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    • 1. 发明申请
    • METHOD FOR MANUFACTURING DIFFRACTIVE OPTICAL ELEMENT
    • 制造衍射光学元件的方法
    • US20110011831A1
    • 2011-01-20
    • US12922647
    • 2009-11-13
    • Kenichi KurisuHideaki Imamura
    • Kenichi KurisuHideaki Imamura
    • C23F1/00
    • G02B5/1857
    • There is provided a method for manufacturing a diffractive optical element that can suppress the generation of heat from the inside of an insulative substrate and stabilize an etching rate. A method for manufacturing a diffractive optical element composed of an insulative substrate whose surface has a bumpy structure includes a selecting step of selecting an insulative substrate having an electrical resistivity equal to or higher than a certain value by measuring electrical resistivity of insulative substrates; and an etching step of forming a bumpy structure by dry etching in a surface of the insulative substrate selected in the selecting step.
    • 提供了一种制造衍射光学元件的方法,该衍射光学元件可以抑制从绝缘衬底的内部产生热量并使蚀刻速率稳定。 由表面具有颠簸结构的绝缘性基板构成的衍射光学元件的制造方法包括通过测定绝缘基板的电阻率来选择具有等于或大于某一值的电阻率的绝缘基板的选择步骤; 以及蚀刻步骤,通过在选择步骤中选择的绝缘性基板的表面上通过干蚀刻形成凹凸结构。
    • 2. 发明授权
    • Method for manufacturing diffractive optical element
    • 衍射光学元件的制造方法
    • US08404136B2
    • 2013-03-26
    • US12922647
    • 2009-11-13
    • Kenichi KurisuHideaki Imamura
    • Kenichi KurisuHideaki Imamura
    • C23F1/00B44C1/22
    • G02B5/1857
    • There is provided a method for manufacturing a diffractive optical element that can suppress the generation of heat from the inside of an insulative substrate and stabilize an etching rate. A method for manufacturing a diffractive optical element composed of an insulative substrate whose surface has a bumpy structure includes a selecting step of selecting an insulative substrate having an electrical resistivity equal to or higher than a certain value by measuring electrical resistivity of insulative substrates; and an etching step of forming a bumpy structure by dry etching in a surface of the insulative substrate selected in the selecting step.
    • 提供了一种制造衍射光学元件的方法,该衍射光学元件可以抑制从绝缘衬底的内部产生热量并使蚀刻速率稳定。 由表面具有颠簸结构的绝缘性基板构成的衍射光学元件的制造方法包括通过测定绝缘基板的电阻率来选择具有等于或大于某一值的电阻率的绝缘基板的选择步骤; 以及蚀刻步骤,通过在选择步骤中选择的绝缘性基板的表面上通过干蚀刻形成凹凸结构。