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1. 发明申请

US20050257746A1 Clamp member, film deposition apparatus, film deposition method, and semiconductor device manufacturing method 审中-公开
标题翻译：夹持部件，成膜装置，成膜方法以及半导体装置的制造方法
公开(公告)号：US20050257746A1
公开(公告)日：2005-11-24
申请号：US11133452
申请日：2005-05-20
申请人： Kenji Shirakawa , Nobuhiro Nishizaki , Kohichi Sekiya , Kazuo Iwami , Masato Toyota
发明人： Kenji Shirakawa , Nobuhiro Nishizaki , Kohichi Sekiya , Kazuo Iwami , Masato Toyota
IPC分类号： C23C14/50 , C23C16/00 , H01L21/68 , H01L21/683 , H01L21/687
CPC分类号： H01L21/68728 , C23C14/50
摘要： A clamp member capable of reliably releasing sticking to a substrate with a simple structure, a film deposition apparatus and method, and a semiconductor device manufacturing method using the clamp member are provided. A clamp ring includes an inner flange portion, a rotating shaft arranged at the inner flange portion, and a rotating member. The rotating member is rotatable about the rotating shaft, and has front and rear end portions. The rotating member is arranged such that the front end portion is positioned to face a part of the wafer with a space therebetween when the inner flange portion is holding the wafer. When the rear end portion is pressed against the inner flange portion, the rotating member rotates about the rotating shaft, and thus, the front end portion can press the part of the wafer in a direction away from the inner flange portion.
摘要翻译：提供能够以简单的结构可靠地释放粘附到基板上的夹紧构件，成膜装置和方法以及使用该夹紧构件的半导体器件的制造方法。夹环包括内凸缘部分，布置在内凸缘部分的旋转轴和旋转构件。旋转构件能够围绕旋转轴旋转，并具有前端部和后端部。旋转构件布置成使得当内凸缘部分保持晶片时，前端部分定位成面对晶片的一部分，其间具有间隔。当后端部被压靠在内凸缘部分上时，旋转构件围绕旋转轴旋转，因此前端部可以沿远离内凸缘部分的方向按压晶片的一部分。

2. 发明授权

US07353404B2 Tamper resistant microprocessor 失效
标题翻译：防篡改微处理器
公开(公告)号：US07353404B2
公开(公告)日：2008-04-01
申请号：US11071327
申请日：2005-03-04
申请人： Mikio Hashimoto , Keiichi Teramoto , Takeshi Saito , Kenji Shirakawa , Kensaku Fujimoto
发明人： Mikio Hashimoto , Keiichi Teramoto , Takeshi Saito , Kenji Shirakawa , Kensaku Fujimoto
IPC分类号： G06F21/00
CPC分类号： G06F21/10 , G06F21/123 , G06F21/72 , G06F2221/0797
摘要： Under a multi-task environment, a tamper resistant microprocessor saves a context information for one program whose execution is to be interrupted, where the context information contains information indicating an execution state of that one program and the execution code encryption key of that one program. An execution of that one program can be restarted by recovering the execution state of that one program from the saved context information. The context information can be encrypted by using the public key of the microprocessor, and then decrypted by using the secret key of the microprocessor.
摘要翻译：在多任务环境中，防篡改微处理器为执行中断的一个程序保存上下文信息，其中上下文信息包含指示该一个程序的执行状态的信息和该一个程序的执行代码加密密钥。可以通过从保存的上下文信息中恢复该一个程序的执行状态来重新启动该一个程序的执行。可以通过使用微处理器的公钥来加密上下文信息，然后使用微处理器的密钥进行解密。

3. 发明授权

US06287980B1 Plasma processing method and plasma processing apparatus 失效
标题翻译：等离子体处理方法和等离子体处理装置
公开(公告)号：US06287980B1
公开(公告)日：2001-09-11
申请号：US09415910
申请日：1999-10-12
申请人： Minoru Hanazaki , Takayuki Ikushima , Kenji Shirakawa , Shinji Yamaguchi , Masakazu Taki
发明人： Minoru Hanazaki , Takayuki Ikushima , Kenji Shirakawa , Shinji Yamaguchi , Masakazu Taki
IPC分类号： H01L2100
CPC分类号： H01L21/67069 , H01J37/3244
摘要： A plasma processing apparatus mainly comprises a processing chamber (10) formed by a vacuum vessel, a magnetic field forming coil (80) arranged around the processing chamber for forming a rotating magnetic field and gas supply means (101) supplying various gases to the processing chamber (10). The processing chamber (10) is divided into a reaction chamber (44) forming plasma with a partition wall (43) and a buffer chamber (45) discharging externally supplied gases with pressure difference. The reaction chamber (44) includes a high-frequency electrode arranged oppositely to the buffer chamber (45). The gas supply means (101) includes pulse gas valves (63a and 63b) for pulsatively supplying gases to the processing chamber (10). Thus provided are a plasma processing method and a plasma processing apparatus capable of uniformly processing a wafer having a large diameter and reducing RIE lag with respect to a fine etching pattern.
摘要翻译：一种等离子体处理装置主要包括由真空容器形成的处理室（10），设置在处理室周围的用于形成旋转磁场的磁场形成线圈（80），以及将各种气体供应至处理的气体供给装置室（10）。处理室（10）被分为形成等离子体的反应室（44）和分隔壁（43）以及缓冲室（45），该压力室排出外部供应压力差的气体。反应室（44）包括与缓冲室（45）相对布置的高频电极。气体供给装置（101）包括用于向处理室（10）脉动地供给气体的脉冲气体阀（63a和63b）。这样提供了一种等离子体处理方法和等离子体处理装置，其能够均匀地处理具有大直径的晶片并且相对于精细蚀刻图案减小RIE滞后。

