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1. 发明授权

US07358822B2 MEMS oscillator drive 有权
标题翻译： MEMS振荡器驱动
公开(公告)号：US07358822B2
公开(公告)日：2008-04-15
申请号：US11275653
申请日：2006-01-20
申请人： Keith Aubin , Bojan (Rob) Ilic , Maxim Zalalutdinov , Robert B. Reichenbach , Jeevak M. Parpia , Harold G. Craighead
发明人： Keith Aubin , Bojan (Rob) Ilic , Maxim Zalalutdinov , Robert B. Reichenbach , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H03L1/00
CPC分类号： H03B5/30 , B81B3/0029 , B81B2203/0118 , H03H9/02259 , H03H9/2457 , H03H2009/02511
摘要： The temperature of a remote portion of device having a microelectromechanical oscillator is modulated to create oscillation of the oscillators. In one embodiment, a localized heat source is placed on a device layer of a multilayered stack, consisting of device, sacrificial and substrate layers. The localized heat source may be a laser beam in one embodiment. The oscillator is supported by the device layer and may be formed in the device layer in various embodiments. The oscillator may be spaced apart from the localized heat source.
摘要翻译：具有微机电振荡器的装置的远端部分的温度被调制以产生振荡器的振荡。在一个实施例中，将局部热源放置在由器件，牺牲层和衬底层组成的多层叠层的器件层上。在一个实施例中，局部热源可以是激光束。振荡器由器件层支撑，并且可以在各种实施例中形成在器件层中。振荡器可以与局部热源间隔开。

2. 发明授权

US08049580B2 MEMS controlled oscillator 有权
标题翻译： MEMS控制振荡器
公开(公告)号：US08049580B2
公开(公告)日：2011-11-01
申请号：US12938126
申请日：2010-11-02
申请人： Robert B. Reichenbach , Keith Aubin , Maxim Zalalutdinov , Jeevak M. Parpia , Harold G. Craighead
发明人： Robert B. Reichenbach , Keith Aubin , Maxim Zalalutdinov , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H03H9/00 , H01P7/00
CPC分类号： H03H9/02401 , G01S7/032 , H01Q3/26 , H03H3/0072 , H03H9/2436
摘要： An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.
摘要翻译：微机械振荡器阵列根据其几何形状具有不同的谐振频率。在一个实施例中，微机械振荡器具有由通过施加热来修改的有效弹簧常数限定的谐振频率。在一个实施例中，振荡器是由比该盘小得多的直径支柱支撑的材料盘。加热盘的周边以改变盘的共振频率（或等效地为弹簧常数或刚度）。当振荡器与施加的接近频率的正弦力同步时，可以实现输出相位和频率的连续控制。振荡器频率可以失谐，以在注入的信号和振荡器反馈之间产生容易控制的相位差。可以使用独立的相位可控振荡器来产生相控阵雷达。

3. 发明授权

US07843283B2 MEMS controlled oscillator 有权
标题翻译： MEMS控制振荡器
公开(公告)号：US07843283B2
公开(公告)日：2010-11-30
申请号：US11598097
申请日：2006-11-09
申请人： Robert B. Reichenbach , Keith Aubin , Maxim Zalalutdinov , Jeevak M. Parpia , Harold G. Craighead
发明人： Robert B. Reichenbach , Keith Aubin , Maxim Zalalutdinov , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H03H9/00 , H01P7/00
CPC分类号： H03H9/02401 , G01S7/032 , H01Q3/26 , H03H3/0072 , H03H9/2436
摘要： An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.
摘要翻译：微机械振荡器阵列根据其几何形状具有不同的谐振频率。在一个实施例中，微机械振荡器具有由通过施加热来修改的有效弹簧常数限定的谐振频率。在一个实施例中，振荡器是由比该盘小得多的直径支柱支撑的材料盘。加热盘的周边以改变盘的共振频率（或等效地为弹簧常数或刚度）。当振荡器与施加的接近频率的正弦力同步时，可以实现输出相位和频率的连续控制。振荡器频率可以失谐，以在注入的信号和振荡器反馈之间产生容易控制的相位差。可以使用独立的相位可控振荡器来产生相控阵雷达。

