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    • 1. 发明授权
    • Method of forming p-type compound semiconductor layer
    • 形成p型化合物半导体层的方法
    • US07682953B2
    • 2010-03-23
    • US12090305
    • 2007-06-29
    • Ki Bum NamHwa Mok KimJames S. Speck
    • Ki Bum NamHwa Mok KimJames S. Speck
    • H01L21/00
    • H01L33/007H01L21/0254H01L21/02579H01L21/0262
    • A method of forming a p-type compound semiconductor layer includes increasing a temperature of a substrate loaded into a reaction chamber to a first temperature. A source gas of a Group III element, a source gas of a p-type impurity, and a source gas of nitrogen containing hydrogen are supplied into the reaction chamber to grow the p-type compound semiconductor layer. Then, the supply of the source gas of the Group III element and the source gas of the p-type impurity is stopped and the temperature of the substrate is lowered to a second temperature. The supply of the source gas of nitrogen containing hydrogen is stopped and drawn out at the second temperature, and the temperature of the substrate is lowered to room temperature using a cooling gas. Accordingly, hydrogen is prevented from bonding to the p-type impurity in the p-type compound semiconductor layer.
    • 形成p型化合物半导体层的方法包括将装载到反应室中的基板的温度升高到第一温度。 将III族元素的源气体,p型杂质的源气体和含氮气的源气体供给到反应室中以使p型化合物半导体层生长。 然后,停止供给III族元素的源气体和p型杂质的源气体,并将基板的温度降低到第二温度。 供给含氮氢气的源气体在第二温度下停止并排出,并且使用冷却气体将基板的温度降至室温。 因此,防止氢与p型化合物半导体层中的p型杂质结合。
    • 2. 发明授权
    • Method of forming p-type compound semiconductor layer
    • 形成p型化合物半导体层的方法
    • US08470697B2
    • 2013-06-25
    • US12560891
    • 2009-09-16
    • Ki Bum NamHwa Mok KimJames S. Speck
    • Ki Bum NamHwa Mok KimJames S. Speck
    • H01L21/00
    • H01L33/007H01L21/0254H01L21/02579H01L21/0262
    • A method of forming a p-type compound semiconductor layer includes increasing a temperature of a substrate loaded into a reaction chamber to a first temperature. A source gas of a Group III element, a source gas of a p-type impurity, and a source gas of nitrogen containing hydrogen are supplied into the reaction chamber to grow the p-type compound semiconductor layer. Then, the supply of the source gas of the Group III element and the source gas of the p-type impurity is stopped and the temperature of the substrate is lowered to a second temperature. The supply of the source gas of nitrogen containing hydrogen is stopped and drawn out at the second temperature, and the temperature of the substrate is lowered to room temperature using a cooling gas. Accordingly, hydrogen is prevented from bonding to the p-type impurity in the p-type compound semiconductor layer.
    • 形成p型化合物半导体层的方法包括将装载到反应室中的基板的温度升高到第一温度。 将III族元素的源气体,p型杂质的源气体和含氮气的源气体供给到反应室中以使p型化合物半导体层生长。 然后,停止供给III族元素的源气体和p型杂质的源气体,并将基板的温度降低到第二温度。 供给含氮氢气的源气体在第二温度下停止并排出,并且使用冷却气体将基板的温度降至室温。 因此,防止氢与p型化合物半导体层中的p型杂质结合。
    • 3. 发明申请
    • METHOD OF FORMING P-TYPE COMPOUND SEMICONDUCTOR LAYER
    • 形成P型复合半导体层的方法
    • US20090163002A1
    • 2009-06-25
    • US12090305
    • 2007-06-29
    • Ki Bum NamHwa Mok KimJames S. Speck
    • Ki Bum NamHwa Mok KimJames S. Speck
    • H01L21/22
    • H01L33/007H01L21/0254H01L21/02579H01L21/0262
    • A method of forming a p-type compound semiconductor layer includes increasing a temperature of a substrate loaded into a reaction chamber to a first temperature. A source gas of a Group III element, a source gas of a p-type impurity, and a source gas of nitrogen containing hydrogen are supplied into the reaction chamber to grow the p-type compound semiconductor layer. Then, the supply of the source gas of the Group III element and the source gas of the p-type impurity is stopped and the temperature of the substrate is lowered to a second temperature. The supply of the source gas of nitrogen containing hydrogen is stopped and drawn out at the second temperature, and the temperature of the substrate is lowered to room temperature using a cooling gas. Accordingly, hydrogen is prevented from bonding to the p-type impurity in the p-type compound semiconductor layer.
