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    • 10. 发明申请
    • PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME
    • 用于制造包含层的工艺和材料及其制品
    • US20130323880A1
    • 2013-12-05
    • US13981327
    • 2012-02-10
    • Nora Sabina RaduKyung-Ho ParkAdam FennimoreKerwin D. Dobbs
    • Nora Sabina RaduKyung-Ho ParkAdam FennimoreKerwin D. Dobbs
    • H01L51/00
    • H01L51/0002G03F7/038G03F7/0755G03F7/325H01L51/0003H01L51/0059H01L51/56
    • There is provided a process for forming a contained second layer over a first layer, including the steps: forming the first layer having a first surface energy; treating the first layer with a priming material to form a priming layer; exposing the priming layer patternwise with radiation resulting in exposed areas and unexposed areas; developing the priming layer to effectively remove the priming layer from the unexposed areas resulting in a first layer having a pattern of developed priming layer, wherein the pattern of developed priming layer has a second surface energy that is higher than the first surface energy; and forming the second layer by liquid depositions on the pattern of developed priming layer on the first layer. The priming material has at least one unit of Formula I In Formula I: R1 through R6 are D, alkyl, aryl, or silyl, where adjacent R groups can join together to form an aromatic ring; X is a single bond, H, D, or a leaving group; Y is H, D, alkyl, aryl, silyl, or vinyl; a-f are an integer from 0-4; m, p and q are an integer of 0 or greater.
    • 提供了一种用于在第一层上形成包含的第二层的方法,包括以下步骤:形成具有第一表面能的第一层; 用起动材料处理第一层以形成起动层; 以辐射模式曝光引发层,导致曝光区域和未曝光区域; 开发底漆层以有效地从未曝光区域去除底漆层,从而产生具有显影起泡层图案的第一层,其中显影起始层的图案具有高于第一表面能的第二表面能; 以及通过在第一层上的显影起始层的图案上的液体沉积形成第二层。 起始材料具有式I中至少一个单元。在式I中:R 1至R 6为D,烷基,芳基或甲硅烷基,其中相邻的R基团可以连接在一起形成芳环; X是单键,H,D或离去基团; Y是H,D,烷基,芳基,甲硅烷基或乙烯基; a-f是0-4的整数; m,p和q是0以上的整数。