4. 发明授权

US08072117B2 Thermal-mechanical signal processing 有权
标题翻译：热机械信号处理
公开(公告)号：US08072117B2
公开(公告)日：2011-12-06
申请号：US11358917
申请日：2006-02-20
申请人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
发明人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H02N10/00 , H02N2/00
CPC分类号： H03D1/00 , G02B26/0858 , H03B5/30 , H03C1/46 , H03D1/02 , H03D3/34 , H03H3/0072 , H03H9/02259 , H03H9/2405 , H03H9/2436 , H03H2009/02488 , H03H2009/02511
摘要： A source signal is converted into a time-variant temperature field with transduction into mechanical motion. In one embodiment, the conversion of a source signal into the time-variant temperature field is provided by utilizing a micro-fabricated fast response, bolometer-type radio frequency power meter. A resonant-type micromechanical thermal actuator may be utilized for temperature read-out and demodulation.
摘要翻译：源信号被转换成具有转换为机械运动的时变温度场。在一个实施例中，通过利用微制造的快速响应，测辐射热表型射频功率计，提供源信号到时变温度场的转换。谐振型微机械热致动器可用于温度读出和解调。

5. 发明授权

US07812502B2 Shell type actuator 有权
标题翻译：外壳型执行器
公开(公告)号：US07812502B2
公开(公告)日：2010-10-12
申请号：US11358299
申请日：2006-02-20
申请人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
发明人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H02N10/00 , H01L41/04
CPC分类号： H03D1/00 , G02B26/0858 , H03B5/30 , H03C1/46 , H03D1/02 , H03D3/34 , H03H3/0072 , H03H9/02259 , H03H9/2405 , H03H9/2436 , H03H2009/02488 , H03H2009/02511
摘要： A micromechanical resonator is formed on a substrate. The resonator has a partial spherical shell clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectible out-of-plane motion. A laser is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques.
摘要翻译：在基板上形成微机械谐振器。谐振器具有夹在壳体的外部部分到基板的部分球壳。在其他实施例中，可以使用平盘或其它形状。在盘的选定部分中感应运动，引起容易检测的平面外运动。在一个实施例中使用激光器来加热盘的选定部分并且引起运动。运动可以通过电容或干涉技术来检测。

6. 发明授权

US08330323B2 Thermal-mechanical signal processing 有权
标题翻译：热机械信号处理
公开(公告)号：US08330323B2
公开(公告)日：2012-12-11
申请号：US13292658
申请日：2011-11-09
申请人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
发明人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H02N10/00 , H02N2/00
CPC分类号： H03D1/00 , G02B26/0858 , H03B5/30 , H03C1/46 , H03D1/02 , H03D3/34 , H03H3/0072 , H03H9/02259 , H03H9/2405 , H03H9/2436 , H03H2009/02488 , H03H2009/02511
摘要： A source signal is converted into a time-variant temperature field with transduction into mechanical motion. In one embodiment, the conversion of a source signal into the time-variant temperature field is provided by utilizing a micro-fabricated fast response, bolometer-type radio frequency power meter. A resonant-type micromechanical thermal actuator may be utilized for temperature read-out and demodulation.
摘要翻译：源信号被转换成具有转换为机械运动的时变温度场。在一个实施例中，通过利用微制造的快速响应，测辐射热表型射频功率计，提供源信号到时变温度场的转换。谐振型微机械热致动器可用于温度读出和解调。

