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    • 1. 发明授权
    • Method for producing wiring layer transfer composite
    • 生产布线层转移复合材料的方法
    • US06419149B1
    • 2002-07-16
    • US09515072
    • 2000-02-28
    • Kentaro YanoSusumu OkikawaNoboru Hanai
    • Kentaro YanoSusumu OkikawaNoboru Hanai
    • B23K2004
    • H01L21/4846B23K20/02B23K2103/12H05K3/20
    • A wiring layer transfer composite constituted by a laminate composed of a carrier layer, a barrier layer and a wiring-forming layer, the barrier layer being a continuous layer substantially free from defects, can be produced by (a) preparing a first Cu-based metal foil having an average thickness of 50 &mgr;m or less and an average surface roughness Rz of 5 &mgr;m or less in both surfaces for the carrier layer; (b) preparing a second Cu-based metal foil having an average thickness of 20 &mgr;m or less and an average surface roughness Rz of 5 &mgr;m or less in both surfaces for the wiring-forming layer; (c) vapor-depositing a metal having different etchability from that of Cu onto at least one of the first metal foil and the second metal foil to form the barrier layer having an average thickness of 1 &mgr;m or less; and (b) pressure-welding both metal foils via the barrier layer.
    • 由通过载体层,阻挡层和布线形成层构成的层叠体构成的布线层转印复合体可以通过(a)制备基本上不含Cu的第一Cu基 在载体层的两个表面中平均厚度为50μm以下,平均表面粗糙度Rz为5μm以下的金属箔; (b)在布线形成层的两个表面上制备平均厚度为20μm以下且平均表面粗糙度Rz为5μm以下的第2 Cu系金属箔; (c)将具有与Cu的不同蚀刻性的金属气相沉积到第一金属箔和第二金属箔中的至少一个上,以形成平均厚度为1μm或更小的阻挡层; 和(b)经由阻挡层对两个金属箔进行加压焊接。
    • 3. 发明授权
    • Method for refining molten metal and apparatus for same
    • 冶炼金属的方法及其设备
    • US5753004A
    • 1998-05-19
    • US586871
    • 1996-01-24
    • Noboru HanaiKokichi MikutsuTamiya KishidaMitsuru SuzukiKatsumi KanamotoTakashi MukaiIwao KashiwagiKenji Tokuda
    • Noboru HanaiKokichi MikutsuTamiya KishidaMitsuru SuzukiKatsumi KanamotoTakashi MukaiIwao KashiwagiKenji Tokuda
    • C21C7/10C22B9/05C21B11/10
    • C21C7/10C22B9/05
    • A method of refining molten metal includes the steps of reduced-pressure-refining molten metal in a heated vessel, adding slag-forming agents into the refined molten metal while keeping the molten metal in the vessel, or after pouring the molten metal into another vessel, re-refining the molten metal by heating the molten metal with inert-gas plasma and while stirring the molten metal as occasion demands. Preferably, the refining apparatus includes two adjacent chambers, each chamber isolated from the surrounding atmosphere. The chambers can be connected with, or separated from, each other and each chamber is provided with an exhaust device. One of the chambers is provided with an induction heating refining furnace, and the other chamber is provided with inert gas plasma heater. The apparatus also includes a re-refining vessel which is transferable between the two chambers, and a material feeder for feeding slag-forming agents into the re-refining vessel.
    • PCT No.PCT / JP94 / 02268 Sec。 371日期:1996年1月24日 102(e)日期1996年1月24日PCT 1994年12月27日PCT公布。 公开号WO95 / 32312 PCT 日期:1995年11月30日精炼熔融金属的方法包括在加热容器中减压精炼熔融金属的步骤,将熔渣形成剂添加到精炼的熔融金属中,同时将熔融金属保持在容器中, 熔融金属进入另一个容器,通过用惰性气体等离子体加热熔融金属并根据需要搅拌熔融金属来重新精炼熔融金属。 优选地,精炼装置包括两个相邻的室,每个室与周围大气隔离。 室可以彼此连接或彼此分离,并且每个室设置有排气装置。 其中一个室设有感应加热精炼炉,另一个室设有惰性气体等离子体加热器。 该设备还包括可在两个室之间转移的再精炼容器和用于将成渣剂进料到再精炼容器中的料料供料器。
    • 5. 发明授权
    • Method of producing high-grade metal or alloy powder
    • 生产高档金属或合金粉末的方法
    • US4474604A
    • 1984-10-02
    • US490044
    • 1983-04-29
    • Hideki NakamuraTakashi MeguroNoboru Hanai
    • Hideki NakamuraTakashi MeguroNoboru Hanai
    • B22F9/10B22F9/14C25C5/00B01J2/02
    • B22F9/10B22F9/14
    • A method of producing high-grade metal or alloy powder, improved to eliminate undesirable inclusions and to reduce the production cost. A solid electrode material made of a metal or alloy, having a composition substantially equal to the composition of aimed metal or alloy powder, is heated and molten in a vacuum chamber by application of a plasma, arc, electron beam or laser beam. The molten metal or alloy in the form of droplets fall into collision with the surface of a roll rotating at a high speed so as to be pulverized and partially solidified. The particles of the metal or alloy scattered by the roll is directed to one side of the roll and are spheroidized and solidified into fine particles before they are collected in a collecting box disposed at one side of the roll within the vacuum chamber.
    • 一种生产高级金属或合金粉末的方法,改进以消除不期望的夹杂物并降低生产成本。 由金属或合金制成的固体电极材料,具有基本上等于目标金属或合金粉末的组成的组成,通过施加等离子体,电弧,电子束或激光束在真空室中加热和熔融。 液滴形式的熔融金属或合金与高速旋转的辊的表面碰撞,从而被粉碎和部分固化。 由辊散布的金属或合金的颗粒被引导到辊的一侧,并且在它们被收集在设置在真空室内的辊的一侧的收集箱中之前被球化并固化成细颗粒。