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1. 发明专利

JP2014064451A Power generation system 审中-公开
标题翻译：发电系统
公开(公告)号：JP2014064451A
公开(公告)日：2014-04-10
申请号：JP2013035906
申请日：2013-02-26
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： ADACHI SHIGETO , MATSUMURA MASAYOSHI , KOBAYASHI AKIRA , SHIMODA TOSHIAKI , OGAWA TETSUYA , HASHIMOTO KOICHIRO , YOSHINARI SATOSHI
IPC分类号： H02J3/38 , H02J3/32 , H02P9/00
摘要： PROBLEM TO BE SOLVED: To provide a power generation system capable of maintaining high power generation efficiency by ensuring continuous power generation even if power failure occurs in a power system.SOLUTION: The power generation system 1 includes: a power generation apparatus 2; a converter 3 that converts AC power generated by the power generation apparatus 2 into DC power; an interconnection inverter 4 that converts DC power converted by the converter 3 into AC power capable of interconnection with a system; and a load output section 12 that supplies DC or AC power to a load from between the converter 3 and the interconnection inverter 4.
摘要翻译：要解决的问题：提供即使在电力系统中发生电力故障的情况下也能够通过确保连续发电来维持高发电效率的发电系统。发电系统1包括：发电装置2; 将由发电装置2产生的交流电力转换为直流电力的转换器3; 将由转换器3转换的DC电力转换成能够与系统互连的AC电力的互连逆变器4; 以及从转换器3和互连逆变器4之间向负载提供DC或AC电力的负载输出部12。

2. 发明专利

JP2011034888A Ion source 审中-公开
标题翻译：离子源
公开(公告)号：JP2011034888A
公开(公告)日：2011-02-17
申请号：JP2009181776
申请日：2009-08-04
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： TSUJI TOSHIYUKI , KOBAYASHI AKIRA , YOKOTA YOSHIHIRO , ICHIHARA CHIKARA
IPC分类号： H01J27/08 , H01J37/08
摘要： PROBLEM TO BE SOLVED: To provide an ion source capable of increasing ion formation amount even though a clean state is maintained and a long service life is made possible. SOLUTION: The ion source includes: a plasma chamber 1; a permanent magnet 3 as a generating means of a magnetic field for cusp magnetic field generation in order to confine plasma in the plasma chamber 1; a permanent magnet 4 as the magnetic field generating means for filter magnetic field generation in order to separate plasma into a high temperature electronic region and a low temperature electronic region; and a plasma electrode 5 which is installed at more downstream side than the permanent magnet 4 and has an open hole part 5d in order that ions pass through the hole part. A diamond thin film 8 is installed on an interior surface of an open hole part electrode 7 mounted on the plasma electrode 5. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：即使保持清洁状态并且可以使用长的使用寿命，提供能够增加离子形成量的离子源。解决方案：离子源包括：等离子体室1; 作为用于尖端磁场产生的磁场的产生装置的永磁体3，以便将等离子体限制在等离子体室1中; 作为用于将等离子体分离成高温电子区域和低温电子区域的用于滤波器磁场产生的磁场产生装置的永磁体4; 以及等离子体电极5，其安装在比永磁体4更下游侧并具有开孔部5d，以使离子通过孔部。金刚石薄膜8安装在安装在等离子体电极5上的开孔部电极7的内表面上。（C）2011，JPO＆INPIT