4. 发明授权

US5269881A Plasma processing apparatus and plasma cleaning method 失效
标题翻译：等离子体处理装置和等离子体清洗方法
公开(公告)号：US5269881A
公开(公告)日：1993-12-14
申请号：US934828
申请日：1992-08-25
申请人： Hidenori Sekiya , Kenji Shirakawa
发明人： Hidenori Sekiya , Kenji Shirakawa
IPC分类号： C23C14/02 , B08B7/00 , C23C14/00 , C23C16/44 , C23G5/00 , H01J37/32 , H01L21/302 , H01L21/3065 , H01L21/306 , B44C1/22 , C23F1/00
CPC分类号： H01J37/32862 , B08B7/0035 , C23C16/4405 , C23G5/00 , H01J37/32082
摘要： There are disclosed apparatus and method for eliminating, by plasma cleaning, reaction products which are generated by etching and stick to an inner wall surface of a chamber. First to third conductive blocks (90a to 90c) are mounted on the inner wall surface of the chamber (50) through an insulator (92). A high-frequency electric field is applied sequentially between a first electrode (61) and the respective conductive blocks (90a to 90c) while a reactive gas is introduced into an internal space (51) of the chamber (50), to produce a plasma of the reactive gas. The reaction products which stick to the respective conductive blocks (90a to 90c) are sequentially gasified by the plasma of the reactive gas and exhausted to the outside of the chamber (50) to be eliminated.
摘要翻译：公开了通过等离子体清洗来消除通过蚀刻并粘附到室的内壁表面产生的反应产物的装置和方法。第一至第三导电块（90a至90c）通过绝缘体（92）安装在腔室（50）的内壁表面上。在第一电极（61）和各个导电块（90a〜90c）之间依次施加高频电场，同时将反应性气体引入到室（50）的内部空间（51）中，以产生等离子体的反应气体。粘附于各个导电块（90a〜90c）的反应产物依次被反应气体的等离子体气化并排出到室（50）的外部，以消除。

5. 发明授权

US07065215B2 Microprocessor with program and data protection function under multi-task environment 失效
公开(公告)号：US07065215B2
公开(公告)日：2006-06-20
申请号：US09984407
申请日：2001-10-30
申请人： Kenji Shirakawa , Mikio Hashimoto , Keiichi Teramoto , Satoshi Ozaki , Kensaku Fujimoto
发明人： Kenji Shirakawa , Mikio Hashimoto , Keiichi Teramoto , Satoshi Ozaki , Kensaku Fujimoto
IPC分类号： G06F17/00
CPC分类号： G06F21/71 , G06F2221/2105
摘要： In a microprocessor, a program key for decrypting a program and a data key for encrypting/decrypting data processed by the program are handled as cryptographically inseparable pair inside the microprocessor, so that it becomes possible for the microprocessor to protect processes that actually execute the program, without an intervention of the operating system, and it becomes possible to conceal secret information of the program not only from the other user program but also from the operating system.

6. 发明申请

US20050030949A1 Fast and adaptive packet processing device and method using digest information of input packet 审中-公开
公开(公告)号：US20050030949A1
公开(公告)日：2005-02-10
申请号：US10934460
申请日：2004-09-07
申请人： Kenji Shirakawa , Yasuro Shobatake , Toshio Okamoto , Yoshimitsu Shimojo
发明人： Kenji Shirakawa , Yasuro Shobatake , Toshio Okamoto , Yoshimitsu Shimojo
IPC分类号： G06F9/22 , G06F9/28 , G06F15/16 , H04L12/70 , H04L29/06 , H04L12/28
CPC分类号： H04L45/00 , H04L29/06 , H04L45/566 , H04L69/22
摘要： A packet processing device is formed by a digest information generation unit configured to extract a plurality of prescribed bit sequences from an input packet, and generate a digest information capable of specifying at least a part of a processing to be applied to the input packet, according to values of the plurality of prescribed bit sequences; and a packet processing unit configured to process the input packet using an instruction sequence to be applied to the input packet that is obtained according to the digest information generated by the digest information generation unit, where the digest information generation unit generates the digest information with respect to a next input packet while the packet processing unit carries out a processing for one packet.

