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    • 1. 发明授权
    • Velocity information detecting apparatus
    • 速度信息检测装置
    • US5557396A
    • 1996-09-17
    • US203409
    • 1994-03-01
    • Koh IshizukaSatoshi IshiiYasushi Kaneda
    • Koh IshizukaSatoshi IshiiYasushi Kaneda
    • G01P3/36G01S17/58G01B11/02
    • G01P3/366
    • A velocity information detecting apparatus detects velocity information of a moving object. The apparatus is provided with a light source for emitting a coherent beam, a beam splitting member for splitting the beam from the light source into a plurality of beams to irradiate the object thereby, and a photodetector for receiving scattered light from the object. The velocity information of the object is detected, based on a Doppler shift of the scattered light detected by the photodetector. The plurality of beams irradiate the object disposed in a region before the plurality of beams are spatially separated from each other. The beam splitting member may be either a diffraction grating or a prism member. The diffraction grating may be a lamellar phase grating or a blazed diffraction grating. The prism member may be a roof prism.
    • 速度信息检测装置检测移动物体的速度信息。 该装置设置有用于发射相干光束的光源,用于将来自光源的光束分成多个光束以照射物体的分束部件,以及用于接收来自物体的散射光的光电检测器。 基于由光检测器检测到的散射光的多普勒频移来检测物体的速度信息。 多个光束照射放置在多个光束彼此空间分离之前的区域中的物体。 分束构件可以是衍射光栅或棱镜构件。 衍射光栅可以是层状相位光栅或闪耀的衍射光栅。 棱镜构件可以是屋脊棱镜。
    • 4. 发明授权
    • Displacement detection apparatus using multiple displacement detection
signals formed by a multiple phase combination grating
    • 使用由多相组合光栅形成的多位移检测信号的位移检测装置
    • US5574559A
    • 1996-11-12
    • US608029
    • 1996-02-28
    • Yasushi KanedaKoh IshizukaHiroshi KondoSatoshi Ishii
    • Yasushi KanedaKoh IshizukaHiroshi KondoSatoshi Ishii
    • G01B11/00G01D5/38G01B9/02
    • G01D5/38
    • A displacement detection apparatus has a light source 1, a first diffraction grating G1 for diffracting and dividing the light from the light source and applying O-order diffracted light and +1st-order diffracted light to a second diffraction grating G2, a third diffraction grating G3 for combining +1st-order reflected diffracted light created by the O-order diffracted light being reflected and diffracted by the second diffraction grating and -lst-order reflected diffracted light created by the +lst-order diffracted light being diffracted by the second diffraction grating, to thereby form interference light, and a light receiving element 3 for photoelectrically converting the interference light, the third diffraction grating including four diffraction gratings given a phase difference of .pi./2 each, the light receiving element being provided with light receiving portions 3a1, 3a2, 3b1 and 3b2 corresponding to the four diffraction gratings of the third diffraction grating, and cruciform light intercepting means is provided between adjacent ones of the light receiving portions.
    • 位移检测装置具有光源1,用于衍射和分割来自光源的光并且将O级衍射光和+ 1级衍射光施加到第二衍射光栅G2的第一衍射光栅G1,第三衍射光栅 G3,用于组合由被第二衍射光栅反射和衍射的O级衍射光产生的+ 1阶反射衍射光,并且由被第二衍射衍射的+ 1级衍射光产生的一级反射衍射光 光栅,从而形成干涉光;以及用于光电转换干涉光的光接收元件3,第三衍射光栅包括四个衍射光栅,每个衍射光栅各自具有π/ 2的相位差,光接收元件设置有光接收部分3a1 ,3a2,3b1和3b2对应于第三衍射光栅的四个衍射光栅和十字形 在相邻的光接收部分之间提供遮光装置。
    • 6. 发明授权
    • Displacement detection apparatus
    • 位移检测装置
    • US5483377A
    • 1996-01-09
    • US169402
    • 1993-12-20
    • Yasushi KanedaKoh IshizukaHiroshi KondoSatoshi Ishii
    • Yasushi KanedaKoh IshizukaHiroshi KondoSatoshi Ishii
    • G01B11/00G01D5/38G02B5/18G02B27/44H01J3/14H01J40/14
    • G01D5/38
    • A displacement detection apparatus comprises a light source 1, a first diffraction grating including a blazed grating for diffracting and splitting light from the light source to irradiate a 0-order diffraction light and a +1-order diffraction light to a second diffraction grating, a third diffraction grating including a blazed grating for combining a +1-order reflected diffraction light produced by the reflection and diffraction of the 0-order diffraction light by the second diffraction grating and a -1-order reflected diffraction light produced by the diffraction of the +1-order diffraction light by the second diffraction grating to produce an interference light, and a photo-sensing element for converting the interference light to a signal representing a change in the second diffraction grating.