3. 发明专利

JP2010205597A Method of manufacturing ion source, and ion source manufactured thereby 有权
标题翻译：制造离子源的方法及其制造的离子源
公开(公告)号：JP2010205597A
公开(公告)日：2010-09-16
申请号：JP2009050671
申请日：2009-03-04
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： HIRANO TAKAYUKI , ICHIHARA CHIKARA , KOBAYASHI AKIRA , TSUJI TOSHIYUKI
IPC分类号： H01J9/02 , H01J27/26 , H01J37/08
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing an ion source that facilitates positioning an field ionization electrode toward the opening hole periphery of a vessel, and to provide an ion source manufactured by the method. SOLUTION: The method of manufacturing the ion source includes a step of preparing a field ionization electrode 23 with a sacrifice layer 60, a step of positioning the electrode 23 with the sacrifice layer 60 attached to a vessel 20, a step of fixing the electrode 23 to the vessel 20, and a step of removing the sacrifice layer 60 from the electrode 23, wherein the sacrifice layer 60 is composed of a protection layer 62 and an outer layer 64, the protection layer 62 is made of a silicon oxide, the outer layer 64 is made of a material capable of being removed by a means having less influence on a micro opening hole periphery 21r than a means removing the protection layer 62 with a hydrofluoric acid and/or an ammonium fluoride aqueous solution, and in the step of removing the layer, the outer layer 64 and the protection layer 62 are removed in order. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造离子源的方法，该离子源便于将场离子化电极定向到容器的开孔周边，并提供通过该方法制造的离子源。解决方案：制造离子源的方法包括用牺牲层60制备场电离电极23的步骤，将牺牲层60附着到容器20上的电极23定位的步骤，固定步骤电极23到容器20，以及从电极23除去牺牲层60的步骤，其中牺牲层60由保护层62和外层64构成，保护层62由氧化硅外层64由能够通过对微孔开口周边21r的影响较小的方式除去的材料制成，而不是用氢氟酸和/或氟化铵水溶液除去保护层62，去除层的步骤，外层64和保护层62依次去除。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2009059627A Ion source 有权
标题翻译：离子源
公开(公告)号：JP2009059627A
公开(公告)日：2009-03-19
申请号：JP2007226942
申请日：2007-08-31
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： ICHIHARA CHIKARA , KOBAYASHI AKIRA
IPC分类号： H01J27/26 , H01J37/08 , H01J37/252 , H01J37/317
CPC分类号： H01J2237/0807
摘要： PROBLEM TO BE SOLVED: To provide an ion source capable of ionizing raw gas in a weaker field ionization.
SOLUTION: The ion source 10 for irradiating ion beams is provided with a dielectric barrier discharge means 50 radicalizing raw gas supplied to a vessel 20, and the dielectric barrier discharge means 50 is provided with a first electrode 52, a second electrode 53 opposed to the first electrode 52, and an alternating-current power source 54 for impressing between the first and the second electrodes 52, 53. At least either of the first and the second electrodes 52, 53 is coated with a dielectric, and is arranged at a position further toward the rear than a rear end of a field ionization electrode 23 where the raw gas is supplied to the vessel 20 after it passes between the first and the second electrodes 52, 53.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够在弱场电离中电离原料气体的离子源。解决方案：用于照射离子束的离子源10设置有电介质阻挡放电装置50，使提供给容器20的原料气体自发化，并且电介质阻挡放电装置50设置有第一电极52，第二电极53 与第一电极52相对，以及用于在第一和第二电极52,53之间施加压力的交流电源54.第一和第二电极52,53中的至少一个涂覆有电介质，并且布置在比电离电极23的后端更靠后的位置处，其中原料气体在通过第一和第二电极52,53之后被供给到容器20中。（C）2009 ，JPO＆INPIT

