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1. 发明申请

US20070189671A1 Method for manufacturing optical waveguide chip 审中-公开
标题翻译：光波导芯片制造方法
公开(公告)号：US20070189671A1
公开(公告)日：2007-08-16
申请号：US10591913
申请日：2005-02-23
申请人： Kentarou Tamaki , Hideaki Takase , Jun Huangfu , Yuuichi Eriyama
发明人： Kentarou Tamaki , Hideaki Takase , Jun Huangfu , Yuuichi Eriyama
IPC分类号： G02B6/30
CPC分类号： G02B6/30 , G02B6/138
摘要： An optical waveguide chip having an optical waveguide which can keep good transmission characteristics stably over a long period of time without separations or cracks even in severe use conditions, and an optical fiber guide portion formed without cracks firmly with a shape and a size corresponding to those of an optical fiber is provided. An optical waveguide chip 1 has a support 2, an optical waveguide 3 having a core portion 7, clad layers 6 and 8, an optical fiber guide portion 4 for positioning an optical fiber to be connected with the optical waveguide 3, and a cover member (glass plate) 5. The optical waveguide 3 is made of a radiation-sensitive polysiloxane composition. The optical fiber guide portion 4 is made of the same or a different radiation-sensitive polysiloxane composition as/from the material of the optical waveguide 3. The optical waveguide 3 and the optical fiber guide portion 4 are formed by separate processes.
摘要翻译：一种具有光波导的光波导芯片，即使在严格的使用条件下也能够长时间稳定地保持良好的透射特性而没有分离或裂纹，并且光纤引导部分形成无裂纹，形状和尺寸对应于那些提供了光纤。光波导芯片1具有支撑体2，具有芯部7的光波导3，包层6,8，用于定位与光波导3连接的光纤的光纤引导部4，以及盖部件（玻璃板）5。光波导3由辐射敏感性聚硅氧烷组合物制成。光纤引导部分4由与光波导3的材料相同或不同的辐射敏感性聚硅氧烷组合物制成。光波导3和光纤引导部4通过分开的工序形成。

2. 发明授权

US07162131B2 Radiation-curable composition, optical waveguide and method for formation thereof 有权
标题翻译：可辐射固化组合物，光波导及其形成方法
公开(公告)号：US07162131B2
公开(公告)日：2007-01-09
申请号：US10513355
申请日：2003-10-20
申请人： Hideaki Takase , Kentarou Tamaki , Jun Huangfu , Tomohiro Utaka , Yuuichi Eriyama
发明人： Hideaki Takase , Kentarou Tamaki , Jun Huangfu , Tomohiro Utaka , Yuuichi Eriyama
IPC分类号： G02B6/10 , G03C1/73
CPC分类号： C09D183/08 , C08L83/08 , G02B6/138 , G02B2006/121 , G03F7/001 , G03F7/0046 , G03F7/0382 , G03F7/0757 , C08L2666/24 , C08L2666/34 , C08L2666/28
摘要： A radiation-curable composition containing (A) hydrolyzates of hydrolyzable silane compounds represented by general formula (1): (R1)p(R2)qSi(X)4-p-q (wherein R1 is a non-hydrolyzable organic group having 1 to 12 carbon atoms that contains fluorine atoms, R2 is a non-hydrolyzable organic group having 1 to 12 carbon atoms (but excluding ones that contain fluorine atoms), X is a hydrolyzable group, p is an integer of 1 or 2, and q is an integer of 0 or 1) and condensates of such hydrolyzates, and (B) a photo acid generator, wherein the ratio of silanol (Si—OH) groups in the composition is 0.1 to 0.5 out of all the bonding groups on Si. With such a composition, the waveguide loss is low for light having a wavelength in a broad range from the visible region to the near infrared region, and moreover the cracking resistance, the patterning ability upon irradiation with radiation, and so on are excellent.
摘要翻译：一种含有（A）由通式（1）表示的可水解硅烷化合物的水解产物的可辐射固化组合物：（R 1）2（R 2））其中R 1是具有1至12个碳原子的不可水解的有机基团，其含有（C 1 -C 4）氟原子，R 2是具有1至12个碳原子的不可水解的有机基团（但不包括含有氟原子的有机基团），X是可水解基团，p是1或2的整数，和q是0或1的整数）和这些水解产物的缩合物，和（B）光酸产生剂，其中组合物中硅烷醇（Si-OH）基团的比例为0.1至0.5， Si。通过这样的组成，对于具有从可见光区域到近红外区域的宽范围的波长的光，波导损耗低，而且耐龟裂性，照射辐射时的图案化能力等优异。

