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    • 7. 发明申请
    • MEMS STRUCTURE AND OPTICAL MODULATOR HAVING TEMPERATURE COMPENSATION LAYER
    • 具有温度补偿层的MEMS结构和光学调制器
    • US20090067034A1
    • 2009-03-12
    • US12060017
    • 2008-03-31
    • Ki-Suk WooJong-Hyeong SongHee-Yeoun Kim
    • Ki-Suk WooJong-Hyeong SongHee-Yeoun Kim
    • G02B26/00
    • G02B26/0858G02B7/008
    • An optical modulator can be provided that includes a substrate; an insulation layer positioned on the substrate; a ribbon layer such that its center portion is spaced apart from the insulation layer; a piezoelectric actuator positioned on either end of the ribbon layer that provides the driving force which moves the center portion of the ribbon layer vertically; and a temperature compensation layer, which is made of a thermally contracting material having a negative coefficient of expansion, and which is formed on at least one position of an upper portion of the piezoelectric actuator, a lower portion of the piezoelectric actuator, and a lower surface of the ribbon layer corresponding to a position of the piezoelectric actuator. In the optical modulator, the problem of thermal deformation due to rises in temperature can be resolved, whereby the accuracy and reliability of operation of the component can be increased.
    • 可以提供包括基板的光学调制器; 位于基板上的绝缘层; 带状层,使得其中心部分与绝缘层间隔开; 定位在带状层的任一端的压电致动器,其提供使带状层的中心部分垂直移动的驱动力; 以及温度补偿层,其由具有负膨胀系数的热收缩材料制成,并且形成在压电致动器的上部的至少一个位置,压电致动器的下部和下部 带层的表面对应于压电致动器的位置。 在光调制器中,可以解决由于温度升高引起的热变形的问题,从而可以提高部件的操作的精度和可靠性。