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1. 发明申请

US20070119486A1 System for rinsing and drying semiconductor substrates 审中-公开
标题翻译：用于冲洗和干燥半导体衬底的系统
公开(公告)号：US20070119486A1
公开(公告)日：2007-05-31
申请号：US11698506
申请日：2007-01-26
申请人： Ki Hwan Park , Jong Kook Song , Mo Hyun Cho , Sung-Ho Cho , Sun Jae Lee , Pyung Ho Lim , Dong Wook Cho
发明人： Ki Hwan Park , Jong Kook Song , Mo Hyun Cho , Sung-Ho Cho , Sun Jae Lee , Pyung Ho Lim , Dong Wook Cho
IPC分类号： B08B3/00
CPC分类号： H01L21/02052 , H01L21/67034
摘要： A system for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.
摘要翻译：用于清洁和干燥半导体晶片的系统通过提供干燥流体与清洁流体的比例的更高级的控制，例如N 2/2蒸气与IPA蒸气的比例来提高装置产量。此外，采用快速排水方法来提高工艺流程，并且在清洁和干燥步骤期间进一步改善颗粒和水印去除。

2. 发明申请

US20050087211A1 System for rinsing and drying semiconductor substrates and method therefor 失效
标题翻译：用于冲洗和干燥半导体衬底的系统及其方法
公开(公告)号：US20050087211A1
公开(公告)日：2005-04-28
申请号：US10796507
申请日：2004-03-09
申请人： Ki Hwan Park , Jong Kook Song , Mo Hyun Cho , Sung-Ho Cho , Sun Jae Lee , Pyung Ho Lim , Dong Wook Cho
发明人： Ki Hwan Park , Jong Kook Song , Mo Hyun Cho , Sung-Ho Cho , Sun Jae Lee , Pyung Ho Lim , Dong Wook Cho
IPC分类号： H01L21/304 , B08B3/12 , B08B6/00 , H01L21/00 , H01L21/306
CPC分类号： H01L21/02052 , H01L21/67028 , Y10S134/902
摘要： A system and method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.
摘要翻译：用于清洁和干燥半导体晶片的系统和方法通过提供干燥流体与清洁流体的比例的更先进的控制，例如N 2/2蒸汽与IPA蒸气的比例来提高装置产量。此外，采用快速排水方法来提高工艺流程，并且在清洁和干燥步骤期间进一步改善颗粒和水印去除。

3. 发明授权

US07186299B2 Method of rinsing and drying semiconductor substrates 失效
标题翻译：冲洗和干燥半导体衬底的方法
公开(公告)号：US07186299B2
公开(公告)日：2007-03-06
申请号：US10796507
申请日：2004-03-09
申请人： Ki Hwan Park , Jong Kook Song , Mo Hyun Cho , Sung-Ho Jo , Sun Jae Lee , Pyung Ho Lim , Dong Wook Cho
发明人： Ki Hwan Park , Jong Kook Song , Mo Hyun Cho , Sung-Ho Jo , Sun Jae Lee , Pyung Ho Lim , Dong Wook Cho
IPC分类号： B08B3/10
CPC分类号： H01L21/02052 , H01L21/67028 , Y10S134/902
摘要： A method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.
摘要翻译：用于清洁和干燥半导体晶片的方法通过提供干燥流体与清洁流体的比例的更先进的控制，例如N 2蒸汽与IPA蒸汽的比例来提高装置产量。此外，采用快速排水方法来提高工艺流程，并且在清洁和干燥步骤期间进一步改善颗粒和水印去除。

