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    • 1. 发明申请
    • DRESSING JIG FOR GLASS SUBSTRATE POLISHING PAD
    • 玻璃衬垫抛光垫
    • US20110117822A1
    • 2011-05-19
    • US12946290
    • 2010-11-15
    • Kenichiro TERADAKazuo MannamiMinoru Tamada
    • Kenichiro TERADAKazuo MannamiMinoru Tamada
    • B24B1/00B24B47/26
    • B24B53/017B24B7/228
    • Dressing treatment of a polishing pad, adjusting a polishing surface of the polishing pad to given flatness and surface roughness without deteriorating productivity, a method for polishing a glass substrate, including polishing a main surface of a glass substrate using the polishing pad adjusted by the dressing treatment, and a method for manufacturing a glass substrate using the polishing method are provided. A dressing jig having arithmetic surface roughness on a surface performing dressing treatment of from 0.10 μm to 2.5 μm is used as the dressing jig for adjusting a polishing surface of the polishing pad to given flatness and surface roughness. A main surface of the glass substrate is polished with the polishing surface of the polishing pad having been subjected to a dressing treatment using the dressing jig.
    • 抛光垫的修整处理,将抛光垫的抛光表面调整到给定的平坦度和表面粗糙度而不降低生产率;玻璃基板的抛光方法,包括使用由敷料调节的抛光垫来研磨玻璃基板的主表面 提供了使用该研磨方法制造玻璃基板的方法。 使用在0.10μm〜2.5μm的修整处理的表面上具有算术表面粗糙度的修整夹具作为调整抛光垫的研磨面的修整夹具,使其具有平坦度和表面粗糙度。 使用修整夹具对抛光垫的研磨面进行了修整处理,研磨玻璃基板的主表面。