet the following conditions:(1) that the bubbles are slender discrete bubbles erected parallelly to one another and dispersed at a substantially equal pitch in the direction of width of the foamed layer 2 and the bubbles 4 are substantially equal in size, shape, and position of formation in the direction of thickness of the foamed layer 2,(2) that center lines of the bubbles 4 in the direction of length thereof are parallel to the direction of thickness of the foamed layer 2, and(3) that the diameters of the bubbles 4 are minimized in the terminal part of the foamed layer 2 on one surface side thereof and gradually increased in the direction from the one surface side to the other surface side of foamed layer 2 until the bubbles form openings 6 thereof in the surface of the foamed layer 2.
摘要翻译：公开了一种弹性发泡片，其可用作晶片的无蜡抛光衬垫，并且能够生产出优异的平面度的镜面抛光晶片。该弹性发泡片材至少具有发泡层2，其特征在于，泡沫层2中的多个气泡4满足以下条件：（1）气泡是彼此平行并分散的细长的离散气泡在发泡层2的宽度方向上基本相等的间距和气泡4在发泡层2的厚度方向上的尺寸，形状和形成位置基本相等，（2）中心线在其长度方向上的气泡4与发泡层2的厚度方向平行，（3）在发泡层2的一个表面侧的末端部分中气泡4的直径最小化，在发泡层2的一个表面侧到另一个表面侧的方向上增加，直到泡沫在发泡层2的表面中形成开口6。

5. 发明授权

US5282289A Scrubber apparatus for cleaning a thin disk work 失效
标题翻译：用于清洁薄磁盘工作的清洗设备
公开(公告)号：US5282289A
公开(公告)日：1994-02-01
申请号：US998076
申请日：1992-12-28
申请人： Fumihiko Hasegawa , Makoto Tsukada , Hideo Kudo , Masayuki Yamada , Isao Uchiyama
发明人： Fumihiko Hasegawa , Makoto Tsukada , Hideo Kudo , Masayuki Yamada , Isao Uchiyama
IPC分类号： H01L21/304 , B08B1/04 , H01L21/00 , B08B11/02
CPC分类号： H01L21/67028 , B08B1/04
摘要： A scrubber cleaner for cleaning the unsucked face and peripheral chamfers of a semiconductor wafer. A wafer holder capable of holding the wafer by vacuum suction and turning the wafer circumferentially, and including a wafer suction head for fixing the wafer on it and a motor to rotate the suction head. A brush assembly including a rotatory plate having a brushing surface on one side consisting of a flat ring portion and a side-of-cylinder portion, and being capable of shifting axially and in radial directions; a motor for rotating the rotatory plate circumferentially; an air cylinder for shifting the rotatory plate axially; and another air cylinder for shifting the rotatory plate in radial directions. The side-of-cylinder portion of the brushing surface axially extends from the inner boundary of the ring portion, and the rotatory plate is disposed such that the flat ring portion of the brushing surface of the brush is opposed to and in parallel to the unsucked face of the wafer which is held on the suction head.
摘要翻译：洗涤器清洁器，用于清洁半导体晶片的未起落的表面和周边倒角。一种晶片保持器，其能够通过真空吸附保持晶片，并且周向地转动晶片，并且包括用于将晶片固定在其上的晶片吸入头和用于旋转吸头的电动机。一种刷组件，包括：旋转板，其一侧具有由平环部和侧筒部组成的一侧的刷表面，能够沿轴向和径向移动; 周向旋转旋转板的马达; 轴向移动旋转板的气缸; 以及用于沿径向方向移动旋转板的另一气缸。刷子表面的圆筒部分从环部的内边缘轴向延伸，并且旋转板被设置成使得刷子的刷洗表面的平环部分与未塞的部件相对并平行保持在吸头上的晶片的表面。

6. 发明授权

US5566379A Economical recording and reproducing apparatus which performs real-time processing of digital audio data 失效
标题翻译：执行数字音频数据的实时处理的经济的记录和再现装置
公开(公告)号：US5566379A
公开(公告)日：1996-10-15
申请号：US459527
申请日：1995-06-02
申请人： Akinori Mawatari , Tetsuji Ono , Hideo Kitayama , Makoto Tsukada , Kazumu Abe , Yoshinori Matsuoka , Toshio Mori , Tomoko Mita
发明人： Akinori Mawatari , Tetsuji Ono , Hideo Kitayama , Makoto Tsukada , Kazumu Abe , Yoshinori Matsuoka , Toshio Mori , Tomoko Mita
IPC分类号： G06F12/00 , G11B20/10 , G11B27/034 , G11B27/10 , G11B27/32 , G11B27/34 , G11B5/09 , G11B5/02
CPC分类号： G11B20/10527 , G11B27/034 , G11B27/105 , G11B27/329 , G11B2220/20 , G11B27/34
摘要： An audio signal recording and reproducing apparatus can perform realtime processing with a structure having a low cost. The audio signal recording and reproducing apparatus records a series of input audio signals as digital audio data, and reproduces and outputs the input signals using the recorded digital audio data as output audio signals. An input audio signal processing unit converts the series of input audio signals into digital audio data. A data file recording unit records the digital audio data, as digital audio data file information, on a recording medium, the recording medium having a plurality of clusters in which data having a predetermined number of bytes is recorded, the digital audio file information being recorded over a plurality of clusters. A file management information recording unit records on the recording medium file management information representing the reproducing order of the clusters in which the digital audio data file information is recorded. A directory information recording unit records on the recording medium directory information including at least the number of the first cluster recorded first when the digital audio data is recorded. A reproduction procedure file information recording unit records on the recording medium the reproduction procedure file information including at least the number of the first cluster of a digital audio data file to be reproduced. An output audio signal processing unit converts digital audio data, which is read out from the recording medium in accordance with the reproduction procedure file information, into output audio signals.
摘要翻译：音频信号记录和再现装置可以以低成本的结构执行实时处理。音频信号记录和再现装置将一系列输入音频信号记录为数字音频数据，并使用记录的数字音频数据作为输出音频信号再现和输出输入信号。输入音频信号处理单元将一系列输入音频信号转换为数字音频数据。数据文件记录单元将作为数字音频数据文件信息的数字音频数据作为数字音频数据文件信息记录在记录介质上，具有多个簇的记录介质，其中记录了具有预定字节数的数据，记录了数字音频文件信息在多个簇上。文件管理信息记录单元记录表示记录有数字音频数据文件信息的集群的再现顺序的文件管理信息。目录信息记录单元在记录数字音频数据时记录至少包括首先记录的第一簇的数量的目录信息。再现程序文件信息记录单元在记录介质上记录包括至少要再现的数字音频数据文件的第一簇的数量的再现过程文件信息。输出音频信号处理单元将根据再现过程文件信息从记录介质读出的数字音频数据转换为输出音频信号。

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