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1. 发明授权

US5764361A Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus 失效
标题翻译：干涉仪，其调节方法，具有干涉仪的舞台装置，以及具有舞台装置的曝光装置
公开(公告)号：US5764361A
公开(公告)日：1998-06-09
申请号：US734078
申请日：1996-10-21
申请人： Kinya Kato , Shigeru Takemoto
发明人： Kinya Kato , Shigeru Takemoto
IPC分类号： G01B9/02 , G03F7/20
CPC分类号： G01B9/02021 , G01B9/02058 , G03F7/70358 , G03F7/70716 , G01B2290/70
摘要： This invention relates an interferometer having a structure for suppressing measurement errors arising from leakage light by minimizing nonlinear errors due to the leakage light in a polarization beam splitter for splitting incident light into a first polarized light component and a second polarized light component, and apparatuses to which the interferometer is applied. The interferometer includes an adjustment mechanism for adjusting the angle of light incidence on the beam splitting surface of the polarization beam splitter such that the extinction ratio of the polarization beam splitter is minimized by using the dependence of the polarization beam splitter on the incident angle.
摘要翻译：本发明涉及一种干涉仪，其具有通过使入射光分离为第一偏振光分量和第二偏振光分量的偏振分束器中的漏光引起的非线性误差最小化，抑制由漏光引起的测量误差的结构，应用干涉仪。该干涉仪包括调节机构，用于调节偏振分束器的分束表面上的光入射角，使得偏振分束器的消光比通过使用偏振分束器对入射角的依赖性来最小化。

2. 发明授权

US4870693A Mask inspecting apparatus 失效
标题翻译：面罩检查仪
公开(公告)号：US4870693A
公开(公告)日：1989-09-26
申请号：US158069
申请日：1988-02-12
申请人： Tetsuyuki Arai , Shigeru Takemoto , Yoshihiko Fujimori
发明人： Tetsuyuki Arai , Shigeru Takemoto , Yoshihiko Fujimori
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G03F1/84 , G06T2207/30148
摘要： A pattern forming apparatus for inverting at least one of plural patterns according to numerical design data respectively representing the plural patterns and synthesizing thus inverted pattern with the remainder of the plural patterns, comprises first operation device for attaching a flag of a positive image to the design data of uninverted patterns, and attaching a flag of an inverted image to the design data of inverted patterns, second operation device for handling the entire area of either inverted patterns or uninverted ones among the plural patterns as a single pattern, and attaching a corresponding flag to the design data of the pattern, and image forming device for forming image data of the area according to the data of the second operation device and then forming image data of each pattern according to the data of the first operation device.
摘要翻译：一种用于根据分别表示多个图案的数字设计数据反转多个图案中的至少一个的图案形成装置，并且与多个图案的其余部分合成由此反转的图案，包括用于将正图像的标志附加到设计的第一操作装置将反转图案的数据和反转图像的标志附加到反转图案的设计数据的第二操作装置，用于处理多个图案中的反转图案或未反相图案的整个区域作为单个图案，以及附加相应的标志涉及图案的设计数据，以及根据第二操作装置的数据形成该区域的图像数据的图像形成装置，然后根据第一操作装置的数据形成每个图案的图像数据。

3. 发明授权

US06184526B2 Apparatus and method for inspecting predetermined region on surface of specimen using electron beam 有权
标题翻译：使用电子束检查样品表面上的预定区域的装置和方法
公开(公告)号：US06184526B2
公开(公告)日：2001-02-06
申请号：US09362099
申请日：1999-07-28
申请人： Yoshiaki Kohama , Muneki Hamashima , Shigeru Takemoto
发明人： Yoshiaki Kohama , Muneki Hamashima , Shigeru Takemoto
IPC分类号： H01J37252
CPC分类号： H01J37/28 , H01J2237/24435 , H01J2237/2817 , H01J2237/30438
摘要： This invention concerns an apparatus and a method for observing and inspecting a predetermined area in a surface of a sample by use of an electron beam. The apparatus according to this invention comprises an MCP for multiplying a secondary beam emerging from the surface of the sample. The apparatus and method employ a CCD TDI array in order to increase the lifetime of the MCP, and special scan control is carried out in the observation and inspection operation. In addition, the apparatus according to this invention has various structures for enabling correction for positional deviation of the sample and high-speed processing.
摘要翻译：本发明涉及通过使用电子束来观察和检查样品表面中的预定区域的装置和方法。根据本发明的装置包括用于乘以从样品表面出射的次级光束的MCP。该装置和方法采用CCD TDI阵列以增加MCP的寿命，并且在观察和检查操作中进行特殊的扫描控制。此外，根据本发明的装置具有用于能够校正样品的位置偏差和高速处理的各种结构。

4. 发明授权

US5200841A Apparatus for binarizing images 失效
标题翻译：二值化图像的设备
公开(公告)号：US5200841A
公开(公告)日：1993-04-06
申请号：US704223
申请日：1991-05-22
申请人： Kenichi Kotaki , Hideo Kimura , Shigeru Takemoto
发明人： Kenichi Kotaki , Hideo Kimura , Shigeru Takemoto
IPC分类号： G06K9/38 , H04N1/405
CPC分类号： H04N1/4055 , G06K9/38
摘要： The invention provides an image binarizing apparatus which includes multi-value image window circuitry for retrieving multi-value image data; a first binarizing circuit for binarizing the multi-value image data in accordance with a variable threshold determined based on the multi-value image data of pixels around a desired pixel; a second binarizing circuit for binarizing the multi-value image data in accordance with a predetermined threshold; and binary image window circuitry for retrieving image data which has been binarized by the second binarizing circuit. The image binarizing apparatus further includes edge detecting circuitry for comparing and collating binary two-dimensional image data obtained by the binary image window circuitry with edge templates each having a predetermined angle; memory circuitry for storing two types of smoothly binarized data in addresses which are generated based not only on the multi-value image data obtained by the multi-value image window circuitry, but also on the edge detection data which is output from the edge detecting circuitry; and selecting circuitry for selecting either one of the two types of smooth binary image data which are output either from the first binarizing circuit or from the memory circuitry.
摘要翻译：本发明提供了一种图像二值化装置，其包括用于检索多值图像数据的多值图像窗口电路; 第一二值化电路，用于根据基于期望像素周围的像素的多值图像数据确定的可变阈值二值化多值图像数据; 第二二值化电路，用于根据预定阈值二值化多值图像数据; 以及用于检索由第二二值化电路二值化的图像数据的二进制图像窗口电路。图像二值化装置还包括边缘检测电路，用于将由二进制图像窗口电路获得的二进制二维图像数据与每个具有预定角度的边缘模板进行比较和整理; 存储电路，用于存储不仅基于由多值图像窗口电路获得的多值图像数据而产生的地址中的两种类型的平滑二进制数据，而且还基于从边缘检测电路输出的边缘检测数据 ; 以及选择电路，用于选择从第一二值化电路或从存储器电路输出的两种类型的平滑二进制图像数据。

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