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    • 1. 发明申请
    • Load lock control
    • 加载锁定控制
    • US20070246658A1
    • 2007-10-25
    • US11409759
    • 2006-04-24
    • Tariq FashehJames CarrollKlaus PetryDale StoneLyudmila StoneDave Wiederspahn
    • Tariq FashehJames CarrollKlaus PetryDale StoneLyudmila StoneDave Wiederspahn
    • H01J37/18
    • H01L21/67201Y10S414/139
    • A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a pressure sensor and multiple valves to atmosphere where at least one such valves is a passthrough valve for removal of and insertion of workpieces from and into a load lock interior. A second fast acting valve also opens to atmosphere. A pressure rise inside the loadlock interior is monitored and when the pressure reaches a threshold pressure above atmosphere the fast acting valve is opened to atmosphere. This second fast acting valve is configured to relieve overpressure from the passthrough valve prior to opening of said passthrough valve. Workpiece movement is accomplished with the aid of a robot which reaches into the loadlock interior as it is either depositing workpieces or retrieving them. This system and process minimizes particle contamination of the load lock interior as well as contamination in the region outside the loadlock near the passthrough valve and any scheduled workpieces.
    • 用于对加载锁加压的控制。 该控制通过将气源连接到负载锁内部来启动负载锁内部的加压。 代表性的加载锁包括压力传感器和多个阀,其中至少一个这样的阀是用于从工作装置锁定内部移除和插入工件的直通阀。 第二个快动作阀也向大气敞开。 监控负载锁内部的压力上升,当压力达到高于大气压的阈值压力时,快速作用阀向大气开放。 该第二快动阀构造成在打开所述通气阀之前减轻通气阀的过压。 工件运动是借助于一个机器人来实现的,该机器人可以通过放置工件或检索它们而进入到装载锁内部。 该系统和过程最大限度地减少了负载锁内部的颗粒污染以及穿通阀附近的负载锁定区域和任何预定工件的污染。
    • 2. 发明授权
    • Load lock control
    • 加载锁定控制
    • US07381969B2
    • 2008-06-03
    • US11409759
    • 2006-04-24
    • Tariq FashehJames CarrollKlaus PetryDale StoneLyudmila StoneDave Wiederspahn
    • Tariq FashehJames CarrollKlaus PetryDale StoneLyudmila StoneDave Wiederspahn
    • H01J37/18
    • H01L21/67201Y10S414/139
    • A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a pressure sensor and multiple valves to atmosphere where at least one such valves is a passthrough valve for removal of and insertion of workpieces from and into a load lock interior. A second fast acting valve also opens to atmosphere. A pressure rise inside the loadlock interior is monitored and when the pressure reaches a threshold pressure above atmosphere the fast acting valve is opened to atmosphere. This second fast acting valve is configured to relieve overpressure from the passthrough valve prior to opening of said passthrough valve. Workpiece movement is accomplished with the aid of a robot which reaches into the loadlock interior as it is either depositing workpieces or retrieving them. This system and process minimizes particle contamination of the load lock interior as well as contamination in the region outside the loadlock near the passthrough valve and any scheduled workpieces.
    • 用于对加载锁加压的控制。 该控制通过将气源连接到负载锁内部来启动负载锁内部的加压。 代表性的加载锁包括压力传感器和多个阀,其中至少一个这样的阀是用于从工作装置锁定内部移除和插入工件的直通阀。 第二个快动作阀也向大气敞开。 监控负载锁内部的压力上升,当压力达到高于大气压的阈值压力时,快速作用阀向大气开放。 该第二快动阀构造成在打开所述通气阀之前减轻通气阀的过压。 工件运动是借助于一个机器人来实现的,该机器人可以通过放置工件或检索它们而进入到装载锁内部。 该系统和过程最大限度地减少了负载锁内部的颗粒污染以及穿通阀附近的负载锁定区域和任何预定工件的污染。
    • 3. 发明申请
    • ELECTROSTATIC CHUCK WITH RADIATIVE HEATING
    • 具有放热加热功能的静电卡盘
    • US20140061180A1
    • 2014-03-06
    • US13603881
    • 2012-09-05
    • Klaus PetryJames Carroll
    • Klaus PetryJames Carroll
    • H02N13/00H05B1/00
    • H05B3/0047H01L21/67115H01L21/6831H01L21/68757
    • An electrostatic chuck is formed using materials that are optically transparent to a range of frequencies, such as infrared radiation. The invention discloses several methods for achieving optical transparency. The chuck electrode can be formed having a mesh pattern designed with a specific open area percentage to provide adequate wafer clamping force while still allowing sufficient levels of infrared radiation to pass through. Alternatively, the chuck electrode can also be made from a transparent conductive film. A workpiece is disposed on one surface of the chuck, and a radiative heat source is positioned on the opposite side of the chuck. A reflector plate may be used to reflect the infrared radiation toward the chuck and the wafer. The spacing of the radiation sources and the shape of the reflector plate may be modified to focus more radiation on a particular portion of the workpiece if desired.
