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    • 7. 发明授权
    • Substrate conveying system in exposure apparatus
    • 曝光设备中的基板输送系统
    • US06642997B2
    • 2003-11-04
    • US09887034
    • 2001-06-25
    • Kohei Yamada
    • Kohei Yamada
    • G03B2762
    • G03F7/70741G03F7/7075Y10S414/135Y10S414/14
    • A substrate conveying system for conveying a substrate contained in an accommodating container having a supporting member for supporting the substrate. The system includes a hand for holding the substrate, a driving mechanism for moving the hand toward and away from the container, along a direction approximately parallel to the surface of the substrate, the driving mechanism being operable to move the hand to below the substrate, an elevation mechanism for moving the hand relative to the container, along a direction approximately perpendicular to the surface of the substrate, the elevation mechanism being operable to move the hand upwardly relative to the supporting member, for transfer of the substrate from the supporting member to the hand, and an obstacle detecting system for detecting the presence/absence of an obstacle within a movement range of the hand defined by the driving mechanism. The obstacle detecting system is movable in the movement direction of the hand defined by the elevation mechanism, and is operable also to detect the presence/absence of an obstacle within a movement range of the hand defined by the elevation mechanism.
    • 一种基板输送系统,用于输送容纳在具有用于支撑基板的支撑构件的容纳容器中的基板。 该系统包括用于保持基板的手,用于将手朝向和远离容器移动的驱动机构,沿着大致平行于基板的表面的方向,驱动机构可操作以将手移动到基板下方, 提升机构,用于沿着大致垂直于基板表面的方向相对于容器移动手,升降机构可操作以相对于支撑构件向上移动手,用于将基板从支撑构件转移到 以及用于检测由所述驱动机构限定的手的移动范围内的障碍物的存在/不存在的障碍物检测系统。 障碍物检测系统可以在由升降机构限定的手的运动方向上移动,并且还可操作以检测由升降机构限定的手的移动范围内的障碍物的存在/不存在。
    • 8. 发明授权
    • Antistatic mat
    • US5213865A
    • 1993-05-25
    • US758259
    • 1991-08-26
    • Kohei Yamada
    • Kohei Yamada
    • B60N3/04D02G3/44H05F3/02
    • D02G3/441B60N3/044B60N3/048H05F3/025Y10S57/901Y10S57/905Y10T428/23957Y10T428/23993Y10T428/2929Y10T428/294Y10T428/2976Y10T428/2978
    • This invention relates to an antistatic mat for a vehicle, and especially relates to an antistatic mat equipped with electric discharge function against generation of static electricity for effectively preventing adhesion of dust and rubbish thereon and secondary disaster caused by electric shock. An antistatic mat according to Claim 1 is characterized in that it includes: pile including conductive fibers containing conductive components partially protruding from the surface of synthetic resin. An antistatic mat according to Claim 2 is characterized in that it includes conductive compound fibers wound around non-conductive fibers forming pile in the manner that each conductive fiber is wound around the periphery of each non-conductive fiber to form a spiral shape. An antistatic mat according to Claim 3 is characterized in that it includes conductive compound fibers mixed to the bundle of non-conductive fibers forming pile. An antistatic mat according to Claim 4 is characterized in that it includes: a core member formed by focusing fibrous conductive compound fiber provided in the center of the fiber; and a sheath member composed of non-conductive synthetic resin surrounding and covering the core member. The conductive components are disposed centrally and constitute the core member, said conductive components being partially cut away at the end portion of the conductive components and protruding from the surface of the fiber. An antistatic mat according to Claim 5 is characterized in that the conductive compound fibers are formed by mixing fibrous conductive components with non-conductive components composed of non-conductive synthetic resin, and the conductive components are partially protruding from the surface of the fiber. An antistatic mat according to Claim 6 is characterized in that it includes pile including conductive components protruding from one surface of the synthetic resin; and a conductive layer composed of conductive material and provided between pile and base cloth in the state that the conductive layer contacts with the conductive compound fibers.