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    • 5. 发明授权
    • Optical type encoder
    • 光学型编码器
    • US5000542A
    • 1991-03-19
    • US346701
    • 1989-05-03
    • Tetsuharu NishimuraMasaaki TsukijiSatoshi IshiiKoh IshizukaYoichi Kubota
    • Tetsuharu NishimuraMasaaki TsukijiSatoshi IshiiKoh IshizukaYoichi Kubota
    • G01D5/38
    • G01D5/38
    • In an optical type encoder for projecting a light beam onto an optical type scale having a diffraction grating formed thereon, forming an interferenced light by the use of a diffracted light from the scale, and photoelectrically converting the interferenced light to thereby measure the displacement of the scale, first and second light beams are caused to enter substantially the same position on the scale from different first and second directions, first and second diffracted light beams emerging from the scale by the first and second light beams being diffracted by the scale are directed to the aforementioned position by a reflecting device, the diffracted light beams emerging in the first and second directions by the first and second diffracted light beams being diffracted by the scale are superposed one upon the other to thereby form an interferenced light, and light components created by the first and second light beams being regularly reflected at the aforementioned position are not included in the interferenced light.
    • 在用于将光束投射到其上形成有衍射光栅的光学刻度尺的光学型编码器中,通过使用来自刻度的衍射光形成介入光,并对该干涉光进行光电转换,从而测量 使第一和第二光束在不同的第一和第二方向上在刻度上进入基本上相同的位置,第一和第二光束通过刻度被衍射的第一和第二衍射光束被引导到 通过反射装置的上述位置,由第一和第二方向由第一和第二衍射光束以标尺衍射的第一和第二方向的衍射光束彼此重叠,从而形成介入光,并且由 在上述位置规则地反射的第一和第二光束为No t包含在干涉光中。
    • 6. 发明授权
    • Encoder incorporating a displaceable diffraction grating
    • 包含可位移衍射光栅的编码器
    • US5038032A
    • 1991-08-06
    • US488733
    • 1990-02-26
    • Tetsuharu NishimuraYoichi KubotaSatoshi IshiiKoh IshizukaMasaaki Tsukiji
    • Tetsuharu NishimuraYoichi KubotaSatoshi IshiiKoh IshizukaMasaaki Tsukiji
    • G01D5/38
    • G01D5/38
    • An encoder in which a light beam emitted from a semiconductor laser or the like is applied to a diffraction grating from a predetermined direction which is not contained in a reference plane defined by direction of relative movement of the diffraction grating and a direction normal to the diffraction grating. A diffracted light created from the diffraction grating by the application of the light beam by the light applying means is reflected by re-entering means and the reflected light is caused to re-enter the diffraction grating at substantially the same position as the position at which the diffracted light is created. At this time, an interference light formed by the other re-diffracted lights than O-order light created from the diffraction grating substantially in the same direction as the predetermined direction by the re-entrance of the diffracted light by the re-entering means is detected, and the information of the relative displacement of the light beam and the diffraction grating is obtained from a variation in the intensity of the interference light.
    • 一种编码器,其中从半导体激光器等发射的光束从预定方向施加到衍射光栅,该预定方向不包含在由衍射光栅的相对运动方向和垂直于衍射的方向限定的参考平面中 光栅。 由衍射光栅通过施加光束施加光束而产生的衍射光被重新进入的装置反射,并且使反射光重新进入到与其位置基本相同的位置处的衍射光栅 产生衍射光。 此时,由通过重新进入装置重新进入衍射光而与衍射光栅基本上沿与预定方向相同的方向产生的O级光而形成的其他再衍射光形成的干涉光是 并且根据干涉光的强度的变化获得光束和衍射光栅的相对位移的信息。
    • 7. 发明授权
    • Diffracted beam encoder
    • 衍射光束编码器
    • US5017777A
    • 1991-05-21
    • US437672
    • 1989-11-17
    • Koh IshizukaMasaaki TsukijiYoichi KubotaSatoshi IshiiTetsuharu Nishimura
    • Koh IshizukaMasaaki TsukijiYoichi KubotaSatoshi IshiiTetsuharu Nishimura
    • G01D5/38
    • G01D5/38
    • A method for detecting a state of rotation of a rotary scale having a diffraction grating therein in which a radiation beam is directed to a first place on the diffraction grating to generate first and second diffracted beams. The first and second diffracted beams are re-diffracted at the first place to form a first re-diffracted beam and a second re-diffracted beam. The first and second re-diffracted beams are directed to a second place on the diffraction grating substantially opposite the first place with respect to the center of rotation of the rotary scale. The first and second re-diffracted beams are diffracted at the second place to interfere with each other so that an interference beam is formed. The interference beam is converted into a signal to detect the state of rotation of the rotary scale.
    • 一种用于检测其中具有衍射光栅的旋转刻度的旋转状态的方法,其中辐射束被引导到衍射光栅上的第一位以产生第一和第二衍射光束。 第一和第二衍射光束在第一位置被再衍射以形成第一重衍射光束和第二重衍射光束。 第一和第二重衍射光束相对于旋转刻度盘的旋转中心基本上相对于第一位置被引导到衍射光栅上的第二位置。 第一和第二重衍射光束在第二位置被衍射以彼此干涉,从而形成干涉光束。 干涉光束被转换为信号以检测旋转刻度盘的旋转状态。
    • 9. 发明授权
    • Encoder utilizing interference using multi-mode semiconductor laser
    • 使用多模半导体激光器的编码器利用干扰
    • US5198873A
    • 1993-03-30
    • US789633
    • 1991-11-12
    • Ko IshizukaTetsuharu NishimuraYoichi KubotaMasaaki TsukijiSatoshi Ishii
    • Ko IshizukaTetsuharu NishimuraYoichi KubotaMasaaki TsukijiSatoshi Ishii
    • G01D5/38
    • G01D5/38
    • An interferometer for measuring the displacement of a diffraction grating includes a multi-mode semiconductor laser for generating a laser beam; a device for supplying a predetermined current to the laser so that at least five vertical modes occur in an oscillation spectrum of the laser beam generated by the laser at an intensity ratio of at least 0.05; and an optical system for splitting the laser beam generated by the laser into first and second beams. The optical system also directs the first and second beams to the diffraction grating and effects interference between a first diffracted light beam generated by the diffraction of the first beam at the diffraction grating and a second diffracted light beam generated by the diffraction of the second beam at the diffraction grating to produce an interference light beam. Also provided is a photoelectric convertor for converting the interference light beam into an electrical signal.
    • 用于测量衍射光栅位移的干涉仪包括用于产生激光束的多模半导体激光器; 用于向激光器提供预定电流的装置,使得在由激光器产生的激光束的振荡光谱中以至少0.05的强度比发生至少五个垂直模式; 以及用于将由激光器产生的激光束分成第一和第二光束的光学系统。 光学系统还将第一和第二光束引导到衍射光栅,并且在衍射光栅处的第一光束的衍射产生的第一衍射光束和由第二光束的衍射产生的第二衍射光束之间产生干涉 衍射光栅产生干涉光束。 还提供了一种用于将干涉光束转换成电信号的光电转换器。