4. 发明申请

US20110191680A1 METHOD AND APPARATUS FOR PROVIDING USER INTERFACE USING ACOUSTIC SIGNAL, AND DEVICE INCLUDING USER INTERFACE 有权
标题翻译：用于使用声音信号提供用户界面的方法和装置，以及包括用户界面的装置
公开(公告)号：US20110191680A1
公开(公告)日：2011-08-04
申请号：US13019566
申请日：2011-02-02
申请人： Seung Chul CHAE , Sun Jae Lee , Kyung Ah Chang , Ho Sub Lee , Hyun Jin Choi
发明人： Seung Chul CHAE , Sun Jae Lee , Kyung Ah Chang , Ho Sub Lee , Hyun Jin Choi
IPC分类号： G06F3/01
CPC分类号： G06F3/0436 , G06F3/04883 , G10L17/26
摘要： A user interface using an acoustic signal is provided. A device with the user interface includes a sensor to acquire a surface acoustic signal generated outside of the device, and at least one processor. The processor classifies patterns of the surface acoustic signal by analyzing features of the surface acoustic signal, and identifies a user's input signal corresponding to the surface acoustic signal based on the pattern of the surface acoustic signal.
摘要翻译：提供了使用声信号的用户界面。具有用户接口的设备包括用于获取在设备外部产生的表面声信号的传感器和至少一个处理器。处理器通过分析表面声信号的特征来分类表面声信号的图案，并且基于表面声信号的图案识别对应于表面声信号的用户的输入信号。

5. 发明授权

US09857920B2 Method and apparatus for providing user interface using acoustic signal, and device including user interface 有权
公开(公告)号：US09857920B2
公开(公告)日：2018-01-02
申请号：US13019566
申请日：2011-02-02
申请人： Seung Chul Chae , Sun Jae Lee , Kyung Ah Chang , Ho Sub Lee , Hyun Jin Choi
发明人： Seung Chul Chae , Sun Jae Lee , Kyung Ah Chang , Ho Sub Lee , Hyun Jin Choi
IPC分类号： G06F3/043 , G06F3/0488 , G10L17/26
CPC分类号： G06F3/0436 , G06F3/04883 , G10L17/26
摘要： A user interface using an acoustic signal is provided. A device with the user interface includes a sensor to acquire a surface acoustic signal generated outside of the device, and at least one processor. The processor classifies patterns of the surface acoustic signal by analyzing features of the surface acoustic signal, and identifies a user's input signal corresponding to the surface acoustic signal based on the pattern of the surface acoustic signal.

6. 发明授权

US5868289A Stiffened folded paperboard hanger 失效
标题翻译：加强折叠纸板衣架
公开(公告)号：US5868289A
公开(公告)日：1999-02-09
申请号：US715477
申请日：1996-09-18
申请人： Sun Jae Lee
发明人： Sun Jae Lee
IPC分类号： A47G25/36 , A47G25/14
CPC分类号： A47G25/36
摘要： A folded paperboard hanger including a slant plate part having two slant portions, a connecting plate part connecting end portions of the slant portions so as to make an approximate isosceles triangular formation, a hanging plate part formed as an one body together with the slant plate part for hanging the hanger, and a reinforcement plate part extended from one of the slant plate part and the connecting plate part. The reinforcement plate part is fixed by folding the reinforcement plate part so as to form an approximate right angle between the reinforcement plate part and the one of the slant plate part and the connecting plate part. An extending plate part is formed inside the connecting plate part and has a pair of hanging lugs. The extending plate part is folded by an angle of approximate 180 degrees such that the pair of hanging lugs are positioned at an opposite side of the hanging plate part with respect to the connecting plate part.
摘要翻译：一种折叠纸板衣架，包括具有两个倾斜部分的倾斜板部分，连接板部分，连接倾斜部分的端部以形成近似的等腰三角形形状，与倾斜板部分一起形成为一体的吊板部分用于悬吊衣架，以及从倾斜板部分和连接板部分之一延伸的加强板部分。加强板部通过折叠加强板部来固定，以在加强板部分与倾斜板部分和连接板部分之间形成大致直角。在连接板部分内部形成有延伸板部分，并且具有一对悬挂凸耳。延伸板部分以约180度的角度折叠，使得一对悬挂凸耳相对于连接板部分位于悬挂板部分的相对侧。

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