5. 发明专利

JP2007299570A Flight control device of ion beam, flight control method of ion beam and dispersed ion analyzer 审中-公开
标题翻译：离子束的飞行控制装置，离子束和分散离子分析仪的飞行控制方法
公开(公告)号：JP2007299570A
公开(公告)日：2007-11-15
申请号：JP2006125277
申请日：2006-04-28
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： KOBAYASHI AKIRA , ICHIHARA CHIKARA
IPC分类号： H01J37/12 , G01N23/203 , H01J37/252 , H01J49/40
摘要： PROBLEM TO BE SOLVED: To provide a flight ion beam control device and a method capable of compression or expansion of ion beams by changing potential applied on the tip and/or the rear end of the ion beams, or a dispersed ion analyzer capable of improving energy resolution by shortening the length Δt of the ion beams by electronic control. SOLUTION: In the flight control device of ion beams, a pulse compression electrode through which the ion beams pass and a grounding electrode with a prescribed spacing between the pulse electrode through which the ion beams pass are installed in a flight route of the ion beams flying toward the analyzing object. The voltage potential applied on the pulse compression electrode is changed according to positions of the ion beams passing through that. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种飞行离子束控制装置和能够通过改变施加在离子束的末端和/或后端上的电位来压缩或扩展离子束的方法，或分散离子分析器能够通过电子控制缩短离子束的长度Δt来提高能量分辨率。解决方案：在离子束飞行控制装置中，离子束通过的脉冲压缩电极和离子束通过的脉冲电极之间具有规定间隔的接地电极安装在离子束的飞行路线中离子束飞向分析对象。施加在脉冲压电极上的电压根据通过该离子束的位置而改变。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2007155426A Parallel magnetic field type rutherford backscattering ion measuring instrument 有权
标题翻译：平行磁场型RUTHERFORD背散装离子测量仪
公开(公告)号：JP2007155426A
公开(公告)日：2007-06-21
申请号：JP2005348906
申请日：2005-12-02
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： KOBAYASHI AKIRA , ICHIHARA CHIKARA
IPC分类号： G01N23/203
摘要： PROBLEM TO BE SOLVED: To provide a parallel magnetic field type Rutherford backscattering ion measuring instrument equipped with an ion discrimination means (aperture) not causing pressure difference in a measuring chamber while ensuring the discrimination capacity of scattered ions for passing only specific scattered ions.
SOLUTION: A plurality of slits Zc extending along the radiation centering around the axis of an ion beam H are provided to the cutting-off part Zb of the scattered ions formed to the periphery of an ion passing opening part Za permitting the passage of the specific scattered ions. These slits Zc are formed to a plate-shaped cutting-off part Zb so that the sample side 20a of the measuring chamber 20 and an ion detector side 20b are allowed to communicate with each other in the direction R1 oblique to the axial direction of the ion beam H and have parts 51 and 52 mutually overlapped when viewed from the axial direction of the ion beam H to constitute the aperture Z1 in a state that a gap is not formed when viewed from the axial direction of the ion beam H.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种平行磁场型卢瑟福背散射离子测量仪器，其配备有在测量室中不产生压力差的离子鉴别装置（孔），同时确保散射离子仅通过特定散射的分辨能力离子。解决方案：沿着离子束H的轴线的中心的辐射延伸的多个狭缝Zc被提供给形成在离子通过开口部分Za周围的散射离子的切断部分Zb，允许通过的特定散射离子。这些狭缝Zc形成为板状切断部Zb，使得测量室20的样品侧20a和离子检测器侧20b能够沿着与轴向方向倾斜的方向R1彼此连通离子束H，并且当从离子束H的轴向观察时，部分51和52相互重叠，以在从离子束H的轴向方向观察时不形成间隙的状态构成孔Z1。
版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2006236601A Orbital position detecting device, composition analyzer, orbit adjusting method for charged particle beam and position coordinate detecting device 审中-公开
标题翻译：位置检测装置，组成分析仪，充电颗粒光束和位置坐标检测装置的轨道调整方法
公开(公告)号：JP2006236601A
公开(公告)日：2006-09-07
申请号：JP2005045275
申请日：2005-02-22
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： KOBAYASHI AKIRA , ICHIHARA CHIKARA
IPC分类号： H01J37/04 , G01B11/00 , G01N23/225 , G01T1/29 , G21K5/04 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide an orbital position detecting device capable of improving adjustment accuracy by simplifying adjustment work for an electron beam orbit and easily detecting shift of an electron beam in operating a device, to provide a composition analyzer provided with this and an orbit adjusting method for a charged particle beam, and to provide a position coordinate detecting device capable of easily detecting a coordinate position of a beam current measurement means such as a Faraday cup used for the orbital position detecting device.
SOLUTION: The beam current measurement means such as a segmented electrode 10 or the Faraday cup 20 etc. measuring a beam current of an ion beam L emitted from an accelerator Y1 is provided in a measurement chamber 73a of a sample analyzer. An orbital position of the ion beam L is detected based on an observed value of the beam current by the beam current measurement means.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种轨道位置检测装置，其能够通过简化电子束轨道的调整工作并且容易地检测电子束在操作装置中的移动而提高调节精度，从而提供一种配置有该电子束的组成分析器以及用于带电粒子束的轨道调整方法，并提供能够容易地检测用于轨道位置检测装置的法拉第杯等束电流测量装置的坐标位置的位置坐标检测装置。解决方案：在样品分析仪的测量室73a中设置有测量从加速器Y1发射的离子束L的束电流的分段电极10或法拉第杯20等的束电流测量装置。基于束电流测量装置的束电流的观测值来检测离子束L的轨道位置。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2006142315A Energy beam machining device and energy beam machining method 审中-公开
标题翻译：能量束加工设备和能量束加工方法
公开(公告)号：JP2006142315A
公开(公告)日：2006-06-08
申请号：JP2004332343
申请日：2004-11-16
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： ICHIHARA CHIKARA , KOBAYASHI AKIRA , INOUE KENICHI
IPC分类号： B23K15/00 , B23K26/00 , G21K3/00 , G21K5/04 , H01J37/30 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide an energy beam machining device and an energy beam machining method capable of maintaining the condensing state of energy beams such as ion beams, the irradiation direction of energy beams on a work, and simplifying the work of converting the energy of the energy beam with which the work is irradiated according to a machining condition or the like such as the machining depth of the work. SOLUTION: In the energy beam machining device X to machine a work 7 by allowing the work 7 to be irradiated with proton beams L1 (energy beams), an energy converting means 10 to convert the energy of the proton beams L1 is provided on the optical path of the proton beams 1 between an energy beam generation source consisting of an ion generation source 1 and an ion acceleration apparatus 2 and the work 7. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能量束加工装置和能量束加工方法，其能够保持诸如离子束的能量束的聚光状态，能量束在工件上的照射方向，并且简化了工作根据加工条件等对工件照射的能量束的能量进行转换，例如加工深度。解决方案：在能量束加工装置X中，通过允许工件7照射质子束L1（能量束）来加工工件7，提供转换质子束L1的能量的能量转换装置10 在由离子加速装置2构成的能量束产生源和离子加速装置2之间的质子束1的光路上与工作7相对应。（C）2006，JPO＆NCIPI