7. 发明申请

US20120058741A1 THERMAL-MECHANICAL SIGNAL PROCESSING 有权
标题翻译：热机械信号处理
公开(公告)号：US20120058741A1
公开(公告)日：2012-03-08
申请号：US13292658
申请日：2011-11-09
申请人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
发明人： Maxim Zalalutdinov , Robert B. Reichenbach , Keith Aubin , Brian H. Houston , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H04B1/16 , H02N10/00
CPC分类号： H03D1/00 , G02B26/0858 , H03B5/30 , H03C1/46 , H03D1/02 , H03D3/34 , H03H3/0072 , H03H9/02259 , H03H9/2405 , H03H9/2436 , H03H2009/02488 , H03H2009/02511
摘要： A source signal is converted into a time-variant temperature field with transduction into mechanical motion. In one embodiment, the conversion of a source signal into the time-variant temperature field is provided by utilizing a micro-fabricated fast response, bolometer-type radio frequency power meter. A resonant-type micromechanical thermal actuator may be utilized for temperature read-out and demodulation.
摘要翻译：源信号被转换成具有转换为机械运动的时变温度场。在一个实施例中，通过利用微制造的快速响应，测辐射热表型射频功率计，提供源信号到时变温度场的转换。谐振型微机械热致动器可用于温度读出和解调。

8. 发明申请

US20110043405A1 MEMS CONTROLLED OSCILLATOR 有权
标题翻译： MEMS控制振荡器
公开(公告)号：US20110043405A1
公开(公告)日：2011-02-24
申请号：US12938126
申请日：2010-11-02
申请人： Robert B. Reichenbach , Keith Aubin , Maxim Zalalutdinov , Jeevak M. Parpia , Harold G. Craighead
发明人： Robert B. Reichenbach , Keith Aubin , Maxim Zalalutdinov , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H01Q3/00
CPC分类号： H03H9/02401 , G01S7/032 , H01Q3/26 , H03H3/0072 , H03H9/2436
摘要： An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.
摘要翻译：微机械振荡器阵列根据其几何形状具有不同的谐振频率。在一个实施例中，微机械振荡器具有由通过施加热来修改的有效弹簧常数限定的谐振频率。在一个实施例中，振荡器是由比该盘小得多的直径支柱支撑的材料盘。加热盘的周边以改变盘的共振频率（或等效地为弹簧常数或刚度）。当振荡器与施加的接近频率的正弦力同步时，可以实现输出相位和频率的连续控制。振荡器频率可以失谐，以在注入的信号和振荡器反馈之间产生容易控制的相位差。可以使用独立的相位可控振荡器来产生相控阵雷达。

9. 发明申请

US20090206987A1 METHODS AND SYSTEMS FOR OBJECT IDENTIFICATION AND FOR AUTHENTICATION 有权
标题翻译：用于对象识别和认证的方法和系统
公开(公告)号：US20090206987A1
公开(公告)日：2009-08-20
申请号：US12297489
申请日：2007-04-19
申请人： Keith L. Aubin , Jeffrey W. Baldwin , Harold G. Craighead , Brian H. Houston , Jeevak M. Parpia , Robert B. Reichenbach , Maxim Zalalutdinov
发明人： Keith L. Aubin , Jeffrey W. Baldwin , Harold G. Craighead , Brian H. Houston , Jeevak M. Parpia , Robert B. Reichenbach , Maxim Zalalutdinov
IPC分类号： G06F7/04
CPC分类号： G06K19/0672 , G06K7/10336 , G06K19/0723
摘要： Methods and systems for object identification and/or authentication.
摘要翻译：用于对象识别和/或认证的方法和系统。

10. 发明授权

US09007213B2 Methods and systems for object identification and for authentication 有权
标题翻译：用于物体识别和认证的方法和系统
公开(公告)号：US09007213B2
公开(公告)日：2015-04-14
申请号：US12297489
申请日：2007-04-19
申请人： Keith L. Aubin , Jeffrey W. Baldwin , Harold G. Craighead , Brian H. Houston , Jeevak M. Parpia , Robert B. Reichenbach , Maxim Zalalutdinov
发明人： Keith L. Aubin , Jeffrey W. Baldwin , Harold G. Craighead , Brian H. Houston , Jeevak M. Parpia , Robert B. Reichenbach , Maxim Zalalutdinov
IPC分类号： G08B13/14 , G06K19/067 , G06K7/10 , G06K19/07
CPC分类号： G06K19/0672 , G06K7/10336 , G06K19/0723
摘要： Methods and systems for object identification and/or authentication.
摘要翻译：用于对象识别和/或认证的方法和系统。

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