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1. 发明专利

JP2013239480A Recovery method and recovery device for resist peeling liquid 审中-公开
标题翻译：用于耐腐蚀液体的恢复方法和恢复装置
公开(公告)号：JP2013239480A
公开(公告)日：2013-11-28
申请号：JP2012109752
申请日：2012-05-11
申请人： Kimura Chem Plants Co Ltd , 木村化工機株式会社
发明人： MATSUO HIROSHI , SHIGE YOICHI
IPC分类号： H01L21/027 , G03F7/42
摘要： PROBLEM TO BE SOLVED: To provide a recovery method for a resist peeling liquid and a recovery device for the resist peeling liquid which can recover the resist peeling liquid at a high recovery rate and have excellent operation stability without causing degradation of heating performance by separation of a resist component and blockage in the device.SOLUTION: A recovery device for a resist peeling liquid includes: a distillation mechanism part B which distils a used resist peeling liquid including a resist component and separates the used resist peeling liquid into a resist concentrated waste liquid and distillate including the resist peeling liquid; and an evaporation and dry mechanism part C having a two-axis extrusion mechanism 31 having two screws 35a, 35b in a cylinder 36, and a heater 32, and configured to evaporate the resist peeling liquid by heating the supplied resist concentrated waste liquid and discharge a separated solid matter derived from the resist component to the outside by scraping it by the screws. The two-axis extrusion mechanism 31 has a material seal structure and a self-cleaning mechanism.
摘要翻译：要解决的问题：为了提供抗蚀剂剥离液的回收方法和抗蚀剂剥离液的回收装置，其能够以高回收率回收抗蚀剂剥离液并且具有优异的操作稳定性，而不会由于分离而导致加热性能的劣化抗蚀剂成分和装置中的阻塞。解决方案：用于抗蚀剂剥离液的回收装置包括：蒸馏机构部分B，其蒸馏包含抗蚀剂组分的所使用的抗蚀剂剥离液体，并将所使用的抗蚀剂剥离液体分离成抗蚀剂浓缩废液和含有抗蚀剂剥离液的馏出物; 以及具有在圆筒36中具有两个螺钉35a，35b的两轴挤压机构31和加热器32的蒸发干燥机构部分C，并且通过加热供给的抗蚀剂浓缩废液和排出来蒸发抗蚀剂剥离液体通过用螺钉刮擦将抗蚀剂成分分离的固体物质分散到外部。双轴挤压机构31具有材料密封结构和自清洁机构。

2. 发明专利

JP2013226480A Apparatus and method for evaporative concentration of aqueous solution containing acid 审中-公开
标题翻译：含酸水溶液浓缩浓度的装置及方法
公开(公告)号：JP2013226480A
公开(公告)日：2013-11-07
申请号：JP2012098863
申请日：2012-04-24
申请人： Kimura Chem Plants Co Ltd , 木村化工機株式会社
发明人： MATSUO HIROSHI , SHIGE YOICHI
IPC分类号： C02F1/04 , B01D1/00 , B01D5/00 , C01B7/19 , H01L21/304
CPC分类号： Y02P20/123 , Y02P20/129 , Y02P70/34 , Y02P70/605
摘要： PROBLEM TO BE SOLVED: To provide an apparatus and method for the evaporative concentration of an aqueous solution containing an acid capable of suppressing an increase in equipment material cost and attaining a sufficient conservation of energy.SOLUTION: An evaporative concentration apparatus for the evaporative concentration of an aqueous solution containing an acid having corrosive properties includes a heating part 1 for indirectly heating the aqueous solution containing an acid by a first heating medium, an evaporation part 2 for evaporating a low boiling point component containing moisture as a main component from the aqueous solution containing an acid heated by the heating part, a condensation part 3 for indirectly cooling the low boiling point component steam evaporated in the evaporation part by a second heating medium to condense the same, and a heat pump chiller 3 performing the temperature rising of the first heating medium used in the heating of the aqueous solution containing an acid in the heating part to be lowered in temperature and the cooling of the second heating medium used in the cooling of the low boiling point component steam in the condensation part to be raised in temperature. The apparatus further includes a distillation part 5 for refluxing the steam generated in the evaporation part and the condensed solution condensed in the condensation part to bring them into contact with each other.
摘要翻译：要解决的问题：提供一种用于蒸发浓缩含有能够抑制设备材料成本增加并获得足够的能量节约的酸的水溶液的装置和方法。解决方案：蒸发浓缩装置含有具有腐蚀性的酸的水溶液包括用于通过第一加热介质间接加热含有酸的水溶液的加热部分1，从水溶液蒸发含有水分的低沸点组分的蒸发部分2 含有被加热部加热的酸的冷凝部3，用于间歇地冷却通过第二加热介质在蒸发部中蒸发的低沸点成分蒸汽的冷凝部3，冷凝部3，进行第一加热部的升温的热泵冷水机3 用于加热水溶液的加热介质使加热部件中的酸在温度下降低，并且冷却用于冷却冷凝部件中的低沸点组分蒸汽的第二加热介质的温度升高。该装置还包括用于回流蒸发部分中产生的蒸汽和在冷凝部分中冷凝的冷凝溶液使其彼此接触的蒸馏部分5。

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