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1. 发明申请

US20080285107A1 Electromagnetically actuating optical deflecting element 有权
标题翻译：电磁致动光学偏转元件
公开(公告)号：US20080285107A1
公开(公告)日：2008-11-20
申请号：US11890608
申请日：2007-08-07
申请人： Norihiro Asada , Kenichi Kagawa
发明人： Norihiro Asada , Kenichi Kagawa
IPC分类号： G02B26/08
CPC分类号： G02B26/085
摘要： The present invention provides an electromagnetically actuating optical deflecting elements which can be manufactured out of reduced number of components and are capable of being actuated at lower frequencies and at wider deflecting angles without causing mechanical influences of the metal wiring on beams of the optical deflecting element.For that purpose, the electromagnetically actuating optical deflecting element comprises: a movable part having a light reflecting plane and a coil; a base component having a magnetic field generating means; and a pair of beams which axially support said movable part on to the base component, The movable part is actuated by an electromagnetic force generated by an electric current flowing through the coil and the magnetic field generating means. The beams 108 are constituted by one material having functions to perform as conductors for supplying electric current to the coil, to support the movable part, to perform as springs for returning the movable part to a starting position.
摘要翻译：本发明提供了一种电磁致动的光学偏转元件，其可以由数量较少的部件制造，并且能够以较低的频率和较宽的偏转角度被致动，而不会引起金属布线对光学偏转元件的光束的机械影响。为此，电磁致动光学偏转元件包括：具有光反射面和线圈的可动部; 具有磁场发生装置的基座部件; 以及一对梁，其将所述可动部件轴向地支撑在基部部件上。可动部分由通过线圈和磁场产生装置的电流产生的电磁力致动。梁108由具有作为向线圈提供电流的导体的功能的一种材料构成，以支撑可移动部分，作为将可动部分返回到起始位置的弹簧来执行。

2. 发明授权

US07869108B2 Electromagnetically actuated device 有权
标题翻译：电磁驱动装置
公开(公告)号：US07869108B2
公开(公告)日：2011-01-11
申请号：US11890608
申请日：2007-08-07
申请人： Norihiro Asada , Kenichi Kagawa
发明人： Norihiro Asada , Kenichi Kagawa
IPC分类号： G02B26/08
CPC分类号： G02B26/085
摘要： The present invention provides an electromagnetically actuating optical deflecting elements which can be manufactured out of reduced number of components and are capable of being actuated at lower frequencies and at wider deflecting angles without causing mechanical influences of the metal wiring on beams of the optical deflecting element.For that purpose, the electromagnetically actuating optical deflecting element comprises: a movable part having a light reflecting plane and a coil; a base component having a magnetic field generating means; and a pair of beams which axially support said movable part on to the base component, The movable part is actuated by an electromagnetic force generated by an electric current flowing through the coil and the magnetic field generating means. The beams 108 are constituted by one material having functions to perform as conductors for supplying electric current to the coil, to support the movable part, to perform as springs for returning the movable part to a starting position.
摘要翻译：本发明提供了一种电磁致动的光学偏转元件，其可以由数量较少的部件制造，并且能够以较低的频率和较宽的偏转角度被致动，而不会引起金属布线对光学偏转元件的光束的机械影响。为此，电磁致动光学偏转元件包括：具有光反射面和线圈的可动部; 具有磁场发生装置的基座部件; 以及一对梁，其将所述可动部件轴向地支撑在基部部件上。可动部分由通过线圈和磁场产生装置的电流产生的电磁力致动。梁108由具有作为向线圈提供电流的导体的功能的一种材料构成，以支撑可移动部分，作为将可动部分返回到起始位置的弹簧来执行。

3. 发明申请

US20090122379A1 Optical Deflecting Element 审中-公开
标题翻译：光学偏转元件
公开(公告)号：US20090122379A1
公开(公告)日：2009-05-14
申请号：US11920820
申请日：2006-05-18
申请人： Kenichi Kagawa , Norihiro Asada
发明人： Kenichi Kagawa , Norihiro Asada
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B26/105
摘要： The present invention can provide a downsized optical deflecting element having less operating fluctuations at low cost and further it can be actuated at lower frequencies and at wider deflecting angles. The optical deflecting element comprises a base component having magnets therein; a soft resin component comprising a fixed part adhered to the base component and a movable part having a coil therein supported by the fixed part via a pair of beams; and a reflector plate 3 adhered on to the movable part. The soft resin component consists of a first insulating resin part 2-1 and second conductive resin part 2-2 for electrical wiring.
摘要翻译：本发明可以以低成本提供具有较少工作波动的小尺寸的光学偏转元件，并且还可以在较低频率和较宽的偏转角度下被致动。光学偏转元件包括其中具有磁体的基座部件; 软树脂部件，其包括固定部分，所述固定部分粘附到所述基部部件;以及可移动部件，其具有线圈，所述可动部分经由所述一对梁由所述固定部分支撑; 以及附着在可动部上的反射板3。软树脂部件由用于电线的第一绝缘树脂部分2-1和第二导电树脂部分2-2组成。