    • 形成p型化合物半导体层的方法包括将装载到反应室中的基板的温度升高到第一温度。 将III族元素的源气体,p型杂质的源气体和含氮气的源气体供给到反应室中以使p型化合物半导体层生长。 然后,停止供给III族元素的源气体和p型杂质的源气体,并将基板的温度降低到第二温度。 供给含氮氢气的源气体在第二温度下停止并排出,并且使用冷却气体将基板的温度降至室温。 因此,防止氢与p型化合物半导体层中的p型杂质结合。
    • 4. 发明授权
    • Light emitting device and method of fabricating the same
    • 发光元件及其制造方法
    • US08748864B2
    • 2014-06-10
    • US13304814
    • 2011-11-28
    • Woo Chul KwakSoon Ho AnHwa Mok KimEun Jin KimJae Hoon Song
    • Woo Chul KwakSoon Ho AnHwa Mok KimEun Jin KimJae Hoon Song
    • H01L33/04H01L29/06
    • H01L33/08B82Y20/00B82Y30/00H01L33/18H01L33/38H01L33/502H01L2933/0091
    • A light emitting device includes a metal backing layer, a reflective electrode layer disposed on the metal backing layer, and a plurality of nanorods disposed on the reflective electrode layer. Each nanorod includes a p-semiconductor layer, an active layer, and an n-semiconductor layer, which are sequentially stacked on the reflective electrode layer. The light emitting device further includes an anti-reflection electrode layer disposed on the nanorods, and quantum dots disposed between the nanorods. The method includes sequentially growing the n-semiconductor layer, the active layer, and the p-semiconductor layer on a substrate; forming the nanorods by etching the p-semiconductor layer using a mask pattern; sequentially forming the reflective electrode layer and the metal backing layer on the p-semiconductor layer and then removing the substrate; disposing quantum dots between the nanorods; and forming the anti-reflection electrode layer on the nanorods.
    • 发光器件包括金属背衬层,设置在金属背衬层上的反射电极层和设置在反射电极层上的多个纳米棒。 每个纳米棒包括依次堆叠在反射电极层上的p半导体层,有源层和n半导体层。 发光装置还包括设置在纳米棒上的抗反射电极层和设置在纳米棒之间的量子点。 该方法包括在衬底上依次生长n半导体层,有源层和p半导体层; 通过使用掩模图案蚀刻p半导体层来形成纳米棒; 在p-半导体层上依次形成反射电极层和金属背衬层,然后去除衬底; 在纳米棒之间设置量子点; 并在纳米棒上形成抗反射电极层。
    • 10. 发明申请
    • Light Emitting Diode of a Nanorod Array Structure Having a Nitride-Based Multi Quantum Well
    • 具有氮化物的多量子阱的纳米棒阵列结构的发光二极管
    • US20080191191A1
    • 2008-08-14
    • US11993966
    • 2005-06-27
    • Hwa Mok Kim
    • Hwa Mok Kim
    • H01L33/00
    • H01L33/32B82Y20/00H01L33/06H01L33/08H01L33/18
    • The present invention relates to a GaN light emitting diode. The GaN LED according to the present invention uses a GaN nanorod in which a multi quantum well formed by alternately stacking a plurality of InGaN layers and a plurality of GaN barriers is inserted into a p-n junction interface of a p-n junction GaN nanorod so that an n-type GaN nanorod, the multi quantum well, and a p-type GaN nanorod are sequentially arranged in a longitudinal direction. By arranging such GaN nanorods in an array, it is possible to provide an LED with higher luminance and higher light-emission efficiency as compared with a conventional laminated-film type GaN LED. It is possible to implement multi-color light with high luminance at a chip level by adjusting the amount of In and/or the thickness of the InGaN layers.
    • 本发明涉及GaN发光二极管。 根据本发明的GaN LED使用GaN纳米棒,其中通过交替堆叠多个InGaN层和多个GaN势垒形成的多量子阱插入到pn结GaN纳米棒的pn结界面中,使得n 型GaN纳米棒,多量子阱和p型GaN纳米棒沿纵向顺序排列。 通过将阵列中的这种GaN纳米棒排列,与传统的层叠膜型GaN LED相比,可以提供具有更高亮度和更高发光效率的LED。 通过调整In的量和/或InGaN层的厚度,可以在芯片级别实现高亮度的多色光。