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    • 9. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20130161731A1
    • 2013-06-27
    • US13601355
    • 2012-08-31
    • Jin Ho BINKi Hong LEE
    • Jin Ho BINKi Hong LEE
    • H01L21/336H01L29/78
    • H01L29/7926H01L27/1158H01L27/11582H01L29/66833H01L29/78
    • A three-dimensional (3D) semiconductor device includes first interlayer dielectric layers and word lines that are alternately stacked on a substrate; select lines formed on the first interlayer dielectric layers and the word lines; etch stop patterns formed on the select lines to contact the select lines; channel holes formed to pass through the select lines, the first interlayer dielectric layers, and the word lines; channel layers formed on surfaces of the channel holes; insulating layers formed in the channel holes, the insulating layers having an upper surface that is lower than upper surfaces of the etch stop patterns; impurity-doped layers formed in channel holes on upper surface of the insulating layers; and a second interlayer dielectric layer formed over the etch stop patterns and the impurity-doped layers.
    • 三维(3D)半导体器件包括交替堆叠在衬底上的第一层间电介质层和字线; 形成在第一层间电介质层和字线上的选择线; 形成在选择线上以接触选择线的蚀刻停止图案; 形成为通过选择线,第一层间电介质层和字线的通道孔; 通道层形成在通道孔的表面上; 绝缘层形成在通道孔中,绝缘层具有比蚀刻停止图案的上表面低的上表面; 在绝缘层的上表面的通道孔中形成杂质掺杂层; 以及形成在蚀刻停止图案和杂质掺杂层之上的第二层间介电层。