4. 发明授权

US5883382A Photo-detecting device having optical axis orienting variable direction 失效
标题翻译：具有光轴定向可变方向的光电检测装置
公开(公告)号：US5883382A
公开(公告)日：1999-03-16
申请号：US941695
申请日：1997-10-01
申请人： Norihiro Asada
发明人： Norihiro Asada
IPC分类号： G01J1/04 , G02B26/08 , H01J40/14
CPC分类号： G01J1/04 , G01J1/0403 , G02B26/085 , G01J1/0204 , G01J1/0266
摘要： A movable plate 5 and torsion bars 6 are monolithically formed in a semiconductor substrate 2. A flat coil 7 is formed on peripheries of the movable plate 5 while a photodiode 8 is formed on a central portion of the movable plate 5. Permanent magnets 10A, 10B, 11A and 11B are provided on upper and lower spaces of the peripheries of the movable plate 5 while coils 12A and 12B for detecting a displacement angle of the movable plate 5 are provided on lower spaces of the peripheries of the movable plate 5. Flowing a current into the flat coil 7 generates a driving force depending on a relation with magnetic fields induced by the permanent magnets 10A, 10B, 11A and 11B, which makes the movable plate 5 to rotate axially around the torsion bars 6 to vary an orienting direction of an optical axis of the photodiode 8. The displacement angle of the optical axis is detectable by changes in mutual inductances between the flat coil 7 and the detection coils 12A and 12B, namely, changes in induction voltages of the detection coils 12A and 12B.
摘要翻译：可移动板5和扭力杆6在半导体衬底2中单片地形成。在可移动板5的中心部分形成光电二极管8的同时，在可动板5的周边形成有平面线圈7.永磁体10A， 10B，11A和11B设置在可移动板5的周边的上部和下部空间中，而用于检测可动板5的位移角度的线圈12A和12B设置在可动板5的周边的下部空间上。流动进入扁平线圈7的电流产生取决于与由永磁体10A，10B，11A和11B引起的磁场的关系的驱动力，这使得可动板5围绕扭杆6轴向旋转以改变定向方向光轴的光轴的位移角可以通过扁平线圈7和检测线圈12A和12B之间的互感的变化来检测，即感应变化检测线圈12A和12B的电压。

5. 发明授权

US5872496A Planar type electromagnetic relay and method of manufacturing thereof 失效
标题翻译：平面型电磁继电器及其制造方法
公开(公告)号：US5872496A
公开(公告)日：1999-02-16
申请号：US505321
申请日：1995-11-01
申请人： Norihiro Asada , Masayoshi Esashi
发明人： Norihiro Asada , Masayoshi Esashi
IPC分类号： H01H49/00 , B81B3/00 , B81C1/00 , H01H1/20 , H01H50/00 , H01H51/22 , H01H51/24
CPC分类号： H01H50/005 , H01H1/20 , H01H2050/007 , H01H2050/025 , H01H2059/0054
摘要： A slim-type small size electromagnetic relay is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 formed integrally therewith, with a planar coil 7 provided on an upper face of the movable plate 5 and a movable contact 9 provided on a lower face. Glass substrates 3, 4 are provided on upper and lower faces of the silicon substrate 2, with fixed contact 11 contactable with the movable contact 9 provided on the lower glass substrate 4. Permanent magnets 13A, 13B and 14A, 14B for producing a magnetic field at the planar coil 7 are fixed to the glass substrates 3, 4. Rotation of the movable plate 5 against the torsion force of the torsion bar 6 is controlled by passing a current through the planar coil 7 to produce a magnetic force, thereby causing contact or separation of the movable contact 9 and the fixed contact 11.
摘要翻译： PCT No.PCT / JP94 / 02063 Sec。 371日期：1995年11月1日 102（e）1995年11月1日PCT PCT 1994年12月8日PCT公布。公开号WO95 / 17760 PCT 日期：1995年6月29日使用半导体制造技术制造薄型小型电磁继电器，以形成具有平面可动板5和用于轴向支撑与其一体形成的可动板5的扭杆6的硅基板2，设置在可动板5的上表面上的线圈7和设置在下表面上的可动触点9。玻璃基板3,4设置在硅基板2的上表面和下表面上，固定触点11与设置在下玻璃基板4上的可动触头9接触。用于产生磁场的永磁体13A，13B和14A，14B 在平面线圈7处固定在玻璃基板3,4上。通过使电流通过平面线圈7产生磁力来控制可动板5与扭杆6的扭转力的旋转，从而形成接触或分离可动触点9和固定触点11。

