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    • 8. 发明授权
    • Substrate having a modified native oxide layer for improved electrical conductivity
    • 底物具有改进的天然氧化物层,用于改善电导率
    • US06740420B2
    • 2004-05-25
    • US10411802
    • 2003-04-11
    • Barry MuffolettoAshish ShahDonald H. Stephenson
    • Barry MuffolettoAshish ShahDonald H. Stephenson
    • B32B1504
    • H01G4/008C23C14/5833C23C14/5893C23C16/56C23C26/00C23C26/02H01G9/042H01M4/661Y10S148/90Y10S428/926Y10S428/931Y10T428/8305
    • A method for improving the electrical conductivity of a substrate of metal, metal alloy or metal oxide comprising depositing a small or minor amount of metal or metals from Group VIIIA metals (Fe, Ru, Os, Co, Rh, Ir, Ni, Pd, Pt) or from Group IA metals (Cu, Ag, Au) on a substrate of metal, metal alloys and/or metal oxide from Group IVA metals (Ti, Zr, Hf), Group VA metals (V, Nb, Ta), Group VIA metals (Cr, Mo, W) and Al, Mn, Ni and Cu and then directing a high energy beam onto the substrate to cause an intermixing of the deposited material with the native oxide of the substrate metal or metal alloy. The native oxide layer is changed from electrically insulating to electrically conductive. The step of depositing can be carried out, for example, by ion beam assisted deposition, electron beam deposition, chemical vapor deposition, physical vapor deposition, plasma assisted, low pressure plasma and plasma spray deposition and the like. The high-energy beam can be an ion beam from a high-energy ion source or it can be a laser beam. The deposition may be performed on either treated or untreated substrate. The substrate with native oxide layer made electrically conductive is useable in the manufacture of electrodes for devices such as capacitors and batteries.
    • 1.一种用于改善金属,金属合金或金属氧化物的基底的导电性的方法,包括从ⅦA族金属(Fe,Ru,Os,Co,Rh,Ir,Ni,Pd等)中沉积少量或少量的金属或金属, Pt)或VA族金属(V,Nb,Ta)的金属,金属合金和/或金属氧化物的基底上的IA族金属(Cu,Ag,Au) 将VIA金属(Cr,Mo,W)和Al,Mn,Ni和Cu组合,然后将高能束引导到衬底上,以使沉积材料与衬底金属或金属合金的天然氧化物混合。 天然氧化物层由电绝缘转变为导电。 沉积步骤可以例如通过离子束辅助沉积,电子束沉积,化学气相沉积,物理气相沉积,等离子体辅助,低压等离子体和等离子体喷涂沉积等进行。 高能束可以是来自高能离子源的离子束,也可以是激光束。 沉积可以在处理的或未处理的基底上进行。 具有导电性的自然氧化物层的衬底可用于制造诸如电容器和电池的器件的电极。