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    • 3. 发明授权
    • Process for preparing metal oxide slurry suitable for semiconductor chemical mechanical polishing
    • 制备适用于半导体化学机械抛光的金属氧化物浆料的方法
    • US06551367B2
    • 2003-04-22
    • US09867522
    • 2001-05-31
    • Kil Sung LeeJae Seok LeeSeok Jin KimTu Won Chang
    • Kil Sung LeeJae Seok LeeSeok Jin KimTu Won Chang
    • C09K314
    • C09K3/1463C09G1/02
    • There is disclosed a process for preparing a metal oxide CMP slurry suitable for semiconductor devices, wherein a mixture comprising 1 to 50 weight % of a metal oxide and 50 to 99 weight % of water is mixed in a pre-mixing tank, transferred to a dispersion chamber with the aid of a transfer pump, allowed to have a flow rate of not less than 100 m/sec by pressurization with a high pressure pump, and subjected to counter collision for dispersion through two orifices in the dispersion chamber. The slurry has particles which are narrow in particle size distribution, showing an ultrafine size ranging from 30 to 500 nm. Also, the slurry is not polluted at all during its preparation and shows no tailing phenomena, so that it is preventive of &mgr;-scratching. Therefore, it can be used in the planarization for shallow trench isolation, interlayer dielectrics and inter metal dielectrics through a CMP process.
    • 公开了一种制备适用于半导体器件的金属氧化物CMP浆料的方法,其中将包含1至50重量%的金属氧化物和50至99重量%的水的混合物混合在预混合罐中,转移至 借助于输送泵的分散室,通过用高压泵加压使其具有不小于100m /秒的流速,并通过分散室中的两个孔进行反向碰撞以进行分散。 该浆料具有粒径分布窄的粒子,显示出30〜500nm的超细尺寸。 此外,浆料在其制备过程中根本不会被污染,并且不显示拖尾现象,因此可以防止刮擦。 因此,可以通过CMP工艺在浅沟槽隔离,层间电介质和金属间电介质的平面化中使用。
    • 5. 发明授权
    • Vane pump
    • 叶片泵
    • US08398388B2
    • 2013-03-19
    • US12947065
    • 2010-11-16
    • Hang Cheol ChoJin Young HwangSeok Jin Kim
    • Hang Cheol ChoJin Young HwangSeok Jin Kim
    • F01C1/00F03C2/00F03C4/00F04C2/00F04C18/00
    • F04C2/356F01C21/0845F04C2210/14
    • A vane pump may include an oval fixed portion of which an outer circumference may be oval, a rotation ring that may be rotatably disposed outside of the oval fixed portion with a gap and in which blade slots may be formed in a predetermined depth along a circular interior circumference of the rotation ring at a predetermined interval from each other, blades of which one end thereof may be slidably inserted into the blade slots respectively and of which the other end slidably contacts an outer surface of the oval fixed portion, an elastic member coupled to the rotation ring and elastically pushing the blades towards the oval fixed portion, and a drive portion connected to the rotation ring and rotating the rotation ring such that oil may be sucked through an expanding space that may be formed between at least two of the blades and oil may be pumped through a shrinking space that may be formed between at least two of the blades.
    • 叶片泵可以包括其外周可以是椭圆形的椭圆形固定部分,旋转环可以可旋转地设置在椭圆形固定部分的外侧,具有间隙,并且叶片槽可以沿着圆形形成在预定深度 旋转环的内周彼此间隔预定的间隔,其一端可分别可滑动地插入到刀片槽中,其另一端可滑动地接触椭圆形固定部分的外表面的弹性构件 旋转环并将叶片弹性地推向椭​​圆形固定部分;以及驱动部分,连接到旋转环并旋转旋转环,使得油可以通过可形成在至少两个叶片之间的扩张空间吸入 并且油可以被泵送通过可形成在至少两个叶片之间的收缩空间。
    • 7. 发明申请
    • Vane Pump
    • 叶片泵
    • US20120070328A1
    • 2012-03-22
    • US12947065
    • 2010-11-16
    • Hang Cheol ChoJin Young HwangSeok Jin Kim
    • Hang Cheol ChoJin Young HwangSeok Jin Kim
    • F04C2/00
    • F04C2/356F01C21/0845F04C2210/14
    • A vane pump may include an oval fixed portion of which an outer circumference may be oval, a rotation ring that may be rotatably disposed outside of the oval fixed portion with a gap and in which blade slots may be formed in a predetermined depth along a circular interior circumference of the rotation ring at a predetermined interval from each other, blades of which one end thereof may be slidably inserted into the blade slots respectively and of which the other end slidably contacts an outer surface of the oval fixed portion, an elastic member coupled to the rotation ring and elastically pushing the blades towards the oval fixed portion, and a drive portion connected to the rotation ring and rotating the rotation ring such that oil may be sucked through an expanding space that may be formed between at least two of the blades and oil may be pumped through a shrinking space that may be formed between at least two of the blades.