6. 发明授权

US07442560B2 Method for manufacturing anisotropic conductive sheet 失效
标题翻译：各向异性导电片的制造方法
公开(公告)号：US07442560B2
公开(公告)日：2008-10-28
申请号：US10581852
申请日：2004-11-30
申请人： Norihiro Asada
发明人： Norihiro Asada
IPC分类号： G01R31/26
CPC分类号： H01R13/2414 , H01R13/035
摘要： In order to provide an anisotropic conductive sheet which can be applied to more finely and more narrowly pitched electrodes and also to provide spring electrodes applied for the anisotropic conductive sheet, the spring electrodes manufactured as follows. A part having a bending leaf spring shape is formed out of a monocrystal silicon by anisotropic etching and gold is plated on the surface of the part so as to obtain a silicon spring electrode 1. The silicon spring electrodes 1 are inserted in through holes formed on a silicone rubber sheet and fixed to the through holes.
摘要翻译：为了提供可应用于更精细和更窄的俯仰电极并且还提供用于各向异性导电片的弹簧电极的各向异性导电片，如下制造的弹簧电极。通过各向异性蚀刻由单晶硅形成具有弯曲板簧形状的部分，并且在部件的表面上镀金，以获得硅弹簧电极1。硅弹簧电极1插入形成在硅橡胶片上的通孔中并固定到通孔。

7. 发明授权

US06246503B1 Optical barrier apparatus 失效
标题翻译：光屏障装置
公开(公告)号：US06246503B1
公开(公告)日：2001-06-12
申请号：US09538415
申请日：2000-03-30
申请人： Norihiro Asada , Koichi Futsuhara
发明人： Norihiro Asada , Koichi Futsuhara
IPC分类号： G02B2608
CPC分类号： G01V8/10 , G01V8/12 , G01V8/20 , G01V8/26
摘要： A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle introduces into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.
摘要翻译：从激光束产生装置201产生的激光束被反射在半导体反射镜检流计102上。被检查的区域105被反射的激光束106扫描。通过要检查的区域105的激光束106被接收到光接收装置阵列130.由光接收装置阵列130产生的输出信号中包括的脉冲串由信号处理电路206监视。如果障碍物被引入要检查的区域105中，并且在脉冲串，通过使用脉冲缺陷检测电路204检测不足。上述结构提供了能够降低制造成本而不危及故障保护性的光阻挡装置。

8. 发明授权

US5912608A Planar type electromagnetic actuator 失效
标题翻译：平面式电磁执行器
公开(公告)号：US5912608A
公开(公告)日：1999-06-15
申请号：US776457
申请日：1997-01-14
申请人： Norihiro Asada
发明人： Norihiro Asada
IPC分类号： G02B26/10 , B06B1/04 , G02B26/08 , H02K33/18 , G02B7/18 , G01R13/38
CPC分类号： G02B26/085 , G02B26/101 , H02K33/18
摘要： The present invention relates to a planar type electromagnetic actuator of two axis construction, having two movable plates (12A, 12B) with pivotal supports at right angles to each other. A pair of static magnetic field generating devices (4, 5) are arranged facing each other on either side of the movable plates (12A, 12B), and aligned with one diagonal direction of the movable plates (12A, 12B) so that a magnetic field acts on the movable plates (12A, 12B). A magnetic force due to the mutual action with a current flowing through drive coils (15A, 15B), acts on the movable plates (12A, 12B), to thus drive the movable plates (12A, 12B). As a result, the number of components for the magnetic field generating devices can be reduced, the construction of the electromagnetic actuator simplified, and construction costs reduced.
摘要翻译： PCT No.PCT / JP96 / 01149 Sec。 371日期1997年1月14日 102（e）日期1997年1月14日PCT 1996年4月26日PCT PCT。公开号WO96 / 37943 日期：1996年11月28日本发明涉及一种双轴结构的平面型电磁致动器，具有两个具有彼此成直角的枢轴支撑的可动板（12A，12B）。一对静磁场产生装置（4,5）相对于可动板（12A，12B）的任一侧彼此相对布置，并与可移动板（12A，12B）的一个对角线方向对准，使得磁场作用在可动板（12A，12B）上。由于与流过驱动线圈（15A，15B）的电流相互作用的磁力作用在可动板（12A，12B）上，从而驱动可动板（12A，12B）。结果，可以减少用于磁场产生装置的部件的数量，简化了电磁致动器的构造，并且降低了施工成本。