9. 发明专利

JP2004361283A Parallel magnetic field rutherford back-scattering analysis apparatus 有权
标题翻译：并行磁场RUTHERFORD背散射分析装置
公开(公告)号：JP2004361283A
公开(公告)日：2004-12-24
申请号：JP2003161013
申请日：2003-06-05
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： ICHIHARA CHIKARA , KOBAYASHI AKIRA , INOUE KENICHI
IPC分类号： G01N23/203 , G01T1/17 , G01T1/24 , H01J37/244 , H01J37/252 , H01J49/06 , H01J49/46
CPC分类号： H01J2237/24465
摘要： PROBLEM TO BE SOLVED: To provide a parallel magnetic field Rutherford back-scattering analysis apparatus having a scattered ion detector for eliminating a complicated apparatus structure and complicated detecting operation, accurately detecting a location of a scattered ion, discriminating the scattered ion having different convergence times, detecting energy of the scattered ion and extending a range of an energy spectrum.
SOLUTION: In the parallel magnetic field Rutherford back-scattering analysis apparatus, the scattered ion detector uses a semiconductor detector 1. An annular electrode 3 is mounted on one detecting face 1a. A fan electrode 4 is mounted on the other detecting face 1b. Pulse amplifiers 6a-6d are connected to end electrodes 3a, 3b, 4a, 4b. An energy discriminating circuit and a location calculating circuit are provided on the output side. The parallel magnetic field Rutherford back-scattering analysis apparatus has a function for detecting two-dimensional (R-θ) location information of the scattered ion and a function for discriminating the quantity of energy, convergence times, etc. The apparatus structure is not complicated, and an analysis range and measuring accuracy are improved.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种具有散射离子检测器的平行磁场卢瑟福背散射分析装置，用于消除复杂的装置结构和复杂的检测操作，精确地检测散射离子的位置，区分具有不同的收敛时间，检测散射离子的能量并延伸能谱范围。解决方案：在并联磁场卢瑟福背散射分析装置中，散射离子检测器使用半导体检测器1.环形电极3安装在一个检测面1a上。风扇电极4安装在另一个检测面1b上。脉冲放大器6a-6d连接到端电极3a，3b，4a，4b。在输出侧设置能量识别电路和位置计算电路。平行磁场卢瑟福背散射分析装置具有用于检测散射离子的二维（R-θ）位置信息的功能和用于识别能量的量，收敛时间等的功能。装置结构不复杂，分析范围和测量精度得到提高。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2003338251A Ion source 有权
标题翻译：离子源
公开(公告)号：JP2003338251A
公开(公告)日：2003-11-28
申请号：JP2002144664
申请日：2002-05-20
申请人： Kobe Steel Ltd , 株式会社神戸製鋼所
发明人： KOBAYASHI AKIRA , ICHIHARA CHIKARA , INOUE KENICHI
IPC分类号： G21K1/00 , G21K5/04 , H01J27/02 , H01J37/08 , H05H1/24
摘要： PROBLEM TO BE SOLVED: To provide an ion source which can form a superior plasma even when using a raw material gas such as helium ion that is difficult to convert into the plasma. SOLUTION: In the ion source constituted so that a voltage is applied between an anode electrode 3 which constitutes a part of a gas introduction room 11 filled with the raw material gas 1 in a high pressure and at which a minute opening hole 4 is installed and a cathode electrode 6 at which an opening hole 5 is installed, that the raw material gas 1 being high-pressure ejected from the minute opening hole 4 of the anode electrode 3 toward the opening hole 5 of the cathode electrode 6 is changed into plasma, and that ions are drawn out through the opening hole 5 of the cathode electrode 6 by means of an ion- drawing out electrode 8, this is comprised that it has an ac electrode 21 which is arranged close to the minute opening hole 4 of the anode electrode 3, to which an insulating coating 20 is applied, and further to which an ac voltage is applied. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供即使在使用难以转化为等离子体的诸如氦离子的原料气体时也能形成优异的等离子体的离子源。解决方案：在构成为在高压下填充有原料气体1的构成气体导入室11的一部分的阳极电极3之间施加电压的离子源中，分立开口孔4 并且安装有开孔5的阴极电极6将从阳极电极3的微小开孔4朝向阴极电极6的开孔5喷射的高压的原料气体1变化并且通过离子引出电极8将阴离子从阴极6的开口孔5拉出，其特征在于它具有靠近分钟孔4配置的交流电极21 的绝缘涂层20，并且进一步施加交流电压。版权所有（C）2004，JPO

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