3. 发明申请

US20060165362A1 Radiation curable composition, optical waveguide and method for formation thereof 有权
标题翻译：辐射固化性组合物，光波导及其形成方法
公开(公告)号：US20060165362A1
公开(公告)日：2006-07-27
申请号：US10513355
申请日：2003-10-20
申请人： Hideaki Takase , Kentarou Tamaki , Jun Huangfu , Tomohiro Utaka , Yuuichi Eriyama
发明人： Hideaki Takase , Kentarou Tamaki , Jun Huangfu , Tomohiro Utaka , Yuuichi Eriyama
IPC分类号： G02B6/10
CPC分类号： C09D183/08 , C08L83/08 , G02B6/138 , G02B2006/121 , G03F7/001 , G03F7/0046 , G03F7/0382 , G03F7/0757 , C08L2666/24 , C08L2666/34 , C08L2666/28
摘要： A radiation-curable composition containing (A) hydrolyzates of hydrolyzable silane compounds represented by general formula (1): (R1)p(R2)qSi(X)4-p-q (wherein R1 is a non-hydrolyzable organic group having 1 to 12 carbon atoms that contains fluorine atoms, R2 is a non-hydrolyzable organic group having 1 to 12 carbon atoms (but excluding ones that contain fluorine atoms), X is a hydrolyzable group, p is an integer of 1 or 2, and q is an integer of 0 or 1) and condensates of such hydrolyzates, and (B) a photo acid generator, wherein the ratio of silanol (Si—OH) groups in the composition is 0.1 to 0.5 out of all the bonding groups on Si. With such a composition, the waveguide loss is low for light having a wavelength in a broad range from the visible region to the near infrared region, and moreover the cracking resistance, the patterning ability upon irradiation with radiation, and so on are excellent.
摘要翻译：一种含有（A）由通式（1）表示的可水解硅烷化合物的水解产物的可辐射固化组合物：（R 1）P（R 2））其中R 1是具有1至12个碳原子的不可水解的有机基团，其含有（C 1 -C 4）氟原子，R 2是具有1至12个碳原子的不可水解的有机基团（但不包括含有氟原子的有机基团），X是可水解基团，p是1或2的整数，和q是0或1的整数）和这些水解产物的缩合物，和（B）光酸产生剂，其中组合物中硅烷醇（Si-OH）基团的比例为0.1至0.5， Si。通过这样的组成，对于具有从可见光区域到近红外区域的宽范围的波长的光，波导损耗低，而且耐龟裂性，照射辐射时的图案化能力等优异。