9. 发明授权

US06404313B2 Electromagnetic actuator 失效
标题翻译：电磁执行器
公开(公告)号：US06404313B2
公开(公告)日：2002-06-11
申请号：US09758528
申请日：2001-01-11
申请人： Norihiro Asada
发明人： Norihiro Asada
IPC分类号： G02B718
CPC分类号： G02B26/101 , B81B3/0062 , B81B2201/042 , G02B7/1821 , G02B26/085 , H01H50/005
摘要： An electromagnetic actuator includes an external movable plate formed integrally with a semiconductor substrate. A first torsion bar movably supports the movable plate with respect to the semiconductor substrate. An internal movable plate is disposed inside the external movable plate. A second torsion bar rotatably supports the internal movable plate relative to the external movable plate, and is positioned at a right angle relative to the first torsion bar; and further includes a single turn first driving coil extending around the external movable plate; a single turn second driving coil extending around the internal movable plate, and which is connected in series with the first driving coil; magnetic field generating means for applying a magnetic field to the first and second driving coils; and an optical element having an optical axis and located on the internal movable plate. A current is caused to flow through the first and second driving coils to produce a force corresponding to each coil and to each plate, the external and internal movable plates displacing in response to the corresponding coil forces applied thereto and thus vary the direction of displacement of said optical axis. In one embodiment, the single turn first and second driving coils are closed-looped. A method of manufacturing the electromagnetic actuator includes forming an aluminum layer on the semiconductor substrate by aluminum deposition; and forming the driving coils from the aluminum layer through photolithography and aluminum etching. Other embodiments are disclosed.
摘要翻译：电磁致动器包括与半导体基板一体形成的外部可动板。第一扭杆相对于半导体基板可移动地支撑可动板。内部可移动板设置在外部可动板的内部。第二扭杆相对于外部可动板可旋转地支撑内部可移动板，并且相对于第一扭杆以直角定位; 并且还包括围绕所述外部可移动板延伸的单匝第一驱动线圈; 围绕所述内部可移动板延伸并与所述第一驱动线圈串联连接的单匝第二驱动线圈; 用于向第一和第二驱动线圈施加磁场的磁场产生装置; 以及具有光轴并位于内部可移动板上的光学元件。引起电流流过第一和第二驱动线圈以产生对应于每个线圈和每个板的力，外部和内部可移动板响应于施加到其上的相应线圈力而移位，并且因此改变位移方向所述光轴。在一个实施例中，单转第一和第二驱动线圈是闭环的。制造电磁致动器的方法包括通过铝沉积在半导体衬底上形成铝层; 以及通过光刻和铝蚀刻从铝层形成驱动线圈。公开了其他实施例。

10. 发明授权

US06232861B1 Electromagnetic actuator 失效
标题翻译：电磁执行器
公开(公告)号：US06232861B1
公开(公告)日：2001-05-15
申请号：US08793386
申请日：1997-04-25
申请人： Norihiro Asada
发明人： Norihiro Asada
IPC分类号： G02B718
CPC分类号： G02B26/101 , B81B3/0062 , B81B2201/042 , G02B7/1821 , G02B26/085 , H01H50/005
摘要： An electromagnetic actuator for driving a movable plate equipped with an optical element such as a mirror on the basis of the operation principle of a galvanometer. The structure of the movable plate is simplified, and a driving coil and a wiring are formed by aluminium vapor deposition to improve durability. When an impact brings the movable plate outside the allowable rocking range of the movable plate, a stopper prevents excessive displacement of the movable plate to thereby prevent destruction of a torsion bar that supports the movable plate. Moreover, electrical connection in the torsion bar is eliminated to prolong the service life, and a production process is simplified to reduce a production cost.
摘要翻译：一种电磁致动器，用于根据检流计的工作原理驱动装有诸如反射镜的光学元件的可动板。可动板的结构简化，通过铝蒸镀法形成驱动线圈和配线，提高耐久性。当冲击将可动板移动到可动板的允许摇摆范围之外时，止动件防止可动板的过度位移，从而防止支撑可动板的扭力杆的破坏。此外，消除了扭杆中的电连接以延长使用寿命，并且简化了生产过程以降低生产成本。

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