    • 使用在诸如红外辐射的频率范围上光学透明的材料形成静电卡盘。 本发明公开了几种获得光学透明度的方法。 卡盘电极可以形成为具有以特定开口面积百分比设计的网格图案,以提供足够的晶片夹紧力,同时仍然允许足够的红外辐射通过。 或者,卡盘电极也可以由透明导电膜制成。 工件设置在卡盘的一个表面上,辐射热源位于卡盘的相对侧。 可以使用反射板来将红外辐射反射到卡盘和晶片。 如果需要,可以修改辐射源的间隔和反射板的形状以将更多的辐射聚焦在工件的特定部分上。
    • 4. 发明授权
    • Electrostatic chuck with radiative heating
    • 静电吸盘与辐射加热
    • US08987639B2
    • 2015-03-24
    • US13603881
    • 2012-09-05
    • Klaus PetryJames Carroll
    • Klaus PetryJames Carroll
    • H05B11/00H05B3/68H01L21/67H01L21/683H01L21/687H05B3/00
    • H05B3/0047H01L21/67115H01L21/6831H01L21/68757
    • An electrostatic chuck is formed using materials that are optically transparent to a range of frequencies, such as infrared radiation. The invention discloses several methods for achieving optical transparency. The chuck electrode can be formed having a mesh pattern designed with a specific open area percentage to provide adequate wafer clamping force while still allowing sufficient levels of infrared radiation to pass through. Alternatively, the chuck electrode can also be made from a transparent conductive film. A workpiece is disposed on one surface of the chuck, and a radiative heat source is positioned on the opposite side of the chuck. A reflector plate may be used to reflect the infrared radiation toward the chuck and the wafer. The spacing of the radiation sources and the shape of the reflector plate may be modified to focus more radiation on a particular portion of the workpiece if desired.
    • 使用在诸如红外辐射的频率范围上光学透明的材料形成静电卡盘。 本发明公开了几种获得光学透明度的方法。 卡盘电极可以形成为具有以特定开口面积百分比设计的网格图案,以提供足够的晶片夹紧力,同时仍允许足够的红外辐射通过。 或者,卡盘电极也可以由透明导电膜制成。 工件设置在卡盘的一个表面上,辐射热源位于卡盘的相对侧。 可以使用反射板来将红外辐射反射到卡盘和晶片。 如果需要,可以修改辐射源的间隔和反射板的形状以将更多的辐射聚焦在工件的特定部分上。
    • 9. 发明申请
    • Method and apparatus for zone cabling
    • 区域布线方法和装置
    • US20050085120A1
    • 2005-04-21
    • US10686469
    • 2003-10-15
    • James Carroll
    • James Carroll
    • D07B20060101H01R4/24H01R13/58H01R25/00H01R43/01H01R43/04
    • H01R13/582H01R4/2404H01R12/67H01R24/64H01R43/01H01R43/28H01R2201/16Y10T29/49174Y10T29/49185Y10T29/4919
    • Disclosed herein is a factory installed wiring guide that guides conductors into position for quality termination and crimp and which provides strain relief (support) for the wires or fibers and the outer sheath of the cable to create a quality cable or sub-cable assembly supporting termination at both ends of the cable. The wiring guide is sized to overcome obstacles and fit into conduits during network wiring installation. The wiring guide may be inserted into a cavity on the backside of a RJ45 female connector, completing the termination of a station cable to a RJ45 female jack. The wiring guide may be installed into a plastic housing creating a RJ45 male connector. The wiring guide may be utilized for multiple connections without damaging or compromising the wiring guide and without the need for cutting the wire from the sub-connector. The wiring guide supports universal attachment to either male or female RJ45 connectors.
    • 本文公开了一种工厂安装的导线器,其将导体引导到适当位置以实现质量终止和压接,并为导线或纤维和电缆的外护套提供应变消除(支撑),以产生优质的电缆或辅助电缆组件,支撑终端 在电缆的两端。 布线指南的大小可以在网络布线安装过程中克服障碍物并适应导管。 接线引导件可以插入到RJ45母连接器背面的一个空腔中,从而完成终端电缆到RJ45母插孔。 接线引导件可以安装在塑料外壳中,从而形成RJ45公连接器。 接线引导件可用于多个连接,而不会损坏或损害接线引导件,而不需要从副连接器切割电线。 接线导轨支持通用连接到公型或母头RJ45连接器。