4. 发明授权

US07366381B2 Optical waveguide chip and optical component comprising same 有权
标题翻译：光波导芯片及其组成的光学部件
公开(公告)号：US07366381B2
公开(公告)日：2008-04-29
申请号：US10550534
申请日：2004-03-26
申请人： Kentarou Tamaki , Hideaki Takase , Yuuichi Eriyama , Shinji Ohba , Hideyuki Fujiwara
发明人： Kentarou Tamaki , Hideaki Takase , Yuuichi Eriyama , Shinji Ohba , Hideyuki Fujiwara
IPC分类号： G02B6/30
CPC分类号： G02B6/1221 , G02B6/12007 , G02B6/125
摘要： An optical waveguide chip including a core portion as an optical waveguide, a clad portion composed of a lower clad layer and an upper clad layer, and an optical fiber guide portion which is formed integrally with the clad portion for positioning a single-mode optical fiber which is to be connected with the core portion. Each portion of the optical waveguide chip is formed by creating a layer of a radiation-sensitive polysiloxane composition by photolithography. At least two kinds of radiation-sensitive polysiloxane compositions are used so that the core portion has a higher refractive index than the clad portion.
摘要翻译：包括芯部作为光波导的光波导芯片，由下包层和上包层组成的包层部分以及与用于定位单模光纤的包层部分整体形成的光纤引导部分其将与芯部分连接。光波导芯片的每个部分通过光刻法形成辐射敏感性聚硅氧烷组合物层而形成。使用至少两种辐射敏感性聚硅氧烷组合物，使得芯部具有比包层部分更高的折射率。

5. 发明申请

US20070104439A1 Polymer optical waveguide and optical device 审中-公开
标题翻译：聚合物光波导和光学器件
公开(公告)号：US20070104439A1
公开(公告)日：2007-05-10
申请号：US10558299
申请日：2004-05-28
申请人： Kentarou Tamaki , Hideaki Takase , Yuuichi Eriyama
发明人： Kentarou Tamaki , Hideaki Takase , Yuuichi Eriyama
IPC分类号： G02B6/10
CPC分类号： G02B6/138 , G02B6/1221
摘要： A polymer optical waveguide of the present invention has a lower clad layer, a core layer and an upper clad layer that are provided on a substrate, and a cover member that covers at least one part of the upper clad layer. The upper clad layer and the cover member are fixed together by a radiation-curable adhesive. The cover member comprises quartz or glass. According to this polymer optical waveguide, moisture absorption through the upper clad layer can be prevented, deterioration in adhesive property to the substrate or changes in characteristics due to moisture absorption of materials can be suppressed even under severe environmental conditions, and there is no deterioration in optical characteristics between before and after reliability tests, and hence sufficient reliability can be secured, and the polymer optical waveguide has stable transmission characteristics.
摘要翻译：本发明的聚合物光波导具有设置在基板上的下覆盖层，芯层和上覆盖层以及覆盖上覆层的至少一部分的覆盖部件。上覆盖层和盖构件通过可辐射固化的粘合剂固定在一起。盖构件包括石英或玻璃。根据该聚合物光波导，即使在恶劣的环境条件下，也可以防止通过上层包层的吸湿，能够抑制由于材料的吸湿引起的对基板的粘合性的劣化或特性的变化，在可靠性测试之前和之后的光学特性，因此可以确保足够的可靠性，并且聚合物光波导具有稳定的传输特性。

6. 发明授权

US06376634B1 Composition for film formation and material for insulating film formation 有权
标题翻译：用于成膜和用于绝缘膜形成的材料的组合物
公开(公告)号：US06376634B1
公开(公告)日：2002-04-23
申请号：US09585275
申请日：2000-06-02
申请人： Michinori Nishikawa , Kinji Yamada , Mayumi Kakuta , Yasutake Inoue , Masahiko Ebisawa , Satoko Hakamatsuka , Kentarou Tamaki
发明人： Michinori Nishikawa , Kinji Yamada , Mayumi Kakuta , Yasutake Inoue , Masahiko Ebisawa , Satoko Hakamatsuka , Kentarou Tamaki
IPC分类号： C09D18304
CPC分类号： H01B3/46
摘要： A composition for film formation which is useful as an interlayer insulating film material in the production of semiconductor devices and the like, and gives a coating film having excellent uniformity, low dielectric constant, low leakage current and excellent storage stability; and a material for insulating film formation using the composition. The composition comprises (A) a product of hydrolysis and condensation obtained by hydrolyzing and condensing at least one compound selected from the group consisting of (A-1) compounds represented by the formula (1): R1aSi(OR2)4−a, and (A-2) compounds represented by the formula (2): R3b(R4O)3−bSi—(R7)d—Si(OR5)3−cR6c; and (B) a compound represented by the formula (3): R8O (CHCH3CH2O)eR9.
摘要翻译：在半导体装置等的制造中，可用作层间绝缘膜材料的成膜用组合物，得到均匀性，低介电常数，低漏电流和优异的储存稳定性的涂膜; 以及使用该组合物的成膜绝缘材料。该组合物包含（A）通过水解和缩合至少一种选自（A-1）由式（1）表示的化合物的化合物）：R1aSi（OR2）4-a和（A-2）由式（2）表示的化合物：R3b（R4O）3-bSi-（R7）d-Si（OR5）3-cR6c; 和（B）由式（3）表示的化合物：R8O（CHCH 3 CH 2 O）e R 9。