7. 发明授权

US5236549A Process for plasma etching 失效
标题翻译：等离子体蚀刻过程
公开(公告)号：US5236549A
公开(公告)日：1993-08-17
申请号：US757364
申请日：1991-09-10
申请人： Kenji Shirakawa , Hidenori Sekiya
发明人： Kenji Shirakawa , Hidenori Sekiya
IPC分类号： H01L21/302 , H01L21/3065 , H01L21/3213
CPC分类号： H01L21/32136 , H01L21/32139
摘要： Plasma is produced continuously in an etching switching period for switching from a partial plasma etching process to the next partial plasma etching process to thereby proceed with anisotropic plasma etching even in the etching switching period. There is no period in which isotropic etching is performed throughout the process. The time period for executing the partial plasma etching process, which follows the etching switching period, is shortened while throughput is improved.
摘要翻译：在蚀刻切换期间连续地制造等离子体，用于从部分等离子体蚀刻工艺切换到下一部分等离子体蚀刻工艺，从而即使在蚀刻切换期间也进行各向异性等离子体蚀刻。在整个过程中不存在各向同性蚀刻的周期。用于执行蚀刻切换周期之后的部分等离子体蚀刻处理的时间段被缩短，同时提高了吞吐量。

8. 发明授权

US07219369B2 Internal memory type tamper resistant microprocessor with secret protection function 有权
标题翻译：内部存储型防篡改微处理器具有秘密保护功能
公开(公告)号：US07219369B2
公开(公告)日：2007-05-15
申请号：US10391618
申请日：2003-03-20
申请人： Mikio Hashimoto , Kensaku Yamaguchi , Kenji Shirakawa , Kensaku Fujimoto
发明人： Mikio Hashimoto , Kensaku Yamaguchi , Kenji Shirakawa , Kensaku Fujimoto
IPC分类号： G06F21/22 , G06F12/14
CPC分类号： G06F12/1466 , G06F12/1475
摘要： In an inner memory type tamper resistant microprocessor, a requested secret protection attribute requested for each access target memory page by a task is set and stored exclusively from other tasks, at a time of reading a program into memory pages and executing the program as the task, and a memory secret protection attribute is set and stored for each access target memory page by the task, at a time of executing the task. Then, an access to each access target memory page is refused when the requested secret protection attribute for each access target memory page and the memory secret protection attribute for each access target memory page do not coincide.
摘要翻译：在内部存储器型防篡改微处理器中，在将程序读入存储器页面并执行程序作为任务时，由任务专门为每个访问目标存储器页面请求的请求秘密保护属性被设置和独占地从其他任务中存储并且在执行任务时由任务设置并存储每个访问目标存储器页面的存储器秘密保护属性。然后，当针对每个访问目标存储器页面的请求的秘密保护属性和每个访问目标存储器页面的存储器秘密保护属性不一致时，对每个访问目标存储器页面的访问被拒绝。

9. 发明申请

US20060126849A1 Microprocessor with program and data protection function under multi-task environment 失效
公开(公告)号：US20060126849A1
公开(公告)日：2006-06-15
申请号：US11335601
申请日：2006-01-20
申请人： Kenji Shirakawa , Mikio Hashimoto , Keiichi Teramoto , Satoshi Ozaki , Kensaku Fujimoto
发明人： Kenji Shirakawa , Mikio Hashimoto , Keiichi Teramoto , Satoshi Ozaki , Kensaku Fujimoto
IPC分类号： H04L9/00
CPC分类号： G06F21/71 , G06F2221/2105
摘要： In a microprocessor, a program key for decrypting a program and a data key for encrypting/decrypting data processed by the program are handled as cryptographically inseparable pair inside the microprocessor, so that it becomes possible for the microprocessor to protect processes that actually execute the program, without an intervention of the operating system, and it becomes possible to conceal secret information of the program not only from the other user program but also from the operating system.

10. 发明申请

US20050166069A1 Tamper resistant microprocessor 失效
标题翻译：防篡改微处理器
公开(公告)号：US20050166069A1
公开(公告)日：2005-07-28
申请号：US11071327
申请日：2005-03-04
申请人： Mikio Hashimoto , Keiichi Teramoto , Takeshi Saito , Kenji Shirakawa , Kensaku Fujimoto
发明人： Mikio Hashimoto , Keiichi Teramoto , Takeshi Saito , Kenji Shirakawa , Kensaku Fujimoto
IPC分类号： G06F15/00 , G06F1/00 , G06F15/16 , G06F21/10 , G06F21/12 , G06F21/72 , H04L9/32
CPC分类号： G06F21/10 , G06F21/123 , G06F21/72 , G06F2221/0797
摘要： Under a multi-task environment, a tamper resistant microprocessor saves a context information for one program whose execution is to be interrupted, where the context information contains information indicating an execution state of that one program and the execution code encryption key of that one program. An execution of that one program can be restarted by recovering the execution state of that one program from the saved context information. The context information can be encrypted by using the public key of the microprocessor, and then decrypted by using the secret key of the microprocessor.
摘要翻译：在多任务环境中，防篡改微处理器为执行中断的一个程序保存上下文信息，其中上下文信息包含指示该一个程序的执行状态的信息和该一个程序的执行代码加密密钥。可以通过从保存的上下文信息中恢复该一个程序的执行状态来重新启动该一个程序的执行。可以通过使用微处理器的公钥来加密上下文信息，然后使用微处理器的密钥进行解密。

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