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    • 8. 发明授权
    • Film formation process
    • 成膜过程
    • US4910041A
    • 1990-03-20
    • US242263
    • 1988-09-09
    • Kenji YanagiharaMituo KimuraHitoshi ChawanyaKoshi Numata
    • Kenji YanagiharaMituo KimuraHitoshi ChawanyaKoshi Numata
    • C23C16/511H01J37/32
    • H01J37/32009C23C16/511
    • A process of forming a film on a substrate, which comprises bringing a substrate into contact with a plasma zone formed by generating, by use of a discharge electrode or discharge electrodes, high temperature or quasi-high temperature plasma of a gas containing at least one carbon containing compound,wherein said electrode comprises a sheet-like electrode provided with a slit having a linear portion and connected to a microwave electric source; orwherein said plasma zone is formed by forcing a high temperature or quasi-high temperature plasma generated in an arc between said electrodes by DC discharge, to move by applying a magnetic field. The process enables formation of films on substrate surfaces in a high energy efficiency.
    • 一种在基板上形成膜的工艺,其包括使基板与通过使用放电电极或放电电极产生的等离子体区形成的含有至少一个的气体的高温或准高温等离子体接触 含碳化合物,其中所述电极包括具有直线部分并连接到微波电源的狭缝的片状电极; 或者其中所述等离子体区域是通过强迫通过DC放电在所述电极之间的电弧中产生的高温或准高温等离子体而形成的,以通过施加磁场来移动。 该方法能够以高能量效率在衬底表面上形成膜。
    • 10. 发明授权
    • Heat exchanger
    • 热交换器
    • US5400854A
    • 1995-03-28
    • US205869
    • 1994-03-03
    • Masatoshi IioMituo Kimura
    • Masatoshi IioMituo Kimura
    • F28D9/02F28D9/00F28F3/08F28F9/00F28F27/02F28D7/10
    • F28F9/0268F28D9/0043F28F9/001F28F2235/00F28F2240/00
    • A heat exchanger of a brazed-plate-fine type and a counter-flow type consists of a plurality of tube elements which define first-fluid flowing spaces while inner fins are disposed in the spaces, respectively. The tube elements are alternately laminated with a plurality of outer fins, and the laminated elements and fins are surrounded by a housing for constituting a second-fluid flowing space. A first-fluid inlet port and a first-fluid outlet ports are formed so as to outwardly project from a lateral side of the outer fin. The housing is formed to have curved portions conforming with projecting outer peripheries of the inlet and outlet ports. Accordingly, the heat transmission efficiency of the heat exchanger is improved.
    • 钎焊板精细型和逆流式热交换器由多个管状元件组成,分别限定第一流体流动空间,同时内部翅片设置在空间中。 管元件交替地层叠有多个外翅片,并且层叠元件和翅片被构成第二流体流动空间的壳体包围。 第一流体入口和第一流体出口形成为从外翅片的外侧向外突出。 壳体形成为具有与入口和出口端口的突出外周相一致的弯曲部分。 因此,热交换器的传热效率提高。