7. 发明申请

US20070014518A1 Optical waveguide chip and optical component comprising same 有权
标题翻译：光波导芯片及其组成的光学部件
公开(公告)号：US20070014518A1
公开(公告)日：2007-01-18
申请号：US10550534
申请日：2004-03-26
申请人： Kentarou Tamaki
发明人： Kentarou Tamaki
IPC分类号： G02B6/30
CPC分类号： G02B6/1221 , G02B6/12007 , G02B6/125
摘要： An optical waveguide chip including a core portion as an optical waveguide, a clad portion composed of a lower clad layer and an upper clad layer, and an optical fiber guide portion which is formed integrally with the clad portion for positioning a single-mode optical fiber which is to be connected with the core portion. Each portion of the optical waveguide chip is formed by creating a layer of a radiation-sensitive polysiloxane composition by photolithography. At least two kinds of radiation-sensitive polysiloxane compositions are used so that the core portion has a higher refractive index than the clad portion.
摘要翻译：包括芯部作为光波导的光波导芯片，由下包层和上包层组成的包层部分以及与用于定位单模光纤的包层部分整体形成的光纤引导部分其将与芯部分连接。光波导芯片的每个部分通过光刻法形成辐射敏感性聚硅氧烷组合物层而形成。使用至少两种辐射敏感性聚硅氧烷组合物，使得芯部具有比包层部分更高的折射率。

8. 发明授权

US07005231B2 Positive type radiosensitive composition and method for forming pattern 有权
标题翻译：正型放射敏感组合物和形成图案的方法
公开(公告)号：US07005231B2
公开(公告)日：2006-02-28
申请号：US10484716
申请日：2002-07-19
申请人： Kentarou Tamaki , Tomohiro Utaka , Akira Nishikawa
发明人： Kentarou Tamaki , Tomohiro Utaka , Akira Nishikawa
IPC分类号： G03C1/73 , G03F7/075 , G03F7/20 , G03F7/30 , G03F7/40
CPC分类号： G02B6/13 , G02B6/122 , G02B6/1221 , G02B6/1347 , G02B6/138 , G02B2006/12097 , G02B2006/121 , G03F7/0045 , G03F7/0755 , G03F7/0757
摘要： A positive-tone radiation-sensitive composition including: (A) at least one compound selected from the group consisting of a hydrolyzable silane compound represented by general formula (R1)pSi(X)4−p (wherein R1 is a non-hydrolyzable organic group having 1 to 12 carbon atoms, X is a hydrolyzable group, and p is an integer from 0 to 3), hydrolyzates thereof and condensates thereof; (B) a photoacid generator; and (C) a basic compound. A cured product that is excellent in terms of pattern precision and so on can be obtained by using the composition. The composition can be used as a material for forming optical waveguides.
摘要翻译：一种正音辐射敏感性组合物，其包含：（A）至少一种选自由通式（R 1）2表示的可水解硅烷化合物的化合物， Si（X）4-p（其中R 1是具有1至12个碳原子的不可水解的有机基团，X是可水解基团，p是整数 0至3），其水解产物和其缩合物; （B）光致酸发生器; 和（C）碱性化合物。通过使用该组合物可以获得在图案精度等方面优异的固化物。该组合物可以用作形成光波导的材料。

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