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    • 2. 发明授权
    • Capacitive differential pressure detector
    • 电容式差压检测器
    • US5056369A
    • 1991-10-15
    • US507843
    • 1990-04-12
    • Mitsuru TamaiTadanori YuharaKimihiro NakamuraKazuaki KitamuraToshiyuki TakanoTeizo TakahamaMikihiko MatsudaShinichi Souma
    • Mitsuru TamaiTadanori YuharaKimihiro NakamuraKazuaki KitamuraToshiyuki TakanoTeizo TakahamaMikihiko MatsudaShinichi Souma
    • G01L13/06G01L9/00
    • G01L9/0073
    • The present invention is directed to a capacitive differential pressure detector comprising a diaphragm disposed between two electrodes. In a first embodiment, each of the electrodes comprises two conductive plates with an insulator disposed therebetween. Step-like portions are formed in the conductive plate nearest the diaphragm. In a second embodiment, the plate nearest the diaphragm is insulative with a conductive film formed thereon. In a third embodiment, at least one groove is formed in the plate nearest the diaphragm. The groove is formed in a surface of the plate which faces the diaphragm. The groove also intersects a pressure guide hole. In a fourth embodiment, a substrate is disposed on a surface of the plate farthest from said diaphragm. In a fifth embodiment, an insulating layer has the same coefficient of thermal expansion as the conductive plates. In a sixth embodiment, the diaphragm is etched in order to form a circular flexible part, a centrally disposed displacing part, and a bonding part.
    • 本发明涉及一种电容差压检测器,其包括设置在两个电极之间的隔膜。 在第一实施例中,每个电极包括两个导电板,绝缘体位于它们之间。 在最靠近隔膜的导电板中形成阶梯状部分。 在第二实施例中,最靠近隔膜的板是绝缘的,其上形成有导电膜。 在第三实施例中,在最靠近隔膜的板中形成至少一个凹槽。 凹槽形成在板的面向隔膜的表面中。 凹槽还与压力导向孔相交。 在第四实施例中,基板设置在距所述隔膜最远的板的表面上。 在第五实施例中,绝缘层具有与导电板相同的热膨胀系数。 在第六实施例中,为了形成圆形柔性部分,中心设置的位移部分和接合部分,蚀刻隔膜。