    • 叶片泵可以包括其外周可以是椭圆形的椭圆形固定部分,旋转环可以可旋转地设置在椭圆形固定部分的外侧,具有间隙,并且叶片槽可以沿着圆形形成在预定深度 旋转环的内周彼此间隔预定的间隔,其一端可分别可滑动地插入到刀片槽中,其另一端可滑动地接触椭圆形固定部分的外表面的弹性构件 旋转环并将叶片弹性地推向椭​​圆形固定部分;以及驱动部分,连接到旋转环并旋转旋转环,使得油可以通过可形成在至少两个叶片之间的扩张空间吸入 并且油可以被泵送通过可形成在至少两个叶片之间的收缩空间。
    • 9. 发明申请
    • METHOD FOR FABRICATING A POLYOLEFIN SHEET USING A ROLLER DEVICE
    • 使用滚筒装置制造聚酯薄片的方法
    • US20120235318A1
    • 2012-09-20
    • US13513888
    • 2010-12-02
    • Sang Min KwonSeok Jin KimTae Keun LeeWoon Ki ChungSung Bo Yoo
    • Sang Min KwonSeok Jin KimTae Keun LeeWoon Ki ChungSung Bo Yoo
    • B29C47/88
    • B29C48/914B29C48/07B29C48/08B29C48/12B29C48/92B29C2948/92704B29C2948/92923B29K2023/0625B29K2023/0633B29K2023/12B29L2007/008
    • Provided herein is a method of manufacturing a polyolefin sheet using a circulating belt and a first roller, comprising the steps of: heating polyolefin resin to melt polyolefin; and forming the molten polyolefin into a polyolefin sheet using an extruding die, wherein the circulating belt includes a plurality of second rollers (cooling rollers) which come into contact with an inner side of the circulating belt and are arranged in a circle around the circulating belt running in a circle and which cool the rotating circulating belt; a temperature of the circulating belt is maintained at 0˜30 to cool the polyolefin sheet such that the polyolefin sheet has desired thickness, a temperature of the first roller is set to a specific temperature between 40 and 120, and the temperature of the first roller is maintained in a temperature range of the specific temperature ±5; and a linear speed of the molten polyolefin sheet is substantially equal to a rotation speed of the circulating belt or the first roller to obtain a polyolefin sheet having a thickness of 0.05˜0.45 mm and a width of 1100˜1700 mm The method is advantageous in that a wide-width polyolefin sheet having excellent flatness and a small thickness deviation can be manufactured.
    • 本发明提供使用循环带和第一辊制造聚烯烃片材的方法,包括以下步骤:加热聚烯烃树脂以熔化聚烯烃; 以及使用挤出模具将熔融聚烯烃形成聚烯烃片材,其中循环带包括与循环带的内侧接触并围绕循环带布置的多个第二辊(冷却辊) 以循环方式运行,并冷却旋转循环带; 循环带的温度保持在0〜30以冷却聚烯烃片材,使得聚烯烃片材具有期望的厚度,将第一辊子的温度设定在40至120的特定温度,并且第一辊子的温度 保持在特定温度±5℃的温度范围内; 熔融聚烯烃片材的线速度基本上等于循环带或第一辊的转速,得到厚度为0.05〜0.45mm,宽度为1100〜1700mm的聚烯烃片材。该方法有利于 可以制造具有优异的平坦度和小的厚度偏差的宽幅聚烯烃片材。
    • 10. 发明申请
    • APPARATUS OF BILGE PREVENTION FOR A SHIP
    • 装备防止船舶的装置
    • US20100264598A1
    • 2010-10-21
    • US12742084
    • 2008-10-29
    • Seok Jin KimYoung Ho BanKwang Uk Kang
    • Seok Jin KimYoung Ho BanKwang Uk Kang
    • B63H23/32F16J15/34F16J15/38
    • B63H23/321
    • Disclosed is an apparatus (1) for preventing generation of bilge water in a ship. The apparatus includes a cover (7) configured to receive fluid therein, a rotating unit (3) coupled to a shaft (91) so as to be rotated along with the shaft penetrated through the rotating unit, the rotating unit including a first coupler (31). The apparatus further includes a first sealing unit (4) located inside the cover and interposed between one side of the first coupler and one side of the cover, and a sealing piece (6) interposed in a contact interface between the rotating unit and the shaft. The apparatus completely prevents seawater from being introduced into an engine room, therby preventing generation of bilge water and achieving an extended lifespan thereof without damage.
    • 公开了一种用于防止在船上产生舱底水的装置(1)。 该装置包括构造成在其中容纳流体的盖子(7),与轴(91)联接的旋转单元(3),以便与穿过旋转单元的轴一起旋转,旋转单元包括第一耦合器 31)。 该装置还包括一个第一密封单元(4),该第一密封单元(4)位于盖子的内部,并且位于第一耦合器的一侧和盖的一侧之间,以及密封件(6),该密封件插入在旋转单元和轴之间的接触界面 。 该装置完全防止海水被引入发动机室,从而防止舱底水的产生并实现其寿命延长而不损坏。