    • 位移检测装置包括光源1,第一衍射光栅,包括用于衍射和分离来自光源的光的闪耀光栅,以将0级衍射光和+ 1级衍射光照射到第二衍射光栅, 第三衍射光栅,包括用于组合通过第二衍射光栅的0级衍射光的反射和衍射产生的+ 1级反射衍射光的闪耀光栅和通过第二衍射光栅衍射产生的-1级反射衍射光 + 1级衍射光以产生干涉光;以及光敏元件,用于将干涉光转换成表示第二衍射光栅的变化的信号。
    • 7. 发明授权
    • Displacement information detection apparatus for receiving a divergent
light beam
    • 位移信息检测装置,用于接收发散光束
    • US5390022A
    • 1995-02-14
    • US42589
    • 1993-04-05
    • Koh IshizukaTetsuharu NishimuraHiroshi KondoYasushi Kaneda
    • Koh IshizukaTetsuharu NishimuraHiroshi KondoYasushi Kaneda
    • G01D5/38G01B9/02
    • G01D5/38
    • A displacement information detection apparatus for detecting relative displacement information regarding the apparatus and an object to be detected includes an illumination system for radiating coherent light. A first diffraction grating splits the coherent light from the illumination system into first and second light beams, which are radiated onto the object. A second diffraction grating synthesizes the first and second light beams emerging from the object to generate an interference light beam. A light-receiving element detects the interference light beam and detects the relative displacement information regarding the object and the apparatus upon reception of the interference light beam. The illumination system is configured to focus the first and second light beams at a location along an optical path between the first diffraction grating and the second diffraction grating, so that the interference light beam incident on the light-receiving element is a divergent light beam.
    • 一种用于检测关于装置和待检测物体的相对位移信息的位移信息检测装置,包括用于照射相干光的照明系统。 第一衍射光栅将来自照明系统的相干光分解成辐射到物体上的第一和第二光束。 第二衍射光栅合成从物体出射的第一和第二光束以产生干涉光束。 光接收元件检测干涉光束并且在接收干涉光束时检测关于物体和装置的相对位移信息。 照明系统被配置为将第一和第二光束聚焦在沿着第一衍射光栅和第二衍射光栅之间的光路的位置处,使得入射在光接收元件上的干涉光束是发散光束。
    • 10. 发明授权
    • Apparatus for measuring relative displacement between the apparatus and
a scale which a grating is formed
    • 用于测量装置与形成光栅的刻度之间的相对位移的装置
    • US5621527A
    • 1997-04-15
    • US311854
    • 1994-09-26
    • Yasushi KanedaKoh Ishizuka
    • Yasushi KanedaKoh Ishizuka
    • G01B11/00G01D5/38G01B9/02
    • G01D5/38
    • An apparatus for measuring the relative displacement information between it and a scale on which a diffraction grating is formed has a light source, a separating device for separating a light beam from the light source into a plurality of light beams, a wave combining device for wave-combining the diffracted lights of the plurality of light beams separated by the separating device which are diffracted by the diffraction grating, a light receiver for receiving the interfering lights by the plurality of light beams wave-combined by the wave combining device, the relative displacement information between the apparatus and the scale being measured by the light reception of the light receiver, and an optical device adapted to collimate the plurality of light beams or to form a spherical wave having so large a radius of curvature that it can be regarded as a plane wave of the plurality of light beams in the direction of light beam separation of the separating device and to condense the plurality of light beams in the optical path from the separating device to the wave combining device in a direction perpendicular to the direction of light beam separation.
    • 用于测量其与其上形成有衍射光栅的标尺之间的相对位移信息的装置具有光源,用于将光束从光源分离成多个光束的分离装置,用于波的波合成装置 - 将由分离装置分离的由衍射光栅衍射的多个光束的衍射光组合在一起,用于通过由波合成装置波形组合的多个光束接收干扰光的光接收器,相对位移 通过光接收器的光接收来测量装置和刻度之间的信息,以及适于准直多个光束或形成具有如此大的曲率半径的球面波的光学装置,其可被认为是 在分离装置的光束分离的方向上的多个光束的平面波,并且冷凝平面 在从分离装置到波合成装置的光路中的光束在垂直于光束分离